Parofluor TM
Advanced Perfluorinated Elastomers
What is ParofluorTM?
Parofluor is a unique advanced
perfluorinated elastomer (FFKM)
developed and produced exclusively
by Parker Hannifin’s Seal Group.
Perfluorinated elastomers provide
performance beyond all other available
elastomer families. Parofluor has
outstanding retained resiliency as
compared with other perfluorinated
elastomers, and is formulated
specifically for use in the most
aggressive sealing applications.
Parofluor and Parofluor ULTRA Availability:
Parofluor and Parofluor ULTRA materials are available from
What is Parofluor ULTRATM? 65 to 90 shore A hardness in black and white formulations.
Products are available in standard, non-standard, large
Parofluor ULTRA is a new diameter continuous molded and JIS O-rings, slab or sheet
generation of ultra high-performance stock, custom molded shapes, PIP (press-in-place) profiles
perfluorinated elastomers. These and rubber-to-metal bonded seals.
materials offer major advantages
over traditional fluoroelastomer and Parofluor and Parofluor ULTRA Advantages:
other perfluorinated materials:
• Ultra-high temperature resistance (up to 320°C/608°F)
• Ultra-high temperature resistance • Broad chemical resistance
(up to 320°C/608°F) • Excellent compression set resistance
• Broad chemical resistance • Economical choice for improved predictability of
• Ultra-high purity maintenance intervals
• Ultra High Purity (UHP) manufacturing systems
See reverse for Parofluor ULTRA • In-house tooling capability
material specifications. • 1-2 weeks standard lead time
Parofluor Applications: • Local stocking distributor network
Parofluor and Parofluor ULTRA Parker Advantages:
UPDATED 4/02
materials solve application problems • Leading technology in elastomer development
within the critical environments of • Total sealing product solutions
semiconductor fabrication, aerospace, • Broadest range of material offering
chemical processing, energy • Finite Element Analysis (FEA)
exploration and production, • Applications engineering assistance
pharmaceutical, and other harsh fluid • TOTAL inPHormTM seal design software assistance
handling processes.
Parofluor and Parofluor ULTRA
materials offer excellent compression
set resistance, superior thermal For additional information about
stability and compatibility with a wide
range of harsh chemistries, making ParofluorTM and Parofluor ULTRATM,
them the ideal solution for sealing visit our website www.parofluor.com
applications that exceed the limits of
other high performance elastomers.
Copyright © 2002, Parker Hannifin Corporation, Cleveland, OH. All Rights Reserved.
Parker Hannifin Corporation
O-Ring Division Build With the Best!
2360 Palumbo Drive, Lexington, KY 40509 QS-9000/ISO-9001
Phone:(859) 269-2351 Fax:(859) 335-5128 Certified
www.parofluor.com
Parofluor TM Materials Offering
Parker Nominal Hardness Temperature
Compound Color (Shore A) Range Market General Application
V1266-65 White 65 -15°C to 300°C Semiconductor Ion Implant, Metal CVD, Sputtering (PVD), Diffusion Furnaces, LPCVD
(5°F to 572°F) RTP, APCVD, HDPCVD, PECVD, Ashing, Plasma Etch, Plasma Strip
Pharmaceutical Low contamination from extractables in pharmaceutical and food
handling applications where sterilization is required
V8545-75 Black 75 -15°C to 300°C Semiconductor Ion Implant, Metal CVD, Sputtering (PVD), Diffusion Furnaces, LPCVD,
(5°F to 572°F) RTP, Wafer Etch, Cleaning, Rinsing, Stripping, UPDI
Chemical Processing Mechanical Seals, Pumps, Valves, Instrumentation, Flow Controls,
Meters, Connectors, Sight Glasses, Blenders, Agitators, Mixers,
Reactors, Transportation
Energy Down Hole (Sour Gas), Drilling Mud, Amine-Based Fluids, Steam, and
other aggressive chemicals
Industrial Paint Spray, Fluid Handling
V8562-75 White 75 -15°C to 300°C Semiconductor Ion Implant, Metal CVD, Sputtering (PVD), Diffusion Furnaces, LPCVD,
(5°F to 572°F) RTP, APCVD, HDPCVD, PECVD, Ashing, Plasma Etch, Plasma Strip
Pharmaceutical Low contamination from extractables in pharmaceutical and food
handling applications where sterilization is required
V8588-90 Black 90 -15°C to 280°C Chemical Processing Mechanical Seals, Pumps, Valves, Instrumentation, Flow Controls,
(5°F to 536°F) Meters, Connectors, Sight Glasses, Blenders, Agitators, Mixers,
Reactors, Transportation
Energy Down Hole (Sour Gas), Drilling Mud, Amine-Based Fluids, Steam, and
other aggressive chemicals
Industrial Paint Spray, Fluid Handling
V8581-90 White 90 -15°C to 300°C Semiconductor Ion Implant, Metal CVD, Sputtering (PVD), Diffusion Furnaces, LPCVD,
(5°F to 572°F) RTP, APCVD, HDPCVD, PECVD, Ashing, Plasma Etch, Plasma Strip
Pharmaceutical Low contamination from extractables in pharmaceuticals and food
handling applications where sterilization is required
Parofluor ULTRATM Materials Offering
Parker Temperature
Compound Color Durometer Range Features Market General Application
FF102-75 Black 75 -15 to 275°C Acid resistant Chemical Processing Mechanical Seals, Pumps, Valves, Instrumentation, Flow Controls,
(5°F to 525°F) Meters, Connectors, Sight Glasses, Blenders, Agitators, Mixers,
Reactors, Transportation
FF200-75 Black 75 -15°C to 320°C High temperature Semiconductor Thermal processes: Oxidation/Diffusion, LPCVD, RTP
(5°F to 608°F) Low compression set Plasma/Gas Processes: Metal CVD, Copper
Chemical resistance Wet Processes: Wafer Etch, Clean/Rinse, Stripping, Copper Plating
Chemical Processing Mechanical Seals, Pumps, Valves, Instrumentation, Flow Controls,
Meters, Connectors, Sight Glasses, Blenders, Agitators, Mixers,
Reactors, Transportation
Energy Down Hole (Sour Gas), Drilling Mud, Amine-Based Fluids, Steam, and
other aggressive chemicals
Industrial Paint Spray, Fluid Handling
FF202-90 Black 90 -15 to 320°C High temperature Semiconductor Thermal Processes: Diffusion Furnaces, LPCVDl, RTP
(5 to 608°F) Low compression set Plasma/Gas Processes: Metal CVD, Sputtering (PVD)
Chemical resistance Chemical Processing Mechanical Seals, Pumps, Valves, Instrumentation, Flow Controls,
Meters, Connectors, Sight Glasses, Blenders, Agitators, Mixers,
Reactors, Transportation
Oilfield Down Hole (Sour Gas), Drilling Mud, and other aggressive chemicals
Industrial Paint Spray, Fluid Handling
FF350-75 White 75 -15°C to 316°C High purity Semiconductor Thermal Processes: Diffusion Furnaces, RTP
(5°F to 600°F) High temperature Plasma/Gas Processes: Metal CVD, HDPCVD/PECVD/APCVD,
Low compression set Ashing, Plasma Etch and Plasma Strip
Wet Processes: Wet Etch, Copper Plating
Pharmaceutical Low contamination from extractables in pharmaceutical
and food handling applications where sterilization is required
FF352-75 White 75 -15 to 316°C Clean Semiconductor Thermal Processes: Diffusion Furnaces, RTP
(5 to 600°F) High temperature Plasma/Gas Processes: Metal CVD, HDPCVD/PECVD/APCVD,
Low compression set Ashing, Plasma Etch, Plasma Strip
Wet Processes: Wet Etch, Copper Plating
Pharmaceutical Low contamination from extractables in pharmaceutical and food
handling applications where sterilization is required
FF354-65 White 65 -15 to 316°C High purity Semiconductor Thermal Processes: Diffusion Furnaces, RTP
(5 to 600°F) High temperature Plasma/Gas Processes: Metal CVD, HDPCVD/PECVD/APCVD,
Low closure force Ashing, Plasma Etch, Plasma Strip
Wet Processes: Wet Etch, Copper Plating
Pharmaceutical Low contamination from extractables in pharmaceutical
and food handling applications where sterilization is required
FF500-75 Black 75 -15°C to 275°C Broad chemical Semiconductor Wet Processes: Wet Etch, Stripping, Electro-Copper Plating
(5°F to 525°F) resistance Chemical Processing Mechanical Seals, Pumps, Valves, Instrumentation, Flow Controls,
Meters, Connectors, Sight Glasses, Blenders, Agitators, Mixers,
Reactors, Transportation
Oilfield Down Hole (Sour Gas), Drilling Mud, Amine-Based Fluids, Steam, and
other aggressive chemicals
Industrial Paint Spray, Fluid Handling
04/02-1.5M-CE
Parker Hannifin Corporation
O-Ring Division Build With the Best!
2360 Palumbo Drive, Lexington, KY 40509 QS-9000/ISO-9001
Phone:(859) 269-2351 Fax:(859) 335-5128 Certified
www.parofluor.com