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Cleanroom Classifications: US FED STD 209E Cleanroom Standards

Cleanrooms are classified based on the number and size of airborne particles permitted. The two main standards are the US FED STD 209E and ISO 14644-1. FED STD 209E uses classifications like "Class 100" referring to the maximum number of particles 0.5 μm or larger permitted per cubic foot of air. ISO 14644-1 uses a logarithmic scale with classes like "Class 4" allowing a maximum of 10^4 or 10,000 particles per cubic meter for particles 0.1 μm or larger. Ordinary room air is approximately Class 1,000,000 or ISO 8 under these standards.

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409 views2 pages

Cleanroom Classifications: US FED STD 209E Cleanroom Standards

Cleanrooms are classified based on the number and size of airborne particles permitted. The two main standards are the US FED STD 209E and ISO 14644-1. FED STD 209E uses classifications like "Class 100" referring to the maximum number of particles 0.5 μm or larger permitted per cubic foot of air. ISO 14644-1 uses a logarithmic scale with classes like "Class 4" allowing a maximum of 10^4 or 10,000 particles per cubic meter for particles 0.1 μm or larger. Ordinary room air is approximately Class 1,000,000 or ISO 8 under these standards.

Uploaded by

Julianna Baker
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© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
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Cleanroom classifications

Cleanrooms are classified according to the number and size of particles permitted per volume of air. Large numbers like "class 100" or "class 1000" refer to FED !"D #0$E% and denote the number of particles of size 0.& 'm or larger permitted per cubic foot of air. "he standard also allo(s interpolation% so it is possible to describe e.g. "class #000". ) discrete particle counting% light scattering instrument is used to determine the concentration of airborne particles% e*ual to and larger than the specified sizes% at designated sampling locations. !mall numbers refer to +!, 1-.-- 1 standards% (hich specif/ the decimal logarithm of the number of particles 0.1 'm or larger permitted per cubic metre of air. !o% for e0ample% an +!, class & cleanroom has at most 10& 1 100%000 particles per m2. 3oth F! #0$E and +!, 1-.-- 1 assume log log relationships bet(een particle size and particle concentration. For that reason% there is no such thing as zero particle concentration. "he table locations (ithout entries are non applicable combinations of particle sizes and cleanliness classes% and should not be read as zero. 3ecause 1 m2 is appro0imatel/ 4& ft2% the t(o standards are mostl/ e*uivalent (hen measuring 0.& 'm particles% although the testing standards differ. ,rdinar/ room air is appro0imatel/ class 1%000%000 or +!, $.5.6

[edit] US FED STD 209E cleanroom standards


maximum particles/ft S! $0%& 'm $0%2 'm $0%( 'm $0%) 'm $) 'm e"ui#alent & 4& 7 4 1 +!, 4 &0 4&0 7& 40 10 +!, &00 7&0 400 100 +!, & &*000 1%000 7 +!, . &0*000 10%000 70 +!, 7 &00*000 100%000 700 +!, 8 Class 9! FED !"D #0$E (as officiall/ cancelled b/ the :eneral !ervices )dministration of the 9! Department of Commerce ;ovember #$% #001%576586 but is still (idel/ used.

[edit] S! &+,++-& cleanroom standards


Class maximum particles/m FED STD 209E e"ui#alent $0%& 'm $0%2 'm $0%( 'm $0%) 'm $& 'm $) 'm S! & 10 # S! 2 100 #10 S! ( 1%000 #47 10# 4& 8 Class 1

S! + 10%000 #%470 1%0#0 4&# 84 Class 10 S! ) 100%000 #4%700 10%#00 4%&#0 84# #$ Class 100 S! , 1%000%000 #47%000 10#%000 4&%#00 8%4#0 #$4 Class 1000 S! . 4&#%000 84%#00 #%$40 Class 10%000 S! / 4%&#0%000 84#%000 #$%400 Class 100%000 S! 9 4&%#00%000 8%4#0%000 #$4%000 <oom air

[edit] 0S )29) cleanroom standards


maximum particles/m Class $0%) 'm $& 'm $) 'm $&0 'm $2) 'm Class & 4%000 0 0 0 Class 2 400%000 #%000 40 Class ( 1%000%000 #0%000 -%000 400 Class + #00%000 -0%000 -%000 3! &#$& Class 1 also re*uires that the greatest particle present in an/ sample does not e0ceed & =m.5$6

[edit] 123 EU classification5106


under e"uipped Class conditions 0%) 'm Class 4&00 7 Class 4&00 0 Class 4&0000 C Class 4&00000 D maximum particles/m under e"uipped under 4or5in6 conditions conditions ) 'm 0%) 'm 0 0 #000 #0000 4&00 4&0000 4&00000 n>a under 4or5in6 conditions ) 'm 0 #000 #0000 n>a

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