GFM MASS FLOW METERS

Design Features Principles of Operation

Metered gases are divided into two laminar

Rigid metallic construction. flow paths, one through the primary flow con-
Maximum pressure of 1000 psig (70 bars). duit, and the other through a capillary sensor
Leak integrity 1 x 10-9 of helium. tube. Both flow conduits are designed to en-
NIST traceable certification. sure laminar flows and therefore the ratio of
Built-in tiltable LCD readout. their flow rates is constant.
0-5 Vdc and 4-20 mA signals.
Two precision temperature sensing windings
Circuit protection.
on the sensor tube are heated, and when
Can be used as a portable device. flow takes place, gas carries heat from the
Engineering units or 0 to 100% displays. upstream to the downstream windings. The
TIO Totalizer option. resultant temperature differential is propor-
tional to the change in resistance of the sen-
sor windings.

A Wheatstone bridge design is used to mon-

Typical Aluminum GFM Mass Flow Meter itor the temperature dependent resistance
gradient on the sensor windings which is lin-
early proportional to the instantaneous rate
of flow.

Output signals of 0 to 5Vdc and 4 to 20mA

are generated indicating mass molecular
based flow rates of the metered gas.

Flow rates are unaffected by temperature

and pressure variations within stated limita-
tions.

General Description

Compact, self-contained GFM mass flow

meters are designed to read flow rates of
gases. The rugged design coupled with in-
strumentation grade accuracy provides ver-
satile and economical means of flow mea-
surement.

Aluminum or stainless steel models with

readout options of either engineering units
(standard) or 0 to 100 percent displays are
available.

The mechanical layout of the design includes

an LCD readout built into the top of the trans-
ducer. This readout module is tiltable over 90
BULLETIN EM20200930

degrees to provide optimal reading comfort. It

NIST
Traceable
is connected to the transducer by a standard
Calibration modular plug, and is also readily removable
for remote reading installations.
 MASS FLOW METERS GFM
GFM 57, 67 and 77
High Flow Mass Flow Meters

NIST
Traceable
Calibration

TABLE 1 - SPECIFICATIONS FOR GFM

ACCURACY: GFM 17, 37 and 47: ±1.0% of full scale.
GFM 57, 67 and 77: ±1.5% of full scale. OPTIONAL ENHANCED ACCURACY: ±1.0% of full scale.
CALIBRATIONS: Performed at standard conditions [14.7 psia (101.4 kPa) and 70 °F (21.1 °C)] unless otherwise requested.
REPEATABILITY: ±0.25% of full scale.
RESPONSE TIME: Generally 2 seconds to within ±2% of actual flow rate over 25 to 100% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale / °C.
PRESSURE COEFFICIENT: 0.01% of full scale / psi (0.07 bar).
MAXIMUM PRESSURE DROP: See Table 3.
GAS AND AMBIENT TEMP.: 32 °F to 122 °F (0 °C to 50 °C). 14 °F to 122 °F (-10 °C to 50 °C) - Dry gases only.
OUTPUT SIGNALS: Linear 0-5 Vdc. 1000 ohms min. load impedance and 4-20 mA 0-500 Ohms loop resistance.
TRANSDUCER INPUT POWER: Universal +12 to +26 Vdc, 200 mA maximum.
TIME CONSTANT: 800 ms.
GAS PRESSURE: 1000 psig (70 bars) maximum GFM 17, 37, 47. 20 psig (1.4 bars) optimum.
500 psig (34.5 bars) GFM 57, 67, 77. 20 psig (1.4 bars) optimum.
** MATERIALS IN a. Aluminum models GFM Series: anodized aluminum, 316 stainless steel, brass and Viton® O-rings.
FLUID CONTACT:
b. Stainless steel models GFM17S, 37S,47S, 57S, 67S and 77S: 316 stainless steel and Viton® O-rings.
Optional O-rings: Buna® , EPR and Kalrez® .
ATTITUDE SENSITIVITY: No greater than +15 degree rotation from horizontal to vertical; standard calibration is in horizontal position.
CONNECTIONS: GFM 17: 1/4" compression fittings. Optional: 6mm, 3/8" and 1/8" compression fittings or 1/4" VCR® .
GFM 37: 1/4" compression fittings. Optional: 6mm and 3/8" compression fittings or 1/4" VCR® .
GFM 47: 3/8" compression fittings.
GFM 57: 3/8" compression fittings.
GFM 67: 1/2" compression fittings.
GFM 77: 3/4" FNPT fittings or 3/4" compression fittings.
BULLETIN EM20200930

LEAK INTEGRITY: 1 x 10-9 smL/sec of helium maximum to the outside environment.

CE COMPLIANT: EN 55011 class 1, class B; EN50082-1.

** The selection of materials of construction, is the responsibility of the customer. The company accepts no liability.
 GFM MASS FLOW METERS

Transducers without LCD readout are offered for Leak Integrity

OEM applications.
1 x 10-9 smL/sec of helium max to outside environment.
GFM mass flow meters are available with flow
ranges from 10 mL/min to 1000 L/min N2. Gas- TABLE 3 - MAXIMUM PRESSURE DROP FOR GFM
es are connected by means of 1/4" ,3/8" ,1/2"
compression fittings and 3/4" FNPT fittings. Op- FLOW RATE MAXIMUM PRESSURE DROP
MODEL
tional fittings are available. These meters may be [liters/min] [mm H2O] [psid] [mbar]
used as bench top units or mounted by means of GFM 17 up to 10 25 0.04 2.5
screws in the base.
20 300 0.44 30
Transducer power supply ports are fuse and po- 30 800 1.18 81
larity protected. GFM 37 40 1480 2.18 150
50 2200 3.23 223
60 3100 4.56 314
80 4422 6.5 448
GFM 47
100 5500 8.08 557
TABLE 2 - FLOW RANGES FOR GFM
GFM 57 200 2720 4.0 280
GFM 17 LOW FLOW MASS FLOW METERS
GFM 67 500 3400 5.0 340
CODE mL/min [N2]
GFM 77 1000 6120 9.0 620
01 0 to 10
02 0 to 20
TABLE 4 - ACCESSORIES FOR GFM
03 0 to 50
04 0 to 100 POWER SUPPLY - BATTERY PACK - CABLES
05 0 to 200 PS-GFM-110NA-2 Power Supply, 110 V / 12 Vdc /North America
06 0 to 500 PS-GFM-110NA-4 Power Supply, 110 V / 24 Vdc /North America
CODE L/min [N2] PS-GFM-230EU-2 Power Supply, 220 V / 12 Vdc /Europe
07 0 to 1
PS-GFM-230EU-4 Power Supply, 220 V / 24Vdc /Europe
08 0 to 2
PS-GFM-240UK-2 Power Supply 240 V / 12 Vdc /United Kingdom
09 0 to 5
10 0 to 10 PS-GFM-240UK-4 Power Supply 240 V / 24 Vdc /United Kingdom
GFM 37 MEDIUM FLOW MASS FLOW METERS PS-GFM-240AU-2 Power Supply 240 V / 12 Vdc /Australia
11 0 to 15 PS-GFM-240AU-4 Power Supply 240 V / 24 Vdc /Australia
30 0 to 20 BP110 Battery Pack, 110 V (includes case)
31 0 to 30
32 BP220 Battery Pack, 220 V (includes case)
0 to 40
33 0 to 50 CBL-D4 Cable with 9-pin D-connector, (4 - 20 mA)
GFM 47 HIGH FLOW MASS FLOW METERS CBL-D5 Cable with 9-pin D-connector, (0 to 5 Vdc)
40 0 to 60 17/3RC 17/3RC Remote cable, 3 ft long
41 0 to 80
17/R 17/R Remote LCD readout with 3 ft long cable
42 0 to 100
TIO-LAA2 Totalizer I/O Monitor, RS-232 Digital Interface
GFM 57 HIGH FLOW MASS FLOW METERS
50 0 to 200 TIO-LAA5 Totalizer I/O Monitor, RS-485 Digital Interface
GFM 67 HIGH FLOW MASS FLOW METERS KIT-TM-DD GFM Flow Meter Mounting Kit with Two 9 Pin D-Connectors
BULLETIN EM20200930

60 0 to 500
GFM 77 HIGH FLOW MASS FLOW METERS For Totalizer Input/ Output Flow Monitor/ Controller
70 0 to 1000 options see page 55.
 MASS FLOW METERS GFM
GFM 17, 37 and 47 Mass Flow Meters

2.88
2.36

0.95 1.10 NO LCD VERSION

A
G

B
F

D
C
E

6-32 UNC - 2B 0.69

H
J 2 69

TABLE 5 - DIMENSIONS FOR GFM 17, 37 AND 47 MODELS

DIMENSION INCH (MM)

CONNECTION
MODEL COMPRESSION LCD VERSION NO LCD MOUNTING HOLE
FITTING
A B C D E F G H J

5.72 1.00 1.13 3.09 5.10 0.5 4.61 0.16 0.16

GFM 17 1/4" Tube O Diameter
(145.3) (25.4) (28.6) (78.6) (129.6) (12.7) (117.1) (4.0) (4.0)
6.10 1.38 1.25 4.13 6.13 0.63 4.99 0.28 1.08
GFM 37 1/4" Tube O Diameter
(154.9) (34.9) (31.8) (104.8) (155.8) (15.9) (126.7) (7.1) (27.3)
6.10 1.38 1.25 4.13 6.25 0.63 4.99 0.28 1.08
BULLETIN EM20200930

GFM 47 3/8" Tube O Diameter

(154.9) (34.9) (31.8) (104.8) (158.7) (15.9) (126.7) (7.1) (27.3)

For Specific Flow Ranges Contact Aalborg Customer Service Department.

 GFM MASS FLOW METERS

GFM 57, 67 and 77 Mass Flow Meters

2.88
0.95 2.36

1.10

A
G

B
F

D
C
E

K H L

TABLE 6 - DIMENSIONS FOR GFM 57, 67 AND 77 MODELS

DIMENSION (INCH)
CONNECTION
COMPRESSION LCD VERSION NO LCD MOUNTING HOLE
MODEL
FITTING
(except model GFM 77) A B C D E F G H J K L M

6.73 2.00 1.75 6.69 8.81 0.88 5.62 4.69 1.39 1.00 0.18 10-24
GFM 57 3/8" Tube O Diameter
(170.8) (80.8) (44.5) (169.8) (223.7) (22.2) (142.6) (119.0) (35.3) (25.4) (4.6) x 0.25
7.64 3.00 3.00 7.25 9.65 1.5 6.53 6.75 2.25 0.25 0.38 1/4-20
GFM 67 1/2" Tube O Diameter
(194.0) (76.2) (76.2) (184.2) (245.1) (38.1) (165.8) (171.5) (57.2) (6.4) (9.5) x 0.35
8.66 4.00 4.00 7.30 2.00 7.55 6.80 3.00 0.25 0.50 1/4-20
BULLETIN EM20200930

GFM 77 3/4" NPT Female -

(220.0) (101.6) (101.6) (185.4) (50.8) (191.8) (172.7) (76.2) (6.4) (12.7) x 0.35

For Specific Flow Ranges Contact Aalborg Customer Service Department.

 ORDERING INFORMATION FOR MASS FLOW METERS GFM

GFM MODEL

MAX FLOW (N2)

17 10 L/min
37 50 L/min
47 100 L/min
57 200 L/min
67 500 L/min
77 1000 L/min

MATERIAL
A Aluminum
S Stainless Steel

SEALS
V Viton®
B Buna®
E EPR
T PTFE/ Kalrez®

FITTINGS MODEL
A 1/4" Compression GFM 17, 37
B 1/8" Compression GFM 17
C 1/4" VCR® GFM 17, 37
D 3/8" Compression GFM 17, 37, 47, 57
E 1/2" Compression GFM 67
F 3/4" FNPT GFM 77
G 3/4" Compression GFM 77
H 6mm Compression GFM 17, 37

DISPLAY
N No Display
L LCD Readout

POWER
6 Universal +12 to +26 Vdc

OUTPUT SIGNAL
A 0-5 Vdc
B 4-20 mA

DIGITAL INTERFACE
O None

GFM 17 S V A L 6 A 0
BULLETIN EM20200930

EXAMPLE: GFM17S-VAL6-A0 5 L/min [N2] 20 psig

SPECIFY: FLOW RANGE, GAS AND PRESSURE *n.a. = not applicable.
GFM17 stainless steel, Viton® seals, 1/4" compression fittings, display, 12 to 26 Vdc power, 0-5 Vdc, output signal, no digital interface.