Extraction of SPICE Model Parameters from ATLAS

Device Simulation Using UTMOST

Many users would like to extract SPICE models from

their process and device simulation using ATHENA and
ATLAS to be used in actual circuit simulation without
actually fabricating the device.

Using SILVACO’s UTMOST you can extract SPICE

model parameters from the simulation results of
ATHENA and ATLAS.

To guide users on how to go about extracting SPICE

model parameters an example which extracts BSIM3v3
model from process/device simulation is used in this
article.

All these commands can be executed from a single soft-

ware – DeckBuild.

The commands are heavily commented so that you

know their functions and purpose.

Here we will concentrate on the UTMOST batch mode Figure 1. TonyPlot of Decice structure.
commands. Here we only cover a very simple case and
there is no local optimization. The UTMOST interactive
----------- start of deckbuild commands -------------
mode can be used save the UTMOST setup into a file .
UTMOST interactive cannot be executed from DeckBuild.
# Commands that can be used in deckbuild to extract
# Spice model Parameters. The deck for TCAD is
# not complete . Below are examples of commands that
# maybe used in VWF Athena and Atlas to obtain the
# device characteristics

###### START ATHENA SIMULATION ###

# Run process simulation
go athena

# Extract the poly length LD

extract name=”ld” thick poly [Link]=0

extract name=”utmost_ld”($ld*1.0e-4)
....
extract thickness oxide [Link]=1 name=”tox”
extract name=”utmost_tox” ($tox*1.0e-10)
....

###### START ATLAS DEVICE SIMULATION ##

go atlas
Figure 2. DeckBuild screen.

April 2004 Page 7 The Simulation Standard

###### Create the IdVg-Vb IV matrix ### # define parameters to be set when the data is
# read from ssf file from ATLAS
load infi le=[Link]
log outf=mos2ex06_IdVg-[Link] setup NRS=0.04 NRD=0.04 width=1.0 \
solve name=gate vgate=0 vfinal=5 vstep=0.2 length=$utmost_ld polarity=N
load infi le=[Link]
solve name=gate vgate=0 vfinal=5 vstep=0.2 # load Atlas log files simulated earlier.

load infi le=[Link] # the master option tells UTMOST the file is in

solve name=gate vgate=0 vfinal=5 vstep=0.2 # VWF ssf format

....
init inf=mos2ex06_IdVg-[Link] master

# Simulate device ID/VG characteristics

# Load in append mode, more results from the logfile

solve vgate=1 vstep=0.25 vfinal=1.5 name=gate \

outf=solve_tmp0 onefi le init inf=mos2ex06_IdVd-[Link] master append

solve vgate=1.75 vstep=0.25 vfinal=3 name=gate \

outf=solve_tmp1 onefi le # select required characteristics for device 1

solve vgate=3.25 vstep=0.25 vfinal=4.5 name=gate \ # unselect all ID/VG-VB first the select device 1
outf=solve_tmp2 onefi le # (there is only 1 device)
....
deselect ID/VG-VB all
##### Create the IdVd-Vg IV matrix ####### select ID/VG-VB device 1

log outf=mos2ex06_IdVd-[Link] # unselect all ID/VD-VG first, then select device 1

....
solve name=drain vdrain=0 vfinal=5 vstep=0.2 deselect ID/VD-VG all
solve name=drain vdrain=0 vfinal=5 vstep=0.2 select ID/VD-VG device 1
solve name=drain vdrain=0 vfinal=5 vstep=0.2
.... # Defines the routine for which data is to be stored
# in ssf format (standard structure format)
#### START UTMOST SIMULATION ####
output ID/VD-VG
#*************************************
# Jump to UTMOST MOS module # Stores measured data (simulated by ATLAS) to
# ssf log File in uniform steps as required by UTMOST
go utmost
utmost type = mos log outf=mos2ex06_data.log measured

# The model command loads Utmost setup file # setup the UTMOST log file to store

# created by interactive session . # The measured (simulated data from ATLAS).

model MOS_vwf_bsim3_n log outf=mos2ex06_ut.log utmost

# change the Value for gate oxide thickness for # set up output log file for simulated data created

#Opt(imization) and Fit Columns . #by UTMOST routine which was last referred to
#by batch mode output command i.e ID/VD-VG
device TOX = $utmost_tox
log outf=mos2ex06_sim.log simulated

The Simulation Standard Page 8 April 2004

# Perform curve fitting for selected routines +UB= 5.87E-19 UC= -4.65E-11 VSAT= 8E4
# and then do local optimization sequences +A0 = 1 AGS = 0 B0= 0
# if they are defined in setup file. +B1 = 0 KETA = -0.047 A1 = 0
+A2 = 1 RDSW = 0 PRWG = 0
fit ID/VG-VB +PRWB = 0 WR =1 PRWG = 0
fit ID/VD-VG +LINT = 0 DWG =0 DWB =0
+VOFF = -0.1 NFACTOR = 1 CIT =0
# perform simulation for selected routines
+CDSC = 2.4E-4 CDSCD = 0 CDSCB = 0
+ETA0 = 0.08 ETAB = -0.07 DSUB = 0.56
simulate ID/VD-VG
+PCLM = 1.3 PDIBLC1 = 0.39 PDIBLC2 = 8.6E-3

# Output Utmost parameters for extraction. +PDIBLCB= 0 DROUT = 0.56 PSCBE1 = 4.24E8

# Save results to file in a ssf file. If +PSCBE2 = 5E-5 PVAG =0 DELTA = 0.01

# append option is used the parameters are appended +MOBMOD = 1 PRT =0 UTE = -1.5

# to an existing file. +KT1 =0 KT1L =0 KT2 = 0

+UA1 = 4.31E-9 UB1 = -7.61E-18 UC1 = -5.6E-11
save outf=[Link] +AT = 3.3E4 NQSMOD = 0 WL =0
+WLN =1 WW =0 WWN =1
##### Extract UTMOST parameters ######## +WWL = 0 LL =0 LLN =1
+LW =0 LWN =1 LWL =0
# load output parameter file from UTMOST
+CAPMOD = 1 )
*
extract init infi le=”[Link]”

# Save the current parameter set from the References

# Optimization column of UTMOST parameter 1] UTMOST III User’s Manual – Chap 14. Batch Mode Operation

# to a model library file 2] UTMOST III Extractions Manual , Vol. 1- Appendix A – BSIM3v3
Extraction Tutorial

3] Silvaco example file examples/mos2/[Link]

create library=[Link]
4] TCAD Tutorial and Examples Vol.1 p.2-26

# EXIT

quit

------------ end of Deckbuild commands -----------

A portion of [Link] file is as follows.

.LIB CMOS
*
.MODEL MMOD NMOS ( LEVEL = 8
+TNOM = 27 TOX = 1E-8 XJ = 1.5E-7
+NCH=1.7E17 NSUB=6E16 VTH0 =0.5776647
+K1= 0.5 K2 = -0.0186 K3 = 80
+K3B= 0 W0= 2.5E-6 NLX = 1.74E-7
+DVT0W= 0 DVT1W= 0 DVT2W =-0.032
+DVT0 = 2.2 DVT1 = 0.53 DVT2 = -0.032
+VBM= -5 U0 = 670 UA= 2.25E-9

April 2004 Page 9 The Simulation Standard