Flow-Teknikk as

Mass Flow Meters and

Controllers for Gases
MASS-STREAM®
 M+W Instruments
Your partner
Key Facts
M+W Instruments was founded in 1988 and has always specialised Today we are working along side more than 20 distributors worldwi-
in mass flow meters and controlers. de. You will find your personal contact on the back page of this bro-
chure or under www.mw-instruments.com.
In 1995, M+W Instruments was the first company to introduce the
direct measuring principle for thermal mass flow meters with the Our intruments are suitable for the use in the pharmaceutical, che-
sensor following the constant temperature anemometer principle. mical and semiconductor industries as well as in the gas and food
industry. Of course we are your competent address for special solu-
In 1997 M+W Instruments joined the Bronkhorst Group. tions.

Content
Key Facts, Working Principle Seite 2 Pressure drop Seite 7
“MASS-STREAM®” Seite 3 Model number identification Seite 8
Mass Flow Meters Seite 4 Technical specifications Seite 9
Mass Flow Controllers Seite 5 Ultra fast sensor, Digital version Seite 10
Conversion factors, Readout systems Seite 11
Flow profile sensitivity Seite 6 Contact addresses Seite 12

Principle of Operation
Basically the instruments consits of a metal block with a straight Seals
bore. Two stainless steel probes protrude inside the bore; a heater Body
probe and a temperature probe. A constant difference in temperatu- Heater
re (∆T) is created between the two and the energy required to main-
tain this ∆T is dependent of the mass flow rate.
Sensor
Generally speaking we can say that the higher the flow the more
Flow
energy is required to maintain the chosen ∆T, which is usually
approx. 38° C. Overall we can state that King’s law applies to the
relationship between heater energy and mass flow, and the follo-
wing formula can be derived. Basic structure of the MASS-STREAM®-flow sensor

P = total heater power

n P0 = heater power offset at zero flow
P=P0+CØm C = constant
Øm = mass flow
n = dimensionless number (typ. 0.5)

Loop to control the heater current (CTA) Signal conditioning

> flow sensor <

Nulling Linearisation
in Wheatstone Constant Output Voltage
and and
bridge ∆T control or Current
amplification amplification
configuration

2
 “MASS-STREAM®”
Features and Applications
Worth knowing
MASS-STREAM® is the synonym for a metering principle having the
following advantages:

Smallest standard range

0,005...0,1 ln/min (Air)

Highest standard range

100.0...7500.0 ln/min (Air)

Lower and higher ranges available on request.

Features
◆ Low pressure drop ◆ Installable in virtually any position
◆ Rugged design ◆ No moving parts
◆ Lower sensivity concerning dirt and humidity ◆ Bodies in stainless steel or as a more economical
◆ Measuring independent of pressure and temperature changes aluminium version

Applications
◆ Gas consumption metering
◆ Exhaust gas metering
◆ Semiconductor industry
◆ Analytical intruments
◆ N2/O2-generators
◆ Fuel cells
◆ Mechanical engineering
◆ And much more

Options
◆ “Low ∆P” version
◆ Integrated totalisation
◆ Integrated actual display
◆ Integrated setpoint potmeter
◆ Readout systems

3
 Model D-6210 MFM

Mass Flow Meters

Principle of Operation
Flowmeters of M+W Instruments are sui- Main advantages of these instruments
table for all kinds of applications in indu- are:
strial, chemical, medical and laboratory
environments.

◆ Usuable for virtually every kind of ◆ Installable in virtually every position

gases ◆ No inlet pipes needed (62xx series)
◆ No moving parts ◆ Optional with integrated flow display
◆ Very low pressure drop ◆ Optional with totalisation
◆ Unique all stainless steel sensor ◆ No maintance needed
◆ Pressure and temperature indepen- ◆ Two body materials on stock
dent metering system (others on request)

The 62xx series working principle is shown For lower flow values the by-pass measu-
on page 2. rement principle is applied.

Model A B C D F G H
D-5110 95 G1/4” G1/4” 30 90 92 35
D-6210 95 G1/4” G1/4” 30 90 92 35
Standard Flow Capacities D-6230 95 G1/4” G1/4” 30 90 92 35
D-6250 95 G1/2” G1/2” 30 90 92 35
Mass Flow Meters Flow capacitiy (Air)
Model (intermediate ranges available) Model D-6270

D-5110 - AAA - BB - AA - 12 - A - A - A 0.005...0.1 ln/min Air

22 0.010...0.2 ln/min Air
52 0.025...0.5 ln/min Air
13 0.05...1.0 ln/min Air
23 0.1...2.0 ln/min Air
53 0.25...5.0 ln/min Air
14 0.5...10.0 ln/min Air

D-6210 - HAB - BB - AA - 53 - A - A - A 0.25...5.0 ln/min Air

14 0.5...10.0 ln/min Air
24 1.0...20.0 ln/min Air

D-6230 - HAB - BB - AA - 24 - A - A - A 1.0...20.0 ln/min Air

54 2.5...50.0 ln/min Air
15 5.0...100.0 ln/min Air

D-6250 - HAB - CC - AA - 15 - A - A - A 5.0...100.0 ln/min Air

25 10.0...200.0 ln/min Air
45 20.0...400.0 ln/min Air

D-6270 - HAB - CC - AA - 55 - A - A - A 25.0...500.0 ln/min Air

16 50.0...1000.0 ln/min Air
26 100.0...2000.0 ln/min Air

D-6280 - HAB - DD - AA - 36 - A - A - A 150.0...3000.0 ln/min Air

46 200.0...4000.0 ln/min Air
56 250.0...5000.0 ln/min Air Model A B C D F G H
D-6270 116 G1” G1” 50 123 125 35
D-6290 - HAB - DD - AA - 66 - A - A - A 300.0...6000.0 ln/min Air D-6280 116 G1” G1” 70 141 143 35
76 375.0...7500.0 ln/min Air D-6290 143 G1” G1” 110 171 173 35
All specifications subject
Higher flows and other current junctions on application. to change without notice.
4
 Model D-5121 MFC with LCD display

Mass Flow Controllers (MFC)

Principle of Operation
Based on the concepts of our flow meters; When higher flows are needed an external
compact flow controllers are also availa- valve is employed.
ble.

The modular construction solenoid valve The following kvs-values are available:
is integrated to the base when flows are 6,6E-2, 0,35; 1,0;
up to approx. 500l/min. N2 equivalent. (for higher values please contact factory)

Features
◆ Suitable for almost all gases ◆ Optional: integrated actual flow
and mixtures display
◆ No moving parts in the sensor ◆ Optional: integrated totalisation
◆ Good response times display
◆ PI-control loop ◆ No maintainance required Model A B C D F G H
◆ No inlet pipe necessary ◆ Almost independent to attitude D-5111 95 G1/4” G1/4” 30 90 92 35
(D-62xx series) D-5121 95 G1/2” G1/4” 30 94 96 35
D-6211 95 G1/4” G1/4” 30 90 92 35
D-6231 95 G1/4” G1/4” 30 90 92 35

Standard Flow Capacities

Mass Flow Controllers Flow capacitiy (Air) Model D-6251
Model (intermediate ranges available)

D-5111 - AAA - BB - AA - 12 - A - A - A 0.005...0.1 ln/min Air

22 0.010...0.2 ln/min Air
52 0.025...0.5 ln/min Air
13 0.05...1.0 ln/min Air
23 0.1...2.0 ln/min Air
53 0.25...5.0 ln/min Air
14 0.5...10.0 ln/min Air

D-5121 - AAA - BC - AA - 14 - A - A - A 0.5...10.0 ln/min Air

24 1.0...20.0 ln/min Air
54 2.5...50.0 ln/min Air

D-6211 - AAA - BB - AA - 53 - A - A - A 0.25...5.0 ln/min Air

14 0.5...10.0 ln/min Air
24 1.0...20.0 ln/min Air

D-6231 - AAA - BB - AA - 24 - A - A - A 1.0...20.0 ln/min Air

54 2.5...50.0 ln/min Air
15 5.0...100.0 ln/min Air

D-6251 - AAA - CC - AA - 15 - A - A - A 5.0...100.0 ln/min Air

25 10.0...200.0 ln/min Air
55 20.0...400.0 ln/min Air
Model A B C D F G H I
D-6271/004 - AAA - CC - AA - 55 - A - A - A 20.0...500.0 ln/min Air D-6251 145 G1/2” G1/2” 50 132 45 95 45
16 50.0...1000.0 ln/min Air D-6271 Dimensions please on application
All specifications subject
Higher flows and other current junctions on application. o change without notice.
5
 Conversion factors
The MASS-STREAM®-Series flow meters are normally calibrated on air.
For use on other gases than air a conversion factor must be applied.
This factor is determined by applying a complex formula.
However, for a number of common gases you will find the values
below:

Conversion factor table

(Ln: 1013mbar und 0°C air temperature)
Series / Gas D-62xx D-51xx Series / Gas D-62xx D-51xx

Air 1.00 1.00 H2 0.15 1.01

Ar 2.01 1.40 He 0.24 1.41
CH4 0.67 0.76 HCL 1.58 0.99
C2H2 0.75 0.61 N2 1.00 1.00
C2H4 0.89 0.60 NH3 0.80 0.77
C2H6 0.89 0.60 NO 1.02 0.97
C3H8 0.63 0.34 N2O 1.15 0.71
C4H10 0.42 0.25 N2O2 1.00 1.00
C5H12 0.25 0.21 O2 0.98 0.98
CO 1.04 1.00 Xe 6.08 1.38
CO2 1.20 0.74 Factors for further gases available on request.

Best accuracy is reached by calibrating the instruments und actual When using our D-62xx serie with balloon gases like helium and
process conditions. The conversation factor introduces an additional hydrogene it is always recommended to make use of the optional gas
error in abolute accuracy in order of: calibration.
CF ≥ 1 : 2xCF in % FS
CF ≤ 1 : 2/CF in % FS

Flow profile sensivity

Normally mass flow measurement principles are sensitive to varia- The MASS-STREAM®-Flow meters has been designed in such a way
tions in the shape of the flow profile. that there is always a fully developed flow profile in the metering
section ans is thus virtually insensitive to changes upstream
piping conditions.

6
Pressure drop
The pressure drop of the instruments (serie D-62xx) is almost com- the flow profile. These meshes create a certain pressure drop as can
parable to a straight run of pipe of the diameter ans is thus negible. be seen from the table set out below.

However, to make the instruments insensitive to upstream piping For further informations please contact factory.
configurations, a number of mesh screens are required to condition

legend

D 6210
D 6230
D 6250
D 6270
D 6280
D 6290
∆P (mbar)

flow air (ln/min)

In some applications a very low pressure drop is required. To fulfil For further information please refer to the second table set
these inquires we are able to build a special version of our instru- out below.
ments where the pressure drop is extremely low.

legend

D 6210
D 6230
D 6250
D 6270
D 6280
D 6290
∆P (mbar)

flow air (ln/min)

7
 Model Number Identification
Options and Model Numbers MASS-STREAM®
D NNNN AAA AA AA NN A A A

Base model Gas connection (in/out) / Flow rate (Air) / Option 4

D-511 = low flow Option 2 12 = 0.1 ln/min 15 = 100 ln/min
D-512 = medium flow 22 = 0.2 ln/min 25 = 200 ln/min
D-519 = specify Internal thread Fittings 52 = 0.5 ln/min 45 = 400 ln/min
BB = G1/4 11 = 1/8” OD 55 = 500 ln/min
D-621 = 4 mm CC = G1/2 22 = 1/4” OD 13 = 1 ln/min
D-623 = 8 mm DD = G1 33 = 6 mm OD 23 = 2 ln/min 16 = 1000 ln/min
D-625 = 16 mm EE = G5/4 44 = 12 mm OD 53 = 5 ln/min 26 = 2000 ln/min
D-627 = 32 mm ZZ = specify 55 = 1/2” OD 36 = 3000 ln/min
D-628 = 56 mm 66 = 20 mm OD 14 = 10 ln/min
D-629 = 84 mm 99 = specify 24 = 20 ln/min 46 = 4000 ln/min
54 = 50 ln/min 56 = 5000 ln/min
66 = 6000 ln/min
76 = 7500 ln/min
Supply Voltage 99 = specify
Function B = 24 Vdc
0 = Mass flow meter C = 15 Vdc
1 = Mass flow controller Z = specify
Seals / Display /
Option 3 Option 5
Output
V = Viton 0 = none
A = 0-5 Vdc E = EPDM A = flow (in %)
G = 4-20 mA P = PTFE Elast. B = summary
(sourcing) Z = specify Z = specify

Style / Option 1 Material

F = controller N/C A = Aluminium Sensortyp /
H = sensor only S = SS 316
Z = specify Z = specify Option 6
S = standard
FR = fast response

Bus Connection /
Option 7
A = analog
DP = digital / Profibus
DN = digital / device net
DR = digital / RS 232
DF = digital / Flow Bus

Enquiry and Ordering Information

In order to supply the correct instrument for your application we ◆ Convert the desired flow to Air-equivalent flow, i.e., divide the
request you to state: type of gas, flow range, operating temperature desired flow by the conversion factor.
and pressure (for controllers supply pressure and back pressure), ◆ Only for controllers, check if the pressure differential across the
electrical connection, desired output signal, type of process connec- valve (∆P) is within the limits.
tion and seals. ◆ Only for controllers, check if the calculated Kv-value is within
the specifications allowed.
Based on this information we perform the following actions/
calculations:

8
 Technical Specifications
Measurement System
Accuracy (based on air calibration) ± 3% FS incl. non-linearity (better one’s on request)
Repeatability ± 0.5% FS (better one’s on request)
Time constant (63.2%) τ = 0.7 sec (standard, better one’s s. p. 10)
Pressure sensitivity 0.2% / bar typical (air)
Attitude sensitivity ± 0.1% °C
-9
Leak integrity < 2 x 10 mbar l/s He
RFI According to CE

Operating Limits
Range 3…100%
Type of gases All gases compatible with materials chosen
Temperature 0…70°C
Pressure 10 bar; higher on application
Warming up time 30 min for optimum accuracy;
within 30 sec for accuracy ±4% FS
Installation
Series D-5100… 10 D straight pipe upstream
Series D-6200... Unrestricted

Mechanical Part
Sensor AISI 316L
Body AISI 316L or Aluminium (anodised), please specify
Sieves / rings Stainless steel / teflon
Protection IP40 (IP 65 on application)

Electrical Properties
Supply voltage 24 Vdc ±10% or 15 Vdc ±10%
Current peak values
Series D-5100... 75 mA max.
Series D-6200... Inrush current 250 mA max.
No flow 75 mA max.
100% flow 175 mA max.
Control valve, if applicable Add 250 mA max.
Output signal 0…5 Vdc or 4…20 mA
Cable 6-wire DIN or 15-wire SUB-D

9
 Ultra-Fast Sensor
"Fast response” version
M+W Instruments Mass Flow Meters and Controllers are used for a
Seals
wide variety of applications and for this reason the sensor has been Body
set up with "smooth-response” characteristics thereby avoiding any
possible overshoot of the setpoint. Heating System
There are, however, applications where the response time of the sen-
sor or the control valve is the decisive factor and for these applica-
tions M+W Instruments has developed a sensor with the following
Heater
features:
Flow
Response time (5τ): up to <100ms

If even faster times are required then we would recommend using

this sensor in conjunction with our digital pc-board. Further infor-
When using this sensor in connection with a flow controller the fol- mation is available within the section headed "Digital version”.
lowing response times are possible:
Dimensions as standard, s. p. 4/5
Response time (5τ): up to <1,5s Model number identification, s. p. 8

Digital version
All our standard products are equipped with an analog pc-board, a
feature that ensures that they are very economically priced.
However, our well thought-out modular system allows us to offer a
digital pc-board as well thereby giving the options of analog volta-
ge or current output together with Profibus DP, Device Net, RS 232
or Flowbus protocols.

Flow Controller response times down to 0.5 sec and less are possi-
ble when using the "fast response” sensor.

10
 Readout Systems Model D-15

with integrated Power Supply

General
This series comprises standard types for channel table top housing, DIN panel
use with analog mass flow meters and mount cassette and multi-channel ver-
controllers. The most commonly used sions in 1/2 19” or 19” table top or rack
functions are offered in compact single housing.

Functions
◆ Power Supply for MFM/MFC ◆ Totalization
◆ Indication of flow rate ◆ Setpoint-potentiometer

Electrical data
◆ Power supply 110 or 230 Vac, ◆ Sub-D socket for instrument
50/60 Hz. connection
◆ Suitable for connection of instru- ◆ Max. power +24 Vac,
ments with output signal 0…5 Vac 0.5 A per channel

Model number identification

Code Housing
D - 11 1/2 19” table top 42 TE
D - 12 19” table top 84 TE Model D-11
D - 13 1/2 19” rack 42 TE
D - 14 19” rack 84 TE
D - 15 Table top cassette 14 TE
D - 16 Panel mount cassette 14 TE
D - 19 Other/specify
Code Supply voltage
- 00 100...240 Vac
- 10 230 Vac
- 20 110 Vac
Code Modules with blind front (14TE)
- 00 Rearpanel with power supply + mains entry (incl. cable)
- 01 Rearpanel with power supply / sub D connector
- 02 Rearpanel with Sub D connector
- 03 Rearpanel blind
Code Modules with flow indication (actual display) (14TE)
- 10 Rearpanel with power supply + mains entry (incl. cable)
- 11 Rearpanel with power supply / sub D connector
- 12 Rearpanel with Sub D connector
- 13 Rearpanel blind
Code Modules with indication of totalised flow (14TE)
- 20 Rearpanel with power supply + mains entry (incl. cable)
- 21 Rearpanel with power supply / sub D connector
- 22 Rearpanel with Sub D connector
- 23 Rearpanel blind
Code Modules with flow indication + control (14TE) Model D-14
- 30 Rearpanel with power supply + mains entry (incl. cable)
- 31 Rearpanel with power supply / sub D connector
- 32 Rearpanel with Sub D connector
- 33 Rearpanel blind
Code Modules with total flow + control (14TE)
- 40 Rearpanel with power supply + mains entry (incl. cable)
- 41 Rearpanel with power supply / sub D connector
- 42 Rearpanel with Sub D connector
- 43 Rearpanel blind
11
Distributor:

Flow-Teknikk as
Olav Brunborgsv. 27, Postboks 244, 1377 BILLINGSTAD
Tlf.: 66 77 54 00 Fax: 66 77 54 01 E-post: [email protected] www.flow.no