3D Pyramidal Micropool Array Electrode for Amperometric Microsen...

This paper reports a novel three-dimensional (3D) microelectrode to enhance the sensitivity and current output of the amperometric microsensor. Based on silicon bulk micromachining technology and the introduction of nanomaterials, the 3D microelectrodes (3DME) are fabricated as working electrodes of the amperometric sensor. It comprises both sensitive microstructures and platinum (Pt) nanoparticles. The 3D micro structure can enlarge the effective surface area of working electrode and make more