OUTLINE

• Induction of machining quality of productions
Introduction of Geometrical Errors for a  • Error sources of machine tool
Machine Tool and Error Compensation  • Definition and evaluation of errors
Technology • Measurements of geometrical errors
Measurements of geometrical errors
• Error compensation technology
• Variance of analysis
J. J. Junz Wang 
ME NCKU
ME, NCKU

1 2

Conventional Machine Tools

Conventional Machine Tools

• Among the basic machine tools:
– Lathe, shaper, planer and milling machine, drilling 
, p ,p g , g
Induction of Machining Quality of 
Induction of Machining Quality of
and boring, grinders, saws.
Productions
• Lathe
• Oldest and most common type of turning machine, 
holds and rotates metal or wood while cutting tool
holds and rotates metal or wood while cutting tool 
shapes material. 

3 4
 Conventional Machine Tools
Conventional Machine Tools Conventional Machine Tools contd
Conventional Machine Tools‐contd.

• CNC milling machines ( 5 axis)
– The manual programming or command generation 
p g g g
is nearly impossible.
– Thus, they are practically always programmed 
Thus they are practically always programmed
with CAM.
• Computer‐Aided
Computer‐Aided Manufacturing
Manufacturing is the software used 
is the software used
to generate the instruction codes for a CNC machine in 
order for it to cut out a shape designed in a Computer‐
p g p
Aided Design (CAD) system.

Cylinder Head manufacture using 5-axis CNC machine

5 6

Micro‐EDM Process

Si bevel gear Si S
S-shaped
shaped beam
Which quality of work is the most important?

7 8
Microgripper jaw with force sensor Steel micropropeller
 Error Budget in a Machine Tool
Error Budget in a Machine Tool

Error Sources for a Machine Tool

9 Source: Ramesh et al., Int. J Mach, Tools Manuf., 40, 1235‐1256 10

Machine Tool Performance Testing

Machine Tool Performance Testing Machine Tool Performance Testing contd
Machine Tool Performance Testing‐contd.

• Th
The response of the machine to the installation 
f h hi h i ll i • Th
The error motion of spindle has to be measured 
ti f i dl h t b d
environment has to be measured (Vibrations,  dynamically.
Temperature Variation Error etc )
Temperature Variation Error etc.) • The response of the machine to internal heat sources 
The response of the machine to internal heat sources
• Linear positioning errors at key locations have to be  such as spindles and axes drives has to be measured.
measured. • The contouring capability of the machine tool has to be 
measured using as many axes as possible. (Ex: circle test)
d i ibl (E i l )
• Angular positioning errors at key locations have to be 
• The cutting performance (in case of machining centers) 
measured. has to be measured using specified cutting tests
has to be measured using specified cutting tests.
• The critical machine alignments have to be measured  • The short‐term reliability of the machine must also be 
(i.e., squareness and parallelism) measured. 

11 12
 Uncertainty of Nominal Differential Expansion 
Thermal Error Index
Thermal Error Index
(UNDE)
• Th
The thermal error index (TEI) for a machine and its 
h l i d (TEI) f hi di • The length (or size) of mechanical parts is defined by 
environment has two components international law at a temperature of 20 oC (68 oF)
– the uncertainty of nominal differential expansion 
the uncertainty of nominal differential expansion
(UNDE) • The thermal expansion coefficients of materials have 
– the temperature variation error (TVE)
the temperature variation error (TVE) uncertainties of approximately 1 ppm.
• The UNDE is a measure of the machine to make accurate  • Correction to the defined temperature therefore 
parts in its environment due to an ‘incorrect’
parts in its environment due to an  incorrect  mean 
mean co a s u ce a es a us be ecog ed a d
contains uncertainties that must be recognized and 
temperature. quantified.
• The TVE is a measure of positional drift due to 
p
environmental temperature changes.

13 14

Temperature Variation Error (TVE)

Temperature Variation Error (TVE) Drift Test
Drift Test

• It
It is also known as the 
is also known as the “drift”
drift  
test.
Spindle
• The structural loop of a 
The str ct ral loop of a Test Sphere
machining center responds 
to changes in the ambient
to changes in the ambient 
temperature and gradients, 
causing unmeasured changes
causing unmeasured changes 
in relative position of tool  Table
LVDT’s/
Capacitance
and workpiece.
p Gages

• This test is performed over a 
p
period of time to measure 
these errors. 15 16
 Geometrical Errors in a Machine tool
Geometrical Errors in a Machine tool Displacement Accuracy
Displacement Accuracy
• The displacement accuracy is performed with a laser 
Z interferometer corrected for atmospheric conditions.
Z straightness of X • The linear displacement accuracy is essential for correct 
yyaw
performance of the machine tool.
roll Three axis machine • The linear positioning accuracy is checked through the center of 
X th
the work zone on machining centers.
k hi i t
Linear  error 1 x 3 = 3
• The test is usually performed both uni‐directionally and bi‐
pitch g
Straightness 2 x 3 = 6
directionally.
directionally
Angular error 3 x 3 = 9
Y Y straightness of X
Squareness = 3

Total 21
Linear Position Accuracy
17 18

Linear Displacement Accuracy

Linear Displacement Accuracy Straightness Errors
Straightness Errors

• Straightness errors are caused when a linear axis deviates 
towards the other two axes when moving along a straight 
line.

19 20
 Angular Errors of Linear Axis Motion
Angular Errors of Linear Axis Motion Squareness Error between the Axes
Error between the Axes

• When the linear axes  • For a linear axis, squareness is the angular deviation from 

move they also rotate
move they also rotate  90 degrees measured between the best fit lines drawn 
through small angles.  through two sets of straightness data derived from two 
These angular motions 
g orthogonal axes.
are known as pitch, yaw 
Y
and roll.
• Angular errors can lead to  Straightness data
large positioning errors 
Least squares fit
Least squares fit
due to Abbe’s offsets.
θ

X
21 22

Definition of Accuracy 
(By American National Bureau of Standards, NBS)
• Accuracy is the ability to tell the truth or:
Accuracy is the ability to tell the truth or:
– Accuracy can be represented as the difference between 
the root mean square radius of all bullet holes in a target
the root mean square radius of all bullet holes in a target 
Definition and Evaluation of Errors and the radius of the bull’s eye. 
– Linear, planar, and volumetric accuracy can all be defined 
Linear, planar, and volumetric accuracy can all be defined
for a machine.

23 24
 Definition of Accuracy‐contd.
Definition of Accuracy contd Definition of Accuracyy‐contd.
• Resolution is how detailed your story is
• Repeatability (Precision) is the ability to tell the same 
p y( ) y
– Th
The smallest
ll discernible change in the parameter of 
di ibl h i h f
story over and over again or: interest that can be detected by the instrument, 
– The error between a number of successive attempts to 
p
– The smallest
The smallest positional increment that can be commanded 
positional increment that can be commanded
move the machine to the same position.
of a motion control system, 
– Repeatability is often considered to be the most important 
– The smallest programmable step, 
The smallest programmable step
parameter of a computer controlled machine (or sensor).
– The smallest mechanical step the machine can make 
during point to point motion.
during point to point motion.

25 26

Accuracy and Repeatability

Accuracy and Repeatability 單目標點單向定位及其平均值(
單目標點單向定位及其平均值(mean)
)
Accuracy is the ability to tell the truth. And, repeatability (Precision) 
i h bili
is the ability to tell the same story over and over again. As shown in 
ll h d i h i
following figures, poor precision may cause poor accuracy to 
machine tool when the average radius of bullet holes to target is
machine tool when the average radius of bullet holes to target is  „ x 為目標位置
close to zero.
„將所有點資料加總後除以樣本個數可
得到所有點資料的平均位置 x
„ Δx 為所有資料的平均偏移量(mean 
deviation)

Poor accuracy Poor accuracy Good accuracy

Poor precision Good precision Good precision

After Before After 27 28

correction
 平均偏移量 (mean deviation)計算
(mean deviation)計算 單點定位的頻率圖 (frequency plot)
(frequency plot)

目標位置 0.1213 (in)

Run Deviation(μin)
1 40
2 30
3 20
4 10
60

(μin ) 40
5 -10 20

Deviation
data
0

6 -30 -20
20
mean
„ Δx 為所有資料的平均偏移量 (mean deviation)
( )
-40
7 -40 -60 „ Δx 跟準確度(accuracy)有關
0 0.05 0.1 0.15
Δx 3 Poistion (in)

29 30

標準差 (standard deviation) &重現性
( t d d d i ti ) &重現性 (repeatability)
( t bilit ) 重現性 (repeatability) 計算
( t bilit ) 計算

目標位置 0.1213 (in)

Run Deviation(μin)

1 40
2 30
3 20
4 10
• X ′真實位置
X=
∑ X′ • X 真實位置的平均值
5 -10
N • N 取樣次數 6 -30

3σˆ = 3
∑(X ′ − X ) 2
• 3σˆ is dispersion on each side  7 -40
N −1 of the mean
of the mean Δx 3
31 3σˆ 91 32
 單目標點單向定位的準確度 &重現性 多目標點單向定位及其平均值(
多目標點單向定位及其平均值(mean)
)

„ xi為目標位置
„將所有點資料加總後除以樣本

個數可得到所有點資料的平均位
置 x
i
„ Δxi
為所有資料的平均偏移量
(mean deviation)
1 1 2 2

34
33 1 2

平均偏移量 (mean deviation) 計算 重現性 (repeatability)

目標位 0.1213 3.9439 7.5601 13.3727 22.0005 26.4583

置 600

Run Deviation
i i 400
(μin )
1 40 270 -420 370 400 420 200
D e v ia tio n

2 30 240 -420 370 370 400 0

3 20 240 -430
430 380 350 390 -200
4 10 240 -450 340 350 400 -400 1 1 2 2
5 -10 210 -410 360 350 360
-600
6 -30 210 -470 340 330 360 1 2
0 5 10 15 20 25 30
7 -40 190 -480 310 320 350
Poistion (in ) 1 1 2 2
3 229 -440 353 353 383
Δx
以所有目標位置所對應的重現性當中最大的值
„
當作多目標點單向定位的重現性

35 36
 機器的定位為單向 (Unidirectional) 或
同時考慮兩個單向亦即雙向 (Bidirectional) 單目標點雙向定位及其平均值(mean)

單向： • 得到雙向的點資料，該如何處理平均值?
1 當作一大群單筆資料
1.當作一大群單筆資料
2.將正方向及負方向的點資料分兩群處理

雙向：

• ↑ or ↓ ‐ 正方向或負方向

37 38

將雙向的點資料分別處理 將雙向的點資料當作一筆資料
平均值 (mean value) 處理平均值 (mean value) 平均偏移量 (mean deviation)
( d i ti ) 計算

目標位置 0.1213
50

(μin ) 0
Forward Reverse
forward data
Run Deviation

Deviation
-50 forward mean
f r b -100 reverse data

-150
reverse mean 1 40 -40
f b
-200
0 0.05 0.1 0.15
2 30 -60
r Poistion (in ) 3 20 -80
„ x 為目標位置
4 10 -90
50
將所有點資料加總後除以樣本
„
(μin ) 0 5 -10 -130
個數可得到所有點資料的平均位
ation

-50
x data
6 -30
30 -130
130
Deviat

置 xj -100 mean

„ Δx j為所有資料的平均偏移量 -150
7 -40 -160
-200
((mean deviation)) 0 0 05
0.05 01
0.1 0 15
0.15 Δx f / Δxr 3 -99
99
Poistion (in )
39
Δxb -48 40
 重現性 (repeatability)
失步 (lost motion)
(l t ti )

„當分別處理兩筆數據的時候， 將雙向的點資料分別處理 將雙向的點資料當作一筆資料處理

其平均值會有所差異，因此會
其平均值會有所差異 因此會
有失步產生
„產生原因為背隙 (backlash)或

延滯 ((hysteresis)
y )

f r
b

f b
f f
b b
r

r r
xf xr
„ 單向定位的重現性 „ 雙向定位的重現性

41 42

重現性 (repeatability) 計算
(repeatabilit ) 計算 準確度 (accuracy)

將雙向的點資料分別處理 將雙向的點資料當作一筆資料處理

目標位置 0.1213 (in)

Forward Reverse
Run Deviation(μin)
1 40 -40
2 30 -60
60
3 20 -80
4 10 -90
5 -10 -130
6 -30 -130 „準確度 (accuracy) 在單目標點雙向 因此有所謂的單向準確度及雙向
„

7 -40
40 -160
160 定位的過程中亦可解釋為不確定度 準確度
x f / xr 3 -99 (uncertainty)
3σˆ f / 3σˆ r 91 129 其定義為 (mean+3s) & (mean‐3s)之
„

3σˆ b 191 間的最大寬度

43 44
 平均值 (mean)
多目標點雙向定位及其平均值(
多目標點雙向定位及其平均值(mean)
)

„ 得到雙向的點資料，該如何
處理平均值？ 將雙向的點資料分別處理
1.當作一大群單筆資料 平均值 (mean)
2.將正方向及負方向的點資料分 1 1f 1r 2f 2 2r
兩群處理
1f 2f 2r

1r

將雙向的點資料當作一筆
資料處理平均值 (mean )

1 2
1 1b 2 2b

45 46
1b 2b

重現性 (repeatability) 重現性 (repeatability) &準確度 (accuracy) 計算

(repeatability) &準確度 (accuracy) 計算

將雙向的點資 „ 以所有目標位置所對應 600

„準確度 (accuracy) 在多目標點雙向
料分別處理 (μin )
400 mean forward 定位的過程中亦可解釋為不確定度
的重現性當中最大的值 200 mean forward+3s
(uncertainty)

Deviation
0 mean forward-3s

當作多目標點單向定位 -200 mean reverse

1 1f 1r 2 2f 2r -400 mean reverse+3s 其定義為 (mean+3s) & (mean‐3s)之
„
-600 mean reverse-3s
1f 2f 的重現性 -800 間的最大寬度
1f 1f 2f 2f 0.121 3.944 7.56 13.37 22 26.46

1r 2r Position (in ) „因此有所謂的單向準確度及雙向準

1r 1r 2r 2r „ 以所有目標位置所對應 確度

的重現性當中最大的值 1500

將雙向的點資料 (μin ) 1000

mean

當作一筆資料處理 當作多目標點雙向定位 500 mean+3s

ation
Devia

0 mean-3s
3

的重現性 -500

-1000

1 1b 2 2b -1500
0 1213 3.9439
0.1213 3 9439 7.5601
7 5601 13.373
13 373 22.001
22 001 26.458
26 458
1b 2b Position (in )

1b 1b 2b 2b 47 48
 工具機常用的檢驗標準 各國工具機標準名稱

• NMTBA 
NMTBA 1968, 1972
1968 1972
( National Machine Tool Builders Association ) ‐ United States • NMTBA
Definition and evaluation of accuracyy and repeatability
p y for 
• VDI/DGQ 3441 
VDI/DGQ 3441 1977, 1982
1977 1982 numerically controlled machine tools
(Verein Deutscher Ingenieure ) ‐ Germany • ISO 230‐2
• ISO 230‐2
ISO 230 2 1988, 1997
1988 1997 Test code for machine tools ‐
d f hi l Part 2
( International Organization for Standardization ) Determination of accuracy and repeatability of positioning numerically 
controlled axes
• ASME B5.54 
ASME B5 54 1992, 2005
1992 2005 • ASME B5.54
( The American Society of Mechanical Engineers ) ‐ United  Methods for performance evaluation of computer numerically 
States controlled machining centers
controlled machining centers
• VDI/DGQ 3441
Statistical testing of the operational and positional accuracy of 
machine Tools
hi T l
49 50

Lost Motion
Lost Motion

„ The distance between the 
right‐
i h and left‐
d l f approach    
h
NMTBA means at any given  
target point
target point

51 52
 Lost Motion
Lost Motion Repeatability

• Dispersion on each side of the mean

Right Left
1 4.492026
9 0 6 5.79874
5 98
2 4.532614 5.407237
Lost Motion :
3 4.190211 5.225438 4.119783 5 232587 = 1.1128044
4 119783 - 5.232587 1 1128044
4 3.832765 4.970977
5 3.551299 4.760545
ΔX u 4.119783 5.232587

53 Unidirectional repeatability Bidirectional repeatability 54

Accuracy
E
Example
l

Right Left

1 4.492026 5.79874 • Accuracy (A)

2 4.532614 5.407237 Au = ΔX u ± 3σˆ u
3 4 190211
4.190211 5 225438
5.225438 Ab = ΔX b ± 3σˆ b
4 3.832765 4.970977
5 3 551299
3.551299 4 760545
4.760545

3σˆ u 1.272357066 1.20219773

3σˆ b 2.111323815

55 56
 Accuracy Evaluation of Machine Accuracy
Evaluation of Machine Accuracy

• After A has been 
determined for a 
determined for a • As is based value of accuracy.
is based value of accuracy
number of points, 
two extremes of A are  • Bs is the specified distance of As.
averaged to
averaged to  • For a longer travel, the 
For a longer travel the
determine a “zero”
specification may include an 
additional allowance Cs per 
additional allowance C per
additional unit length.

57 58

Example : Deviation from target

( μin )
The extremes of the ΔXu ± 3σˆ u data are:
Point NO. Target position 1 2 3 4 5 6 7
maximum = 349 (point4)
1 -14.7993 109 -2 11 92 44 3 -91
minimum = -819 819 (point20)
2 -9.4491 108 -16 80 7 99 28 65
the zero shift will then be
4 -2.0725 87 -186 89 51 105 -11 102
349 819
349-819
19 45.6279 -611 -726 -583 -585 -524 -668 -604 = −235
2
20 48.9045 -732 -717 -685 -700 -691 -720 -784
Before zero shift After zero shift
Point NO. ∑X 3σˆ u ΔX u ΔXu −3σˆu ΔXu + 3σˆ u The extremes of the
point NO. ∑X 3σˆ u ΔX u ΔXu −3σˆu ΔXu + 3σˆ u ΔX u ΔX u − 3σˆ u ΔX u + 3σˆ u
1 166 200 24 -176
176 224 ΔX u ± 3σˆ u data are ：
data are ：
1 166 200 24 -176 224 259 59 459
2 371 142 53 -89 195 „ maximum = 349 (point 4)
2 371 142 53 -89 195 288 146 430
4 237 315 34 -281 349 „ minimum
i i = ‐819 (point 20)
819 ( i 20) 4 237 315 34 -281 349 269 -46 584
19 -4301 195 -614 -809 -419
19 -4301 195 -614 -809 -419 -379 -574 -184
20 -5029 100 -719 -819 -619
20 -5029 100 -719 -819 -619 -484 -584 -384
59 60
 R lt 2：f
Result 2：for additional length
dditi l l th
Result 1

• Accuracy specification were 
„ The maximum  ΔX u + 3σˆ u is  ± 600 (μin )
584 (μin ) • Accuracy specification were 
„ minimum ΔX u − 3σˆ u is
The minimum                  is
The ± 500 (μin ) in a foot ± 100 (μin )
in each additional foot
‐ 584 (μin )

„ Accuracy specification were

Accuracy specification were 
± 600 (μin )

61 62

ISO 230
Test code for machine tools

ISO 230 is standard method of testing the accuracy of machine  • ISO 230‐4 循圓測試
tool. – 了解兩軸以上同動時的軌跡精度
• 230‐ 1  Part 1: Geometric accuracy of machines operating under no‐load 
or finishing conditions. – 分析進給系統的動態特性
• ISO 230‐6對角線位移測試
ISO 230 6對角線位移測試
• 230‐ 2  Part 2: – 評估機器的空間性能
Determination of accuracy and repeatability of  – 節省時間及成本
positioning numerically controlled axes
• 230‐ 3  Part 3: Determination of thermal effects 
• 230‐ 4  Part 4: Circular tests for numerically controlled machine tools 
• 230‐ 5  Part 5: Determination of the noise emission 
• p g y y
230‐ 6  Part 6: Determination of positioning accuracy on body and face 
diagonals
63 64
 Test Procedure
Test Procedure

• Tests for linear axes up to 2000 mm
ISO 230 ‐ 2 – A minimum of five
A minimum of five target positions 
target positions
per meter
– With an overall minimum of five
target positions
– Each target position shall be attained 
Determination of 
five times in each direction
accuracy and repeatability of  • Tests for linear axes exceeding 2000 mm
positioning numerically controlled axes
positioning numerically controlled axes – Target positions selected with an  average 
Target positions selected with an average
interval length of 250 mm

65 66

Positional Deviation
os t o a e at o

Mean unidirectional positional 
„
Positive ↑ Negative ↓ Positive ↑
deviation at a position ΔX u = (4.492026 + 4.532614
1 n 1 4.492026 5.79874
x i ↑= ∑ x ij ↑
n j =1 2 4.532614 5.407237
+ 4.190211 + 3.832765
+ 3.551299)/5 = 4.119783
1 n
3 4.190211 5.225438 N ti ↓
Negative
x i ↓=
n
∑ x ij ↓
ΔX u = (5.79874 + 5.407237
j =1 4 3.832765 4.970977
bidirectional
bidirectional        + 5.225438 + 4.970977
„ 5 3 551299
3.551299 4 760545
4.760545
+ 4.760545)/5 = 5.232587
x ↑ + xi ↓ xi ↑ / xi ↓ 4.119783 5.232587
xi = i Bidirectional
2 xi 4.6761852
ΔX b = (4.119783 + 5.232587)/2
= 5.232587

67 68
 Reversal Value
Reversal Value

• Reversal value at a position Positive ↑ Negative ↓ Reversal value at a position:

Bi = x i ↑ − x i ↓ 1 4.492026 5.79874 Bi = x i ↑ − x i ↓
2 4.532614 5.407237 = 4.119783 - 5.232587
• Reversal value  of an axis 3 4.190211 5.225438
= −1.1128044
4 3.832765 4.970977
B = max[ Bi ] 5 3 551299
3.551299 4 760545
4.760545
• Mean reversal value  of an axis xi ↑ / xi ↓ 4.119783 5.232587
1 m
B= ∑ Bi
m i =1

69 70

Standard Uncertainty
Standard Uncertainty Repeatability

• Unidirectional standard  • Unidirectional repeatability 
uncertainty at a position at a position
Ri ↑= 4 si ↑ ; Ri ↓= 4 si ↓
1
(x ij ↑ − x i ↑ )2
n
s i ↑= ∑
n − 1 j =1 „ Bidirectional repeatability  
at a position
1
(x ij ↓ − x i ↓ )
n

∑
2
s i ↓= Ri = max ⎡⎣ 2si ↑ +2si ↓ + Bi ; Ri ↑; Ri ↓ ⎤⎦
n − 1 j =1
„ Unidirectional repeatability 
U idi ti l t bilit
of an axis
R ↑= max Ri ↑ [ ] R ↓= max Ri ↓[ ]
„ Bidirectional repeatability
of an axis
R = max[Ri ]
71 72
 1 2 3

Pos ↑ Neg ↓ Pos ↑ Neg ↓ Pos ↑ Neg ↓

1 4.492026 5.79874 8.566713 9.81866 10.32070 11.00806

2 4.532614 5.407237 8.471852 9.619713 10.28639 10.70958
Positive ↑ Negative↓ „ Unidirectional repeatability 
at a position 3 4.190211 5.225438 8.425074 9.279222 10.32760 10.57642
1 4.492026 5.79874 Ri ↑= 4si ↑= 1.69647608 4 3.832765 4.970977 7.945062 9.18549 9.894999 10.37214
2 4.532614 5.407237 Ri ↓= 4si ↓= 1.602930308 5 3.551299 4.760545 7.909447 9.056468 9.648938 10.28608
3 4.190211 5.225438 „ Bidirectional repeatability   Ri ↑ / Ri ↓ 1.696476
1 696476 1.602930
1 602930 1.246131
1 246131 1.267815
1 267815 1.233934
1 233934 1.147325
1 147325
4 3.832765 4.970977 at a position 2.762507598 2.385254486 1.685365592
[ ]
Ri
5 3 551299
3.551299 4 760545
4.760545 Ri = max 2 si ↑ +2 si ↓ + Bi ; Ri ↑; Ri ↓ Bidirectional repeatability
„Unidirectional repeatability  „

si ↑ / si ↓ 0.42411902 0.400732577 = max[2.762507598 ; 1.69647608; of an axis of an axis

1 602930308]
1.60293030 [ ]
R ↑= max Ri ↑ = 1.696476
1 696476 R = max[Ri ] = 2.76250759
2 76250759 8
= 2.762507598 R ↓= max [R ↓] = 1.602930
i

73 74

1 2 3
Systematic Positional Deviation
Systematic Positional Deviation Pos ↑ Neg ↓ Pos ↑ Neg ↓ Pos ↑ Neg ↓

1 4.492026 5.79874 8.566713 9.81866 10.32070 11.00806

2 4.532614 5.407237 8.471852 9.619713 10.28639 10.70958
• Unidirectional systematic 
positional deviation of an  3 4.190211 5.225438 8.425074 9.279222 10.32760 10.57642
axis 4 3.832765 4.970977 7.945062 9.18549 9.894999 10.37214
[ ] [ ]
E ↑= max x i ↑ − min x i ↑ 5 3.551299 4.760545 7.909447 9.056468 9.648938 10.28608
E ↓= max [x ↓] − min [x ↓]
i i
xi ↑ / xi ↓ 4 119783 5.232587
4.119783 5 232587 8.263629
8 263629 9.391910
9 391910 10.09572
10 09572 10.59046
10 59046
„ Bidirectional systematic 
positional deviation of an  xi 4.6761852 8.8277701 10.3430959
axis
Unidirectional systematic „ Bidirectional systematic „ Mean bidirectional systematic
[ ] [ ]
•
E = max x i ↑; x i ↓ − min x i ↑; x i ↓ positional deviation of an  positional deviation of an  positional deviation of an axis
↑ max [x i ↑ ]− min [x i ↑ ]
„ Mean bidirectional systematic
Mean bidirectional systematic  axis E ↑= axis
positional deviation of an axis
= 10.09572 - 4.119783 [ ] [
E = max x i ↑; x i ↓ − min x i ↑; x i ↓ ] [ ] [ ]
M = max x i − min x i

[ ]
M = max x i − min x i[ ] = 5.975937
E ↓= [ ] [ ]
↓ max x i ↓ − min x i ↓
= 10.59046 - 4.119783
= 6.47067
= 10.3430959 - 4.6761852
= 5.6669107
= 10.59046 - 5.232587
75 76
= 5.357873
 1 2 3
Accuracy Pos ↑ Neg ↓ Pos ↑ Neg ↓ Pos ↑ Neg ↓

1 4.492026 5.79874 8.566713 9.81866 10.32070 11.00806

2 4.532614 5.407237 8.471852 9.619713 10.28639 10.70958
• Unidirectional accuracy of an  3 4.190211 5.225438 8.425074 9.279222 10.32760 10.57642
axis
4 3.832765 4.970977 7.945062 9.18549 9.894999 10.37214
[ ] [ ]
A ↑= max x i ↑ +2si ↑ − min x i ↑ −2si ↑
5 3.551299 4.760545 7.909447 9.056468 9.648938 10.28608
↓= max[x ↓ +2s ↓]− min[x ↓ −2s ↓]
A↓ x i ↑ +2si ↑ /
i i i i
4 968021 6.034052
4.968021 6 034052 8.886695
8 886695 10.02581
10 02581 10.71269
10 71269 11 16412639
11.16412639
„ Bidirectional accuracy of an  x i ↓ +2si ↓
axis x i ↑ −2si ↑ / 3.271544 4.431122 7.640563 8.758002 9.478760 10.01680081
[ ]
A = max x i ↑ +2si ↑; x i ↓ +2si ↓ x i ↓ −2si ↓
− min[x ↑ −2s ↑; x ↓ −2s ↓]
i i i i • Unidirectional accuracy of an axis„ Bidirectional accuracy of an axis
A ↑=
↑ max [ ] [
ma x i ↑ +2si ↑ − min x i ↑ −2si ↑ ]
= 10. 71269 - 3.271544 [
A = max x i ↑ +2si ↑; x i ↓ +2si ↓ ]
= 7.4411
[ ] [
A ↓= max x i ↓ +2si ↓ − min x i ↓ −2si ↓ ] [
− min x i ↑ −2si ↑; x i ↓ −2si ↓ ]
= 11.16412639 - 3.271544
= 11.16412639 - 4.431122
77 = 6.733
= 7.8925 78

ASME B5.54 ‐ 2005 VDI/DGQ 3441

ASME B5.54 is almost the same as 
ASME B5.54 is almost the same as
ISO 230 ‐ 2 standard

79 80
 Reversal Error
Reversal Error

• Reversal error at a position Positive ↑ Negative ↓ Reversal error at position:

U j = x j ↓ −x j ↑ 1 4.492026 5.79874
U j = x j ↑ −x j ↓
2 4.532614 5.407237
= 4.119783 - 5.232587
3 4.190211 5.225438
= 1.1128044
4 3.832765 4.970977
5 3 551299
3.551299 4 760545
4.760545
xj ↑ / xj ↓ 4.119783 5.232587

81 82

Positional Scatter
Positional Scatter

• Mean standard deviation at a  „ Mean standard deviation at a 
position Positive ↑ Negative ↓
position
s j ↑ +s j ↓ 1 4.492026 5.79874 s j ↑ +s j ↓
sj =
sj = 2 4.532614 5.407237 2
2 0.42411902 + 0.400732577
„ P iti
Positional scatter at a position
l tt t iti 3 4.190211 5.225438 =
2
Ps j = 6 ⋅ s j 4 3.832765 4.970977 = 0.412425799
„ Maximum positional scatter
Maximum positional scatter  5 3 551299
3.551299 4 760545
4.760545 „ P iti
Positional scatter at a position
l tt t iti
Ps max = Ps j max s j ↑ / s j ↓ 0.42411902 0.400732577 Ps j = 6 ⋅ s j = 2 .474554796

83 84
 1 2 3
Positional Deviation
Positional Deviation Pos ↑ Neg ↓ Pos ↑ Neg ↓ Pos ↑ Neg ↓

1 4.492026 5.79874 8.566713 9.81866 10.32070 11.00806

2 4.532614 5.407237 8.471852 9.619713 10.28639 10.70958
• Positional deviation 3 4.190211 5.225438 8.425074 9.279222 10.32760 10.57642
4 3.832765 4.970977 7.945062 9.18549 9.894999 10.37214
Pa = x jmax − x jmin
5 3.551299 4.760545 7.909447 9.056468 9.648938 10.28608
x j ↑ / x j ↓ 4.119783
4 119783 5.232587
5 232587 8.263629
8 263629 9.391910
9 391910 10.09572
10 09572 10.59046
10 59046

xj 4.6761852 8.8277701 10.3430959

„ Positional deviation

Pa = x jmax − x jmin
= 10.3430959 - 4.6761852
= 5.6669107
85 86

1 2 3
Positional Uncertainty
Positional Uncertainty Pos ↑ Neg ↓ Pos ↑ Neg ↓ Pos ↑ Neg ↓

1 4.492026 5.79874 8.566713 9.81866 10.32070 11.00806

2 4.532614 5.407237 8.471852 9.619713 10.28639 10.70958
• Positional uncertainty 3 4.190211 5.225438 8.425074 9.279222 10.32760 10.57642
⎡ 1
(
P = ⎢ x j + U j + Ps j
2
)⎤⎥ 4
5
3.832765 4.970977 7.945062 9.18549 9.894999 10.37214
3.551299 4.760545 7.909447 9.056468 9.648938 10.28608
⎣ ⎦ max
⎡ 1
(
− ⎢ x j − U j + Ps j )⎤ 1
(
x j + U j + Ps j ) 6 469864798
6.469864798 10 33464072
10.33464072 11 48343624
11.48343624
2 ⎥ 2
⎣ ⎦ min 1
(
x j − U j + Ps j
2
) 2.882505602 7.320899485 9.202755556

• Positional uncertainty
⎡ 1
2
( ⎤
) ⎡ 1
( ⎤
P = ⎢ x j + U j + Ps j ⎥ − ⎢ x j − U j + Ps j ⎥
2
)
⎣ ⎦ max ⎣ ⎦ min
= 11.48343624 - 2.882505602
= 8.6009
87 88
 東台精機立式銑床機械精度檢測 (TMV‐1500A)

不同標準間準確度 & 重現性的比較

89 90

NMTBA Bidirectional
NMTBA Bidirectional ISO 230 2
ISO 230‐2

B : reversal value
R : repeatability
M, E : positional      
d i ti
deviation
A : accuracy

91 92
 VDI/DGQ 3441
VDI/DGQ 3441 A
Accuracies
i

Ps : positional scatter

Pa : positional deviation
ASME
NMTBA  VDI  ISO 
B5.54
P : positional uncertainty
p y definition gguidelines standard
standard

Accuracy ±7 282245
±7.282245 14 77652965
14.77652965 14 08510733
14.08510733 14 08510733
14.08510733

93 94

綜合比較(1) 綜合比較(2)

• The number of target points
NMTBA ISO 230‐2 VDI/DGQ 3441 • The number of runs
„Lost motion
Lost motion „Reversal value
Reversal value „Reversal error
Reversal error
„Standard deviation „Standard uncertainty „Standard deviation • The runs approach from one direction or both 
„Repeatability „Repeatability „Positional scatter

„Positional deviation
Positional deviation „Positional deviation
Positional deviation directions
„ Accuracy „Accuracy „Positional uncertainty

ASME B5 54
ASME B5.54
„Reversal deviation
„Standard uncertainty
„Repeatability
„Systematic deviation

„Accuracy

95 96
 Machine tool accuracy standards compared Machine tool accuracy standards compared
Term or other
T th ISO standard
t d d VDI NMTBA JIS Term or other
T th ISO standard
t d d VDI NMTBA JIS
info guidelines definition standard into guidelines definition standard

Target position Position to which the Same as ISO Same as ISO Same as ISO
moving part is
Unidirectional Unidirectional Same as ISO. Same as ISO. Same as ISO.
programmed
involves a series of Recommends Recommends R
Recommends d
/
Actual position Measured position Same as ISO Same as ISO Same as ISO measurements in bidirectional unidirectional bidirectional
reached by the moving Bidirectional which the approach to
part target is always form
Minimum of five for Depends on Minimum of One run in each same direction.
Number of
each direction length of axis. seven direction for Bidirectional refers to
runs to the movement in both
Minimum of positional
target position fi
five accuracy andd directions.
directions
seven for Bidirectional
repeatability recommended
N b off
Number Five per meter up to 2 Ten per meter Unspecified ; Depends on
meters. for each example length. Every
target position
More for longer direction shown is 20 50mm up to
required 1000mm;then
every 100mm
97 98

Machine tool accuracy standards compared Machine tool accuracy standards compared
Term or other
T th ISO standard
t d d VDI guidelines
id li NMTBA JIS Term or other
T th ISO standard
t d d VDI NMTBA JIS
into definition standard into guidelines definition standard

Positional Differences between Different form ISO Agrees with Term not noted Reversal error Value of the difference Same as ISO Same as ISO. Not
actual position Maximum ISO definition since only one between the mean positional Referred to considered
deviation
reached and target difference of the however noted run is made to deviation at a position for the as ‘lost
mean values of the as ‘deviation a target two for two direction of approach motion’
actual positions from target’ bidirectional
versus the
individual target
positions along an Same as ISO Same as ISO. Not
Standard
( )
2
axis 1 n considered
Mean Algebraic mean of Agrees with ISO Agrees with Not considered
deviation ∑ xij − x i
n − 1 j =1
the positional however noted as ISO noted as
positional Where:
deviations at a ‘mean value’ ‘mean’
deviation target position n=number of runs;
j
j=any one run;
xij=positional deviation for
any one run
=mean positional deviation
xi
99 100
 M hi tooll accuracy standards
Machine d d comparedd Machine tool accuracy standards compared
Term or ISO standard VDI guidelines NMTBA JIS standard Term or other ISO standard VDI NMTBA JIS
other into definition i
into guidelines
id li d fi i i
definitio standard
d d
n
Positional Maximum difference No specific
p term for Comparable
p to Differs Spread at the target Comparable to the Comparable Differs
between extreme values of accuracy, however the ISO. Referred considerably
Repeatability
R t bilit
accuracy position having the ISO standard to the ISO considerably
x+3sigma and x-3sigma term ‘position uncertainty’ to as accuracy from any one of (unidirectional largest spread standard from the other
regardless of the position as described is the other three. or bidirectional) three and is
or direction
di ti off motion.
ti comparable
bl tto th
the ISO P iti i
Positioning expressed as a
Applies to unidirectional as definition for ‘position accuracy is value based on
well as bidirectional. accuracy’ although the measured as the dividing the
Due to reversal error the calculations differ g variation
largest read at the
spread will be greater and of any actual target position
the position accuracy less position from a α maximum
for bidirectional target position spread by two

101 102

Resolution of Measurement
Resolution of Measurement

Measurements of Geometrical Errors

103 104
 Laser Vector Measurement Technique  Laser Vector Measurement Technique‐contd.
(C. Wang, 2000)
• First mount the laser beam in one of the body diagonal 
• Machine accuracy can be improved by indentifying all geometric 
y p y y g g directions the same as in the body diagonal measurement
directions, the same as in the body diagonal measurement. 
error and then compensating for these errors. The key is how to  Instead of moving x, y, and z continuously to the next 
measure these error accurately and quickly. increment R, stop and take a measurement. 
• ASME standard is noted that linear displacement measurement 
along four diagonals can used to check volumetric positioning  • Move the x axis to X, stop and take a measurement, 
accuracy quickly.
i kl th
then move the y axis to Y, stop and take a measurement, 
th i t Y t dt k t
then move the z axis to Z, stop and take a measurement.

• R= (X2+Y2+Z2)0.5 is the increment in the 
diagonal direction, and X, Y, and Z are the 
increments in the x, y, and z directions, 
respectively.

39 106/39

Laser Vector Measurement Technique‐contd

Laser Vector Measurement Technique contd. Laser Vector Measurement Technique‐contd.
Laser Vector Measurement Technique contd
• Compared to the conventional body diagonal measurement  • For conventional body diagonal measurement, the 
where only one data point is collected at each increment R, 
h l d i i ll d hi displacement is a straight line along the body diagonal; hence 
the vector measurement collects three data points, one at X,  a laser interferometer can be used to do the measurement.
one at Y and one at Z Hence three times more data are
one at Y, and one at Z. Hence three times more data are  • The displacements are along the x axis, then along the y axis, 
collected. and then along the z axis. The trajectory of the target or the 
• Central limit theory,
Central limit theory, retroreflector is not parallel to the diagonal direction.
is not parallel to the diagonal direction
σ
σx =
n
σ x : STEDV of sample mean
σ : STEDV of population
n: smapling number

107 108
 Assumptions Volumetric Displacement Errors
Volumetric Displacement Errors
To simplify the analysis, the following assumptions are made.
To simplify the analysis the following assumptions are made
• Consider a rigid body motion from PA to PB. The motion can be 
• The motion is repeatable to within certain uncertainty. The  described by 6 degrees of freedom (1‐linear, 2‐straightness, 3‐
y p y
accuracy of the method is limited to the repeatability of the  angular errors)
angular errors).
motion.
• Now move PA such that it is at the origin of coordinate system.
• The position errors can be superpositioned, i.e., the position 
• The point P
The point PB would be at the origin if there was no error.
would be at the origin if there was no error
error is much smaller than the travel distance.
• The angular errors are small compared to the other errors.
• Rigid body motion.

109 110

Volumetric Displacement Errors

Volumetric Displacement Errors Measurement along the Body Diagonal
Measurement along the Body Diagonal

• Else, P
El PB = XuX x + E(x) [from vector diagram]
E( ) [f di ] • The diagonal measurement R is achieved by increments in X, Y 
• The error vector E(x) can be expressed as and Z directions. The unit vector R is given by

x y z
E( x ) = E x ( x )u x + E y ( x )u y + E z ( x )u z R= u x + uy + uz
R R R
• Similarly, PA PB
• The error along the diagonal direction is given by dR
E( y ) = E x ( y )u x + E y ( y )u y + E z ( y )u z
A B x y z
dR(x) = E x ( x ) + Ey ( x ) + Ez ( x )
E( z ) = E x ( z )u x + E y ( z )u y + E z ( z )u z R R R
x y z
dR( ) = E x (y ) + E y ( y ) + E z ( y )
dR(y)
R R R
x y z
dR(z) = E x (z ) + E y ( z ) + E z ( z )
R R R
111 112
 Measurement along the Four Body Diagonals
Measurement along the Four Body Diagonals Measurement along the Four Body Diagonals‐contd.
Measurement along the Four Body Diagonals contd

• There
There are four diagonals, namely, those from (0, 0, 0) to (nX, nY, 
are four diagonals namely those from (0 0 0) to (nX nY
nZ), denoted by ppp.
x y z
• (nX, 0, 0) to (0, nY, nZ), denoted by npp.
( , , ) ( , , ), y pp dR ( x )PPP = E x ( x ) + Ey ( x ) + Ez ( x )
R R R
• (0, nY, 0) to (nX, 0, nZ), denoted by pnp.
x y z
• (0, 0, nZ) to (nX, nY, 0), denoted by ppn.
(0, 0, nZ) to (nX, nY, 0), denoted by ppn. dR ( x )NPP = −E x ( x ) + E y ( x ) + E z ( x )
(0, nY, nZ) (nX, nY, nZ) R R R
x y z
Z
PPP dR ( x )PNP = E x ( x ) − Ey ( x ) + Ez ( x )
(0, 0, nZ)
(nX, 0, nZ)
NPP R R R
PNP
x y z
= E x ( x ) + Ey ( x ) − Ez ( x )
PPN
dR ( x )PPN
Y R R R
(nX, nY, 0)
(0, nY, 0)

114
X 113
(0, 0, 0) (nX, 0, 0)

Measurement along the Four Body Diagonals‐contd.

Measurement along the Four Body Diagonals contd Squareness Errors
When the angles between xy, yz, and xz
g y, y , are not exactlyy
R R 90°, then the diagonal distances can be expressed as
E x ( x ) = [dR ( x )PPP − dR ( x )NPP ] E x ( z ) = [dR ( z )PPP − dR ( z )NPP ]
2X 2X
R R XY YZ ZX
E y ( x ) = [dR ( x )PPP − dR ( x )PNP ] E y ( z ) = [dR ( z )PPP − dR ( z )PNP ] dRPPP = θ xy + θ yz + θ zx R
2Y 2Y R R R θ xy = (dRPPP + dRPPN )
R R XY YZ ZX 2 XY
E z ( x ) = [dR ( x )PPP − dR ( x )PPN ] E z ( z ) = [dR ( z )PPP − dR ( z )PPN ] dRNPP = −θ xy + θ yz − θ zx
2Z R
2Z R R R θ zx = (dRPPP + dRPNP )
XY YZ ZX 2ZX
R dRPNP = −θ xy − θ yz + θ zx
E x ( y ) = [dR ( y )PPP − dR ( y )NPP ] R R R
θ yz = (dRPPP + dRNPP )
R
2X XY YZ ZX 2YZ
R dRPPP = θ xy − θ yz − θ zx
E y ( y ) = [dR ( y )PPP − dR ( y )PNP ] R R R
2Y
R
E z ( y ) = [dR ( y )PPP − dR ( y )PPN ]
2Z
115 116
Relation Between the Measured Volumetric Errors Relation Between the Measured Volumetric Errors
and the Conventional 21 Errors and the Conventional 21 Errors‐contd.
• For a machine type FXYZ, the position errors can be expressed  Ex ( X ) = δ x ( X )
as E x (Y ) = δ x (Y ) − Y θ xy
ΔX = δ x ( X ) + δ x (Y ) + δ x (Z ) − Y ε z ( X ) + Z (ε y ( X ) + ε y (Y )) + Zθ ZX − Y θ XY E x (Z ) = δ x (Z ) + Zθ zx

ΔY = δ y (Y ) + δ y ( X ) + δ y (Z ) − Z (ε x ( X ) + ε X (Y )) − ZθYZ Ey ( X ) = δ y ( X )
E y (Y ) = δ y (Y ) Remember,  only for FXYZ!
ΔZ = δ z (Z ) + δ z ( X ) + δ z (Y ) + Y ⋅ ε X ( X )
E y (Z ) = δ y (Z ) − Zθ yz
• Since
Ez ( X ) = δ z ( X )
ΔX = E x ( x ) + E x ( y ) + E x ( z ) Ez (Y ) = δ z (Y )
ΔY = E y ( x ) + E y ( y ) + E y ( z ) Ez (Z ) = δ z (Z )
ΔZ = Ez ( x ) + Ez ( y ) + Ez ( z )
117 118

Measurement Errors
• Projection error
• Laser beam alignment error
b l
• Flat‐mirror alignment error
• Error due to machine angular motion
• symmetry
Error Compensation Technology
• The sensitivity of squareness results to 
machine aspect ratio

119 120
 Flow of Error Compensation in “Precimatics”

In this case, some new issues is essential. 
Such as how to
Such as how to  
補償
get 21 geometric error?

get correction?

generate a new correct NC code?

121 122

dx dy dz ex ey ez Flow of Volumetric Error Simulation
0              0   ‐0.0030    ‐0.0026         0   0.0002   ‐0.0013
1.0000    0.0026    0.0014   ‐0.0024         0    0.0001    0.0021
2.0000   ‐0.0014   ‐0.0012   ‐0.0019         0   ‐0.0023    0.0002
X axis values
X‐axis values 3.0000   ‐0.0016   ‐0.0008    0.0033         0    0.0001   ‐0.0001
4.0000    0.0022    0.0019    0.0039         0    0.0004    0.0001
5.0000   ‐0.0006    0.0002    0.0058         0            0    0.0023
Flow of Volumetric Error 
Flow of Volumetric Error 6 0000 0 0062 0 0058 0 0022
6.0000    0.0062    0.0058    0.0022         0    0.0011    0.0019
0 0 0011 0 0019
7.0000   ‐0.0026   ‐0.0025   ‐0.0006         0    0.0002   ‐0.0011
Simulation 8.0000   ‐0.0024   ‐0.0034    0.0062         0   ‐0.0001         0
9 0000 0 0019 0 0025 0 0027
9.0000   ‐0.0019   ‐0.0025    0.0027         0    0.0035   ‐0.0002
0 0 0035 0 0002
Y‐axis values 10.0000    0.0033    0.0027   ‐0.0010         0   ‐0.0001    0.0001
0              0              0              0         0              0              0
1.0000    0.0026    0.0044    0.0002         0   ‐0.0001    0.0034
2.0000   ‐0.0014    0.0018    0.0007         0   ‐0.0025    0.0015
3.0000   ‐0.0016    0.0022    0.0059         0   ‐0.0001    0.0012
4.0000    0.0022    0.0049    0.0065         0    0.0002    0.0014
Initialize 5.0000   ‐0.0006    0.0032    0.0084         0   ‐0.0002    0.0036
Z‐axis values 6.0000    0.0062    0.0088    0.0048         0    0.0009    0.0032
7.0000   ‐0.0026    0.0005    0.0020         0              0    0.0002
8.0000   ‐0.0024   ‐0.0004    0.0088         0   ‐0.0003    0.0013
9.0000   ‐0.0019    0.0005    0.0053         0    0.0033    0.0011
Squareness values 124
10.0000    0.0033    0.0057    0.0016         0   ‐0.0003    0.0014
 Flow of Volumetric Error Simulation Flow of Volumetric Error Simulation
0              0              0              0         0              0              0
0              0              0              0         0              0              0 1.0000    0.0026    0.0044    0.0002         0   ‐0.0001    0.0034
1.0000    0.0026    0.0044    0.0002         0   ‐0.0001    0.0034 2.0000   ‐0.0014    0.0018    0.0007         0   ‐0.0025    0.0015
2.0000   ‐0.0014    0.0018    0.0007         0   ‐0.0025    0.0015 3.0000   ‐0.0016    0.0022    0.0059         0   ‐0.0001    0.0012
3.0000   ‐0.0016    0.0022    0.0059         0   ‐0.0001    0.0012 4 0000 0 0022 0 0049 0 0065
4.0000    0.0022    0.0049    0.0065         0    0.0002    0.0014
0 0 0002 0 0014
4.0000    0.0022    0.0049    0.0065         0    0.0002    0.0014 5.0000   ‐0.0006    0.0032    0.0084         0   ‐0.0002    0.0036
5.0000   ‐0.0006    0.0032    0.0084         0   ‐0.0002    0.0036 6.0000    0.0062    0.0088    0.0048         0    0.0009    0.0032
6.0000    0.0062    0.0088    0.0048         0    0.0009    0.0032 7 0000 0 0026 0 0005 0 0020
7.0000   ‐0.0026    0.0005    0.0020         0              0    0.0002
0 0 0 0002
7.0000   ‐0.0026    0.0005    0.0020         0              0    0.0002 8.0000   ‐0.0024   ‐0.0004    0.0088         0   ‐0.0003    0.0013
8.0000   ‐0.0024   ‐0.0004    0.0088         0   ‐0.0003    0.0013 9.0000   ‐0.0019    0.0005    0.0053         0    0.0033    0.0011
-3

9.0000   ‐0.0019    0.0005    0.0053         0    0.0033    0.0011 10 0000 0 0033 0 0057 0 0016

10.0000    0.0033    0.0057    0.0016         0   ‐0.0003    0.0014
0 0 0003 x 10
0
0 0014
Nominal Coordinates
10.0000    0.0033    0.0057    0.0016         0   ‐0.0003    0.0014 x 10
-3
8
Actual Coordinates
0 Compensated Coordinates
7

Distance along Y-axis (mm)

-1
6
-2
5
axis (mm)

-3

FXYZ 4
Distance along Y-a

-4

3
-5

XFYZ -6
Nominal Coordinates
2

Compensated Coordinates
Actual Coordinates
1
-7

0
-8

125 0 1 2 3 4 5 6 7 8 9 126
10
0 1 2 3 4 5 6 7 8 9 10 Distance along X-axis (mm)
Distance along X-axis (mm)

Flow of Volumetric Error Simulation

Flow of Volumetric Error Simulation

Nominal Coordinates
Compensated Coordinates
Actual Coordinates

4.8
8
4.6
mm)
e along Z-axis (m

4.4
Distance along Y-axis (mm)

6
4.2 Nominal Coordinates
Compensated Coordinates
4 4
Actual Coordinates
Distance

3.8
5
2
3.6

3.4 0 4
3
3.2 3.5
4
4.5 3 Distance along Y-axis (mm)
5
3
3 3.2 3.4 3.6 3.8 4 4.2 4.4 4.6 4.8 5
Distance along X-axis (mm)
Distance along X-axis (mm)

127