From Sand To Silicon: Illustrations 32nm High-K/Metal Gate - Version
From Sand To Silicon: Illustrations 32nm High-K/Metal Gate - Version
Sand / Ingot
Ingot / Wafer
Ion Implantation
Photo Lithography
Etching
Metal Deposition
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Copyright 2011, Intel
Corporation. All rights
reserved.
Metal Layers
Polishing
scale: transistor level (~50200nm)
The excess material is polished
off.
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12
13
Packaging
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