Bearingless Pump System BPS-200

www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

Better Pumps for Better Yield!

No Seals, No Bearings,
No Particle Contamination!

BPS-200
2.6 bar (37.7 psi)
21 liters/min (5.5 gallons/min)

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!
 Bearingless Pump System BPS-200
www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

Inlet
REVOLUTIONARY MAGNETICALLY
Pump Casing LEVITATED CENTRIFUGAL PUMP
Levitated Impeller

The BPS-200 pump system is a revolutionary centrifugal pump that has no

bearings to wear out or seals to break down and fail. Based on the
Outlet
principles of magnetic levitation, the pump’s impeller is suspended, contact-
free, inside a sealed casing and is driven by the magnetic field of the motor
Rotor-Magnet
(Figure 1).

The impeller and casing are both fabricated from chemical-resistant high
Motor/Bearing
Motor/Bearing Winding
purity fluorocarbon resins. Together with the rotor magnet they make up the
Stator pump head.

Figure 1: Schematic of the main elements

Fluid flow rate and pressure are precisely controlled by electronically
of the maglev centrifugal pump
regulating the impeller speed without pulsation. Closed loop flow or
pressure control is easy configurable with the usage of an additional
Pumphead pressure or flow sensor. Various system configurations are possible as
explained in the following sections.

Impeller

SYSTEM BENEFITS
µ Extremely low particle generation due to the absence of mechanically
contacting parts.
Bearingless
Motor
µ Increased equipment uptime.

µ Lower maintenance costs by eliminating valves, bearings, rotating

seals and costly rebuilds.
Figure 2: Maglev pump motor with pump head µ Reduced risk of contamination due to the self-contained design with
magnetic bearings.

µ Very gentle to sensitive fluids due to low-shear design.

Pump Casing Lid
µ No narrow gaps and fissures where particles or microorganisms could
be become entrapped.

µ Smooth, continuous flow without pressure pulsation.

O-Ring
µ Electronic speed control.

µ Compact design compared to pneumatic and mag-drive pumps.

µ Proven technology in medical and semiconductor industry

(MTBF > 50 years).

Impeller

APPLICATIONS
Pump Casing Bottom
µ Semiconductor wet processing.

µ Flip chip and advanced packaging.

µ Solar cell production.

µ Flat panel display manufacturing.

MagLev Motor
µ Hard-disk fabrication.

µ Printer ink handling.

Figure 3: Disassembled pump head µ Pharmaceutical production.

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!
 Bearingless Pump System BPS-200
www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

STAND-ALONE SYSTEM CONFIGURATION 3.0

0.0 1.0 2.0 [gallons/min] 3.0 4.0 5.0 6.0

The stand-alone configuration of the BPS-200 pump system consists of a 40

Specific gravity = 1 g/cm3

controller with an integrated user panel allowing the operator to set the 2.5 10000 rpm Viscosity = 0.7 cP
Liquid Temp.: 40C
speed manually (Figure 7). The speed is automatically stored in the Supply Voltage: 24 V DC

Speed Limit for 24V = 9500 rpm 30

2.0
internal EEPROM of the controller. As an option, the speed can also be Speed Limit for 48V = 10000 rpm
9000 rpm
[bar] [psi]
set with an analog signal (see specification for Position 3a in Table 2).
1.5
20

8000 rpm
EXTENDED SYSTEM CONFIGURATION 1.0

The extended version of the BPS-200 pump system (Figure 8) consists of 10

0.5
a controller with an extended PLC interface. The PLC interface allows the 7000 rpm

speed to be set via an external signal, facilitating precise closed-loop flow 5000 rpm
6000 rpm
0.0 0
or pressure control when either a flow or pressure sensor is integrated 0.0 2.5 5.0 7.5 10.0 12.5
[liters/min
15.0 17.5 20.0 22.5 25.0

into the system. A computer can be connected via a USB interface to Figure 4: Pressure/flow curves for aqueous liquids (similar to water)
allow communication with the Levitronix® Service Software. Hence
parameterization, firmware updates and failure analysis are possible.

Precise ultrapure flow control systems can be realized with the BPS-200 LEVIFLOW®

pump system in combination with LEVIFLOW® flowmeters. Levitronix∇ Single-Channel

Converter LFC-1C
provides either turnkey solutions for closed-loop flow control or helps to
design your own flow control system. Experience has been gained with
Power Supply
Fluid In
fluids such as CMP slurries, surface-conditioning chemicals, plating (Pressurized Line)
Flowmeter

solutions, ultrapure water and solvents. A block-diagram for a typical Actual Flow
4 – 20 mA
point of use flow control system with an additional pre-pressure regulator
is shown in Figure 5. The versatility of Levitronix∇ flow control systems Fluid Out Pre-Pressure Set Flow
4 – 20 mA
Regulator
goes far beyond the capabilities of simple flow controllers. In addition to
Power Supply
the flow control function, the Levitronix∇ control firmware comes with Pump

several condition monitoring features to monitor the integrity of the fluid Levitronix

circuit. Levitronix∇ flow control systems can generate alarms for

Pump Head
LPP-200

preventive filter exchange, no-flow conditions or line clogging. Dynamic Levitronix

Levitronix Pump Controller
Condition Trending (DCT) enables failure prediction and scheduling of MagLev LPC-200
Motor
preventive maintenance (Figure 6). BSM-1 Flow Control
with DSP

Figure 5: Point-of-use flow control with LEVIFLOW ®

ATEX / IECEx SYSTEM CONFIGURATION flowmeter LFS-04 and pump system BPS-200
Specific Levitronix® motors are ATEX / IECEx certified and allow
therefore installation of motor and pump head within an ATEX Zone 2
area (see Figure 9). An Ex conform solution is needed for the motor Speed Limit

cables to leave the Ex area. One option is an Ex certified cable system as Trend Level Trend Warning

listed in Table 4 (see Pos. 8) and shown in Figure 13.

Actual Speed
µ ATEX / IECEx certified for Category 3G/D (Zone 2 for Gas and Zone Time (days)
22 Dust).
0 2 4 6 8 10 12
µ Thermal classification T5 (< 100 0C = 212 0F) for maximum liquid
temperature of 90 0C / 194 0F.

µ ATEX / IECEx marking of motor with pump head:

II 3G Ex c nAc IIC T5 Actual Flow Flow Alarm
II 3D Ex c tc IIIC T100°C IP6x
µ Explosion groups:
Group IIA: Propane (IPA), Methane, Acetone, Acetaldehyde
Group IIB: Ethylene, Ethylenglycol Advance Warning Time Time (days)
Group IIC: Acetylene, Hydrogen (not carbon disulphide)
0 2 4 6 8 10 12
µ ATEX / IECEx listing corresponds to UL hazardous location Class 1
Division 2. Figure 6: Dynamic Condition Trending (DCT)

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!
 Bearingless Pump System BPS-200
www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

3a
Fluid In Controller
for
Standalone
Stand Alone Operation
Operation
Speed Control
1
Fluid Out
Pump Head

Motor Adaptor/Extension Power Supply

2a Motor option with direct
cabling to controller
24-48 VDC
200 W

Motor Cable
4
PLC Interface
2b Speed Setting
- 1x Digital Input (Enable)
- 1x Digital Output (Status)
Chemical Resistance and IP67 Space - 1x Analog Input (Speed)

Figure 7: System configuration for standalone operation (Speed setting with integrated user panel)

3b

2a
Motor option with 4
Direct cabling to
controller

2b

Figure 8: Extended operation (flow or pressure control) with extended controller

Cabinet Boundary for 3

Fluid In ATEX Zone 2 Area
All
Controller
Types

1
Fluid Out
Pump Head

8 Adaptor/Extension Cable
ATEX Motor Power Supply
24-48 VDC / 200 W

Motor Power Cable

4
2c

ATEX Zone 2 Classified Location

Chemical Resistance and IP-67 Space ATEX conform cable sealing system

Figure 9: System Configuration for ATEX / IECEx applications

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!
 Bearingless Pump System BPS-200
www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

DIMENSIONS OF MAIN COMPONENTS

LPC-200.1

3a

3b

LPC-200.2

Figure 10: Dimensions of controllers LPC-200.2 (same basic dimensions for LPC-200.1)
(dimensions in mm and [inch])

LPP-200.1

BSM-1.x

Figure 11: Dimensions of motor with pump head

(dimensions in mm and [inch])

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!
 Bearingless Pump System BPS-200
www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

System Name Article # Pump Head Motor Controller Note

BPS-200.3 100-90193 LPC-200.1 Direct cabling between motor and controller.
BSM-1.4
BPS-200.4 100-90194 LPC-200.2 Certifications: CE, IECEE CB scheme, ETL (NRTL).
LPP-200.1
BPS-200.1 100-90191 LPC-200.1 Adaptor/Extension (0.5 - 10m) cables according to Table 3 have to be ordered as separate article.
BSM-1.3
BPS-200.2 100-90192 LPC-200.2 Certifications: CE, IECEE CB scheme, ETL (NRTL).
(High Viscosity and
Density) Adaptor/Extension (0.5 - 10m) cables according to Table 3 have to be ordered as separate article.
BPS-200.14 (ATEX) 100-90556 LPC-200.1 ATEX Cable Sealing System can be ordered according to Table 4.
BSM-1.6 (ATEX)
BPS-200.15 (ATEX) 100-90557 LPC-200.2
Certifications: CE, IECEE CB scheme, ETL (NRTL), ATEX and IECEx.
BPS-200.37 100-90773 LPC-200.1 Direct cabling between motor and controller.
BSM-1.4
BPS-200.24 100-90703 LPP-200.11 LPC-200.2 Certifications: CE, IECEE CB scheme, ETL (NRTL).
BPS-200.40 100-90776 LPC-200.1 Adaptor/Extension (0.5 - 10m) cables according to Table 3 have to be ordered as separate article.
BSM-1.3
BPS-200.41 100-90777 (Improved bubble LPC-200.2 Certifications: CE, IECEE CB scheme, ETL (NRTL).
and priming Adaptor/Extension (0.5 - 10m) cables according to Table 3 have to be ordered as separate article.
BPS-200.44 (ATEX) 100-90780 behavior) LPC-200.1 ATEX Cable Sealing System can be ordered according to Table 4.
BSM-1.6 (ATEX)
BPS-200.45 (ATEX) 100-90781 LPC-200.2
Certifications: CE, IECEE CB scheme, ETL (NRTL), ATEX and IECEx.

Table 1: Standard system configurations

Pos. Component Article Name Article # Characteristics Value / Feature

Impeller / Pump Housing High Purity PFA / PTFE
LPP-200.1 100-90281 Sealing Ring / Fittings Kalrez∇ perfluoroelastomer 1
/ ½” Flaretek 2

(High Viscosity/Density) Max. Flow 21 liters/min / 55 gallons/min

Max. Diff.-Pressure 2.6 bar / 37.7 psi
1 Pump Head Max. Viscosity / Density LPP-200.1: 50cP / 1.8 g/cm3 LPP-200.11: < 20 cP
LPP-200.11 100-90702
(Improved priming/bubble Max. Liquid Temp 900C / 1940F
behavior) LPP-200.1: Usage for higher viscosity and density
Pumphead Selection
LPP-200.11: Usage for aqueious liquids and improved priming/bubble robustness
Housing ETFE (chemical resistant) coated Aluminum, waterproofed (IP67)
2a Motor BSM-1.4 100-10005
Cable / Connectors 1x 5m cables with FEP jacket / 1x D-SUB (direct cable to controller)
1x 2m cable with FEP jacket / 1x circular (M23, IP-67)
2b Motor BSM-1.3 100-10004 Cable / Connectors
(needs extension adaptor cable for connection to controller)
1x 2m cable with FEP jacket / 1x circular (M23, IP-67)
Cable / Connectors
(needs extension adaptor cable for connection to controller)
2c Motor (ATEX / IECEx) BSM-1.6 100-10063
II 3G Ex c nAc IIC T5
ATEX / IECEx Marking
II 3D Ex c tc IIIC T100°C IP6x
Electrical Power / Voltage 200 W / 24 - 48V DC
Standalone 100-30008 Panel to set speed (automatic storage on internal EEPROM)
3a Controller LPC-200.1 (Controller with
Interfaces for 1x analog input (“Speed”) 4 - 20 mA
Enable connector
(User Panel) incl. in 100-90335)
Standalone Controller PLC with 1x digital input (“Enable”) 0 - 24 V (optocoupler)
1x digital output (“Status”) 0 - 24 V (relais)
- up to 4 digital inputs 0 - 24V (optocoupler)
100-30009 - up to 4 digital outputs 0 - 24 V (relais)
Extended PLC with - up to 2 analog inputs 4 - 20mA
(Controller with PLC Interfaces for
3b Controller LPC-200.2 Extended Controller - up to 2 analog inputs 0 – 10 V
connector incl. in
(PLC and USB) 100-90336)
- up to 2 analog outputs 0 –5V
USB interface (for service and system monitoring)

Table 2: Specification of standard components

1: Kalrez∇ is a registered trademark of DuPont Dow Elastomers 2: Pump heads with Pillar FM ½” fittings available.

Pos. Component Article Name Article # Characteristics Value / Feature

MCA-1.4-05 (0.5m) 190-10228
MCA-1.4-30 (3m) 190-10170
Extension Adaptor Jacket Material PVC-jacket
4 MCA-1.4-50 (5m) 190-10187
Cable for Power Connectors Circular Hummel to D-SUB connector
MCA-1.4-70 (7m) 190-10229
MCA-1.4-100 (10m) 190-10230

Table 3: Specification of adaptor/extension cables

Pos. Component Article Name Article # Characteristics Value / Feature

Material / Connection Port PVDF / NPT ¼”
5 Air Cooling Module ACM-1.1 190-10003 Air Pressure / Consumption ~ 0.5bar (7.2 psi)

6 Mounting Base Plate MBP-1.1 190-10004 Material PVDF

Impeller LPI-200.1/2 (a) PFA
7 IEK-200.1 (for LPP-200.1) 100-90517 Sealing O-Ring (b) O-Ring, Kalrez, 50.52 x 1.78
(a,b,c, Impeller Exchange Kits Pump Casing Screws (c) 6 pieces, PVDF, M4 x 15 mm
d,e) IEK-200.2 (for LPP-200.11) 100-90524 Pump Motor Screws (d) 4 pieces, PEEK, M3 x 14 mm
Exchange Tool IET-1.1 (e) POM-C
Sleeve (a) / Gasket (b) Stainless Steel and EPDM Note:
ATEX Cable
8 ACS-A.1 100-90292 Frame (c) Roxylon (EPDM rubber) Lubricant (e) and measurement plates
Sealing System Cable Module (d) Roxylon (EPDM rubber) (f) are included.
Voltage / Power Output / 24 VDC / 360 W
TSP 360-124 Voltage Input 85 – 132 / 187 – 264 VAC, autoselect
9a AC/DC Power Supply 100-40016 Dimensions 125 x 125 x 80 mm
(Standard Traco Supply)
Certification UL, CSA, CB, Semi F47
9b AC/DC Power Supply TSP 360-148 100-40017 Voltage / Power Output 48 VDC / 360 W (other specifications same as 9a)

Screw Set Number/Dimensions 4 pcs M3x14 and 6 pcs M4x16 Needed to increase maximum static
10 Screw Set 100-90447 Stainless Steel+ PTFE coating pressure of pumphead.
SS+PTFE Material

Table 4: Specification of accessories

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!
 Bearingless Pump System BPS-200
www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

2b
2a

3b

2c

3a

Figure 12: Pump system BPS-200 with main standard components

8a 8b
9
7b
7c

7d

8c 8d
7e

7a
8f
6 8e
4

Figure 13: Accessories

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!
 Bearingless Pump System BPS-200
www.levitronix.com
MagLev Pumps for Ultrapure Fluid Handling

LEVITRONIX∇ THE COMPANY

Levitronix∇ is the world-wide leader in magnetically levitated bearingless motor technology. Levitronix∇ was the first company to introduce
bearingless motor technology to the Semiconductor, Medical and Life Science markets. The company is ISO 9001 certified. Production and
quality control facilities are located in Switzerland. In addition, Levitronix∇ is committed to bring other highly innovative products like the
LEVIFLOW ® flowmeter series to the market.

Headquarter and US Contact Japan Contact Taiwan Contact

European Contact

Levitronix GmbH Levitronix Technologies LLC Levitronix Japan K.K. Levitronix Taiwan
Technoparkstr. 1 20 Speen Street, Suite 102 Wing Eight 5floor, 4-16-4 5F, No. 251, Dong Sec. 1,
CH-8005 Zurich Framingham, Massachusetts 01701 Asakusabashi, Taito-ku Guangming 6th Rd., Chu Pei City,
Switzerland USA Tokyo, 111-0053 Japan Hsin-Chu 302, Taiwan, R.O.C.

Phone: +41 44 445 19 13 Phone: +1 508 861 3800 Phone: +81 3 5823 4193 Phone: +886 3 657 6209
Fax: +41 44 445 19 14 Fax: +1 508 861 3837 Fax: +81 3 5823 4195 Fax: +886 988 321472
E-Mail: [email protected] E-Mail: [email protected] E-Mail: [email protected] E-Mail: [email protected]

PL-4009-00, Rev06, DCO# 17-134 First Release: 03-Oct-08 Last Update: 27-Oct-17

Levitronix∇ MagLev Pump Technology

Better Pumps for Better Yield!