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Micromachining Techniques for Silicon

The document discusses micromachining of silicon for mechanical materials. It notes that silicon is a stiff material that requires thinning for appreciable strain. It describes additive processes like chemical and physical deposition that can be used to deposit thin layers, and removal processes like chemical and physical etching that can be used to etch silicon in bulk or as films, either anisotropically or isotropically. Examples provided of bulk micromachining of silicon include a capillary for an insulin infuser, a mask for a cylindrical micromotion sensor, and a series connected photovoltaic converter battery.

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78 views11 pages

Micromachining Techniques for Silicon

The document discusses micromachining of silicon for mechanical materials. It notes that silicon is a stiff material that requires thinning for appreciable strain. It describes additive processes like chemical and physical deposition that can be used to deposit thin layers, and removal processes like chemical and physical etching that can be used to etch silicon in bulk or as films, either anisotropically or isotropically. Examples provided of bulk micromachining of silicon include a capillary for an insulin infuser, a mask for a cylindrical micromotion sensor, and a series connected photovoltaic converter battery.

Uploaded by

sasis
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd

Mechanical Material

SILICON?

Stiff => Thinning is required for appreciable strain

Micromachining of

SILICON?
Additive Processes:
Chemical and Physical Deposition
(Thin Layers only) (Single/Poly)
Removal Processes: Chemical and Physical Etching
(Wet/Dry/Plasma/Inert/Reactive)
(Bulk/Film) (Anisotropic/Isotropic)

MICROMACHINING of SILICON =>


(a) BULK (substrate)
(b) SURFACE (films)

BULK MICROMACHINING
(Etchants: Isotropic/Anisotropic)

BULK MICROMACHINED
(Silicon Capillary for Insulin
Infuser)

BULK MICROMACHINED
(Silicon Capillary for Insulin
Infuser)

BULK MICROMACHINED
(Silicon Capillary for Insulin
Infuser)

BULK MICROMACHINED
(Silicon Mask for Cylindrical Micromotion
Sensor)

BULK MICROMACHINED
(Series Connected Photovoltaic Converter
Battery)

BULK MICROMACHINED
(Series Connected Photovoltaic Converter
Battery)

BULK MICROMACHINED
(Series Connected Photovoltaic Converter
Battery)

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