This document discusses Monte Carlo simulation of electron probe microanalysis (EPMA) measurements using the PENELOPE simulation code. It provides an overview of PENELOPE's capabilities, such as simulating electron and photon transport through complex sample geometries. An example application called PENEPMA is presented for simulating EPMA spectra. The document also reviews some sample simulation results from PENEPMA, such as spatial maps of x-ray generation in a Fe-Cu multilayer sample.
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This document discusses Monte Carlo simulation of electron probe microanalysis (EPMA) measurements using the PENELOPE simulation code. It provides an overview of PENELOPE's capabilities, such as simulating electron and photon transport through complex sample geometries. An example application called PENEPMA is presented for simulating EPMA spectra. The document also reviews some sample simulation results from PENEPMA, such as spatial maps of x-ray generation in a Fe-Cu multilayer sample.