TS-900e-5G SERIES

5G MMWAVE SEMICONDUCTOR PRODUCTION TEST SYSTEMS

• 5G mmWave production test and characterization
• 44 GHz signal delivery to the device under test
• 53 GHz VNA RF test performance
• Up to 20 independent RF VNA ports for parallel, multi-site test
• Compatible receiver interface for wafer probers and device handlers
• DC, Parametric and RF test capabilities
• ICEasy Semiconductor Test Suite
• ATEasy® Integrated Test Executive / Development Environment

DESCRIPTION Ideally suited for any production environment, the high

GENASYS Semiconductor TS-900e-5G mmWave test systems performance receiver interface supports both packaged or wafer
provide production proven 44 GHz signal delivery to the device test and characterization of mmWave semiconductor devices.
under test (DUT), with optional VNA RF test capabilities to 53 The receiver interface is compatible with the Opus 3 and TEL
GHz. Capable of supporting up to 40 independent VNA ports, probe stations, as well as the Seiko Epson E8040 and E8080
these systems are ideal for applications requiring parallel, multi- device handlers. Reid-Ashman OM-1069 and inTest
site test capabilities. manipulators are also supported.

Keysight Technologies modular vector network analyzers (VNAs)

are at the heart of the TS-900eX-5G, delivering exceptional RF
measurement performance and repeatability. They deliver
unmatched phase and amplitude measurement accuracy across
the entire band of interest, eliminating dead bands found with
some instruments, a critical for requirement for mmWave
semiconductor device test.

MANUFACTURING
The Keysight M9807A (44 GHz) and M9808A (53 GHz) PXIe
VNA instruments are the ideal VNA solution delivering
modularity, speed and accuracy in a true multi-port instrument,
sharing the same measurement science as PNA-X
instrumentation. Instrumentation based on a common
measurement science simplifies the transition from the
laboratory to the production floor, and the modular architecture
provides a clearly defined path to upgrade both channel count
and frequency.

Complete system-level calibration is implemented to remove

signal path errors, including interconnect points such as cables,
connectors, blind mate interfaces, and load board error sources
such as board traces and sockets, from the test results. A multi-
step process to isolate the device under test (DUT) utilizes the
industry standard practice of fixture de-embedding with TS-900e-5G Test System with manipulator
verification coupons. Fixture de-embedding is the most accurate
calibration approach, but other methods such as Automatic Compact footprint, reduced power consumption and standard air
Fixture Removal (AFR) are also available to extract S- cooling further contribute to the overall lower cost of ownership
parameters from an open fixture. and reduced carbon footprint of these test systems.

Toll Free: 888-TEST-BY-PXI • Phone: 949-263-2222 • Fax: 949-263-1203 • email: [email protected] • www.marvintest.com
TS-900e-5G SERIES
Test system startup and commissioning is significantly reduced,
a critical concern when transitioning to outsourced
semiconductor assembly and test (OSAT) facilities. Typical
installation and start-up time, including execution of complete
system level self-test, is typically accomplished in less than one
hour.

FEATURES
The base system includes Keysight VNA instrumentation,
dynamic and static digital I/O, multi-channel SMU power supply,
and system self-test with fixture. Additional expansion slots are
also available.

The core system components include the following test

resources and functionality:
• VNA Instrumentation (Keysight M9807A / M9808A)
• GX3104 4-Channel SMU
• GX5295 64-Channel Dynamic Digital I/O with per pin PMU
• GX5733 64-Channel Static Digital I/O
• GX7200 21-Slot, high-power PXI Express chassis
• RF pogo-pin blind-mate receiver interface
• Embedded i7, quad core controller with Windows®10 OS
• ATEasy test executive and programming environment
• DIOEasy digital waveform editing and display tools
• ICEasy test software development tools

SOFTWARE
ATEasy® Test Executive and Software Development Studio is a
comprehensive software development environment featuring a

MANUFACTURING
customizable test executive for execution, sequencing, fault
analysis and debugging. It is pre-configured with all required
instrument drivers, virtual instrument panels, and system selftest
to simply startup and software development activities.

ATEasy is the most cybersecure test development environment

available, with rapid development tools and royalty-free run-time
executable distribution. Additionally, ICEasy, a suite of software
tools for semiconductor test and evaluation is also included, and
incorporates I-V curve and Shmoo plot tools for analyzing device
DC and AC characteristics.

APPLICATIONS
• mmWave packaged and wafer device test / characterization
• Pilot production and focused production test
• Automated failure analysis and test

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listed are trademarks of their respective
companies.
Revision A • Updated Jan 11, 2022
TS-900e-5G SERIES
SPECIFICATIONS External 10 An external 10 MHz clock source (TTL level) can be

MMWAVE TESTS MHz Clock provided via a rear panel BNC or via a PXI Express
Input System Timing Controller
Tx / Rx Tests S-Parameter Measurement (Insertion / Return
Loss) 10 MHz Clock 10 MHz output is available via a rear panel BNC

S12, S21, S11, S22 Output connector, TTL compatible level

TS-900E-5G SERIES PXIE CHASSIS PXIe System 1600 W

Power
Number of 1 controller, 8 PXI-1, 8 Hybrid, 4 PXIe
Slots PXIe Chassis 120 VAC, ±15%; 20 A max (PFC)
Input AC 240 VAC, ±10%; 10 A max (PFC)
System CPU Intel Core i7, 2.4 GHz, single slot controller Power 47 Hz to 440 Hz
(Embedded) 4x4 PCIe bus configuration
8 GB of RAM DYNAMIC DIGITAL I/O SUBSYSTEM
System Hard 320 GB (min) Number of 64 (base configuration)
Disk Digital I/O and
PMU
Cooling (4) 100 CFM fans for system cooling. Integrated
Channels
temperature monitoring via an on-board
microcontroller with audible and software Maximum 256 channels
notification when preset temperature limits are Channel
exceeded. Fan speed control and monitoring is Configuration
automatic and can be controlled / monitored via the Maximum 100 MHz
GxChassis software. Clock Rate
PXI Clock Integrated 10 MHz PXI clock with auto-detect
Digital Test Stimulus / response
function. Presence of an external 10 MHz PXI clock
Modes Real-time compare
will disable the internal clock. PXI clock is
distributed to all peripheral slots. Vector 64 Mb / channel
Optional external clock via slot 2 Memory

Temperature Per slot monitoring, 1 reading/sec/slot Real Time 1,024 (records data and program steps)
Monitoring 4 second moving average value Compare
User selectable alarm criteria: Record
• Maximum slot temperature Memory
• Average slot temperature
Drive Voltage -2 V to +7 V, Drive Hi & Drive Lo, maximum swing

MANUFACTURING
Accuracy: ± 2 °C
Range is 8 V
Default warning and shutdown limits: +50 °C & +70
°C Sense Voltage -2 V to +7 V, Sense Hi & Sense Lo
Warning and shutdown limits programmable via Range
software driver Programmabl ±24 mA, programmable on a per channel basis,
Status: Query via software driver and audible alarm e Pull-Up / V commutate range: -2 V to +7 V, programmable on
for a warning limit condition Pull-Down a per channel basis
Power Supply Monitored voltages: 3.3, 5, +12, -12, VIO value Current
Monitoring Accuracy: ± 2% of reading Source / Sink

PXI Triggers Slots: 2 – 21 High and Low VCLo: -2 V to +5 V

Number: 8 per segment Commutation VCHi: 0 V to +7 V
Software controlled segment mapping supports: Voltage
• Isolate a trigger line within a segment Range
• Map a trigger line left to right
Voltage ±100 mV
• Map a trigger line right to left
Clamp
PXI Clock and Integrated 10 and 100 MHz clock with an auto- Accuracy
Synch detect function. Presence of an external 10 MHz
Resources PXI clock will synchronize the 100 MHz clock to the
external 10 MHz source
100 MHz clock accuracy: ± 30 ppm
Synchronization signals: SYNC100 & SYNC_CTRL

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listed are trademarks of their respective
companies.
Revision A • Updated Jan 11, 2022
TS-900e-5G SERIES
Parametric Measurement (PMU) USER POWER
Number of 32, one per channel Source / 4-channel, 4 quadrant operation, isolated outputs,
Parametric 4, one per auxiliary channel (for timing /control & Measure Unit common ground, with remote sense
Measurement static I/O functions) (SMU)
Units
Programmabl 0 to ±20 V
Configurations Force Voltage/Measure Current (FVMI) e Voltage
Force Current/Measure Voltage (FIMV) Range
Force Voltage/Measure Voltage (FVMV)
Force Current/Measure Current (FIMI) Output ±0.05% of programmed value + 2 mV
Voltage
Force Voltage -1.5 V to +7 V
Accuracy
Range
Output Noise <20 mV p-p, 20 MHz BW, full load
Force Voltage ±20 mV
Accuracy Output ±2.5 uA to ±250 mA in decade ranges,
Current any one channel can supply up to 1A
Force Voltage 16 bits
Resolution Output ±0.05% of programmed value + 0.05% of FS
Current
Force Current ±32 mA, ±8 mA, ±2 mA, ±512 uA, ±128 uA, ±32
Accuracy
Ranges uA, ±8 uA, ±2 uA FS
Voltage ±0.03% of programmed value + 2 mV
Force Current ±120 uA, 32 mA range
Measurement
Accuracy: ±40 uA, 8 mA range
Accuracy
Compliance ±5 uA, 2 mA range
Range: ±1.2 uA, 512 uA range Current Ranges: 2.5 uA to 250 mA in decades
+1.75 V to +7 ±600 nA, 128 uA range Measurement Accuracy: ±0.05% of reading + 0.05% of FS range
V @ 32 mA ±160 nA, 32 uA range Accuracy
-1.5 V to +7 V ±80 nA, 8 uA range Measurement Programmable, 18 to 24 bits
@ no load ±20 nA, 2 uA range Resolution
Current ±120 uA, 32 mA range TS-900E-5G RF VECTOR NETWORK
Measurement ±40 uA, 8 mA range ANALYZER OPTIONS
Accuracy (60 ±5 uA, 2 mA range
Measurement ±1.2 uA, 512 uA range Keysight M9807, 2 port VNA, 40 GHz, PXIe
Technologies M9808A, 2 port VNA, 53 GHz, PXIe

MANUFACTURING
s / Sec) ±600 nA, 128 uA range
Compliance ±160 nA, 32 uA range TS-900EX-5G RF VECTOR NETWORK
Range: ±80 nA, 8 uA range ANALYZER OPTIONS
+1.75 V to +7 ±20 nA, 2 uA range
V @ 32 mA Rohde and ZNBT40, 24 port, 40 GHz, LXI

-1.5 V to +7 V Schwarz
@ no load Keysight M9807, 2 port, 40 GHz, PXIe

Measure -2 V to +7 V Technologies M9808A, 2 port, 53 GHz, PXIe

Voltage TS-900EX-5G SERIES RECEIVER INTERFACE

Range
Type Modular, pogo-pin and blind-mate RF interface
Measure ±1 mV (measurement rate < 200 measurements /
Interfaces • (4) 128 pin digital blocks
Voltage sec)
• (2) power blocks (8 DPS)
Accuracy
• 20 blind mate RF ports (TS-960e-5G)
STATIC DIGITAL INSTRUMENT • 24 blind mate RF ports (TS-960eX-5G)
(Weinschel Planar Blind-Mate, 2.92mm (SMK))
Number of 64, expandable to 128
Static Digital 48 Input / Output ( programmable I/O in groups of
I/O Channels eight)
16 inputs for fixture ID

Logic Levels LVTTL compatible

Source / Sink 24 mA (max)

Current

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listed are trademarks of their respective
companies.
Revision A • Updated Jan 11, 2022
TS-900e-5G SERIES
ENVIRONMENTAL / PHYSICAL
Operating 0 °C to +50 °C
Temperature
Storage -20 °C to +60 °C
Temperature
Relative 90%
Humidity
(Non-
Condensing)
Altitude 30,000 ft

TS-900e-5G 125 lbs, core system

Weight
TS-900eX-5G 250 lbs, core system
Weight
TS-900e-5G 24" D x 22" W x 17" H
Overall Size
TS-900eX-5G 24" D x 39" W x 35" H
Overall Size
Manipulator TS-900e-5G: Reid-Ashman OM-1069
Options TS-900eX-5G: inTest 930591 FTM-MVT5900E-5G

Note: Specifications are subject to change without notice

ORDERING INFORMATION
TS-900e-5G mmWave / 5G PXIe Production Test System

TS-900eX-5G mmWave / 5G PXIe / LXI Production Test System

OPTION
TS-900-OPT64 64 Additional Dynamic Channels for use in TS-900

MANUFACTURING

Copyright © Marvin Test Solutions, Inc. All rights reserved. Product and company names listed are trademarks of their respective
companies.
Revision A • Updated Jan 11, 2022