Lecture 9
Piezoelectric actuators and sensors
Department of Mechanical Engineering
Piezoelectric equations
Equations
E
Sij = sijkl
Tkl + dkij Ek
Dj = dikl Tkl + Tjk Ek
E
Tij = cijkl
Skl ekij Ek
D j = eikl Skl + Sjk Ek
E
D
sijkl
, sijkl
E
D
cijkl
, cijkl
Sjk , Tjk
,
S
jk
T
jk
i,j,k,l = 1 to 3
D
Sij = sijkl
Tkl + gkij Dk
E j = gikl Tkl + Tjk Dk
D
Tij = cijkl
Skl hkij Dk
E j = hikl Skl + Sjk Dk
elastic compliance at constant electrical field and constant
electrical displacement conditions
elastic stiffness at constant electrical field and constant
electric displacement conditions
dielectric permittivity at constant strain and constant stress conditions
dielectric impermittivity at constant strain and
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constant stress conditions
Piezoelectric equations
Equations
piezoelectric coefficients which represent
piezoelectric coupling between the electrical and
mechanical variables
dijk , eijk , gijk , and hikl
E
dijk = eilm slmjk
= gljk ilT
E
e ijk = d ilm c lmjk
= hljk ilS
gijk = h s
D
ilm lmjk
= dljk
T
il
D
hijk = gilmclmjk
= eljk ilS
For a particular problem, the choice of
which coefficient to use becomes clear
when the boundary conditions of the
materials are considered.
In compressed matrix notation, ij and kl
is replaced by p and q with
11 1;
23, 32 4;
22 2,
13, 31 5; thus p, q = 1 to 6.
33 3;
12, 21 6;
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Piezo-Micropumps
Pump structures
(a)
(b)
Principle set-up of a "piston type"
micropump.
Schematic set-up of the saliva dispensing
micropump of "Graphosoma lineatum".
A micro diaphragm pump with active
valves
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Piezo-Micropumps
Pump structures
A planar peristaltic micropump
Micro diaphragm pump with
piezoelectric actuation
Electrostatically actuated
micro diaphragm pump
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Piezo-Micropumps
Pump structures
Valve-less micro diaphragm pump with
piezoelectric actuation: schematic diagram,
and pumping principle
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Piezo-Micropumps
Pump structures
A compact pump and integrated microvalves
Li et al, 1 of 2
Sensors and Actuators A: Physical
Volume 11, 2005, pp.325-330
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Piezoelectric accelerometers
Accelerometer structures
A Schematic piezoelectric thin film
micro-accelerometer
Piezoelectric thin film elements are connected in (a) series or (b) in parallel.
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Piezoelectric accelerometers
Accelerometer structures
Applying an acceleration along the z direction, one
piezoelectric layer is compressed while the other is
extended due to the intrinsic mass of each device.
When subjected to applied
acceleration
(a) parallel and (b) serial connection of
the two sensing elements
When subjected to the
temperature change
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Piezoelectric accelerometers
Accelerometer structures
When subjected to the
temperature change
An aluminum case containing the
sensing elements and the electronics
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Piezoelectric shear stress sensor
Sensor structures
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Piezoelectric devices
Optical beam deflector
Schematic of the optical beam deflector. Big arrows indicate the
direction of the polarization of the piezoceramics.
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Piezoelectric resonator
Beam resonators
Sensors and Actuators A: Physical
Volume 118, 2005, pp.63-69
Ferguson and DeVoe
Fundamental resonator mode
shapes from composite
ANSYS analysis: (a) freefree
flexural beam, and (b)
torsional anchor.
Theoretical, finite element, and
experimental resonance
frequencies for fabricated
freefree resonator structures
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Thin film resonators
Thin film resonator
Principle of BAW resonator operation: A longitudinal
standing acoustic wave is excited electrically in a thin
piezoelectric film. The layer thickness of the piezoelectric
film and of the electrodes determines the resonance
frequency of the BAW resonator.
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Thin film acoustic wave resonators
AlN FBAR
XRD pattern of AlN film
Micro-machined FBAR fabrication process flow
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Thin film acoustic wave resonators
Thin film resonator
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Thin film resonator and filter
Thin film resonator and filter
BAW filter principle: the electrical impedance curve of the
parallel resonator p is shifted in frequency relative to the
series resonator s by f=fafr. This creates a band-pass
filter characteristics in S21
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Acoustic wave sensors
QCM for sensors
NO2 gas sensor
BVD equivalent circuit for an unperturbed
AT-cut quartz resonator (a) or modified
BVD equivalent circuit for a loaded ATcut quartz crystal resonator (b).
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Piezoelectric devices
Bimorph beam
splitter
Unimorph
pressure sensor
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Piezoelectric devices
Vibration sensor
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Piezoelectric devices
For surface roughness
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Piezoelectric devices
For AFM cantilever
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Piezoelectric devices
Scanning tunneling microscopy
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Piezoelectric devices
Data read/write cantilever
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Piezoelectric devices
Multilayer actuators
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Piezoelectric devices
Mechanical amplifier
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Piezoelectric devices
Mechanical amplifier
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Piezoelectric devices
Impact drive mechanism using piezoelectric actuator
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Piezoelectric devices
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Piezoelectric devices
A micro gripper using
unimorph actuator
Swimming device
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Piezoelectric devices
A dynamic focusing lens
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Piezoelectric devices
A dynamic focusing lens
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