Optix User Guide

Manual Version: 2.2

Release Date: June 2021
Process Monitoring Software versions applicable: 5.2.0

Gencoa Ltd
4 De Havilland Drive
Liverpool
L24 8RN
United Kingdom
Tel: +44 (0)151 486 4466
Fax: +44 (0)151 486 4488
Email: [email protected]
www.gencoa.com

1 www.gencoa.com/optix
Optix Sensor Manual

Table of Contents
1. Product introduction ................................................................ 4

2. Safety information ................................................................... 4

3. Getting started ........................................................................ 6

3.1. Package contents ................................................................. 6

3.2. System description ............................................................... 7

3.3. Installation .......................................................................... 10

4. Operation ...............................................................................12

4.1 Operating principal.............................................................. 12

4.2 Interpreting sensor readings (RGA and OES mode)........... 13

4.3 Operating pressure regime ................................................. 13

5. Maintenance ..........................................................................15

Cleaning the plasma generator ..................................................... 15

...................................................................................................... 16

1. Loosen the magnetic array retaining screw ........................ 16

Cleaning the sapphire window ....................................................... 17

6. Troubleshooting .....................................................................18

7. Specifications.........................................................................20

2 www.gencoa.com/optix
 Dimensions and physical data ....................................................... 20

Part 2 – Process Monitoring Software .............................................22

1. Software overview – Optix tab ............................................ 22

2. Software Overview – Device tab ......................................... 28

Part 3 – RS232 Communications ....................................................43

Part 4 – OPC server........................................................................51

The Optix OPC Server................................................................... 51

OPC Data Access Interface ........................................................... 52

Preparing to Install the Optix OPC Server ..................................... 52

Install the OPC Core Components Redistributable ....................... 53

Install the Optix OPC Server ......................................................... 53

Configuring the Server to Be Run by Different Users/Services ..... 54

Server Interface .............................................................................57

Register the Server ....................................................................... 57

Unregister the Server .................................................................... 57

Prog ID and CLSID ........................................................................ 58

Connected Clients ......................................................................... 58

Interface Visibility .......................................................................... 58

Log Area ........................................................................................ 58

Connection Status ......................................................................... 58

Close the Server ............................................................................ 59

3 www.gencoa.com/optix
1. Product introduction

Optix is a multi-purpose instrument for gas sensing in any vacuum environment, functioning
through a wide range of operating pressures to cater for most industrial vacuum production
processes without any requirement for differential pumping.

2. Safety information

Always read the safety instructions carefully.

Never modify the supplied power cables or plugs.

Never splice, alter, bend or twist the power cables.

Never place heavy objects on the power cable.

Never run the power cables through a pinch point such as a door or panel.

Never place the power cables near a heat source.

Never use nails, staples or similar to fasten the power cables in place.

Always ensure that the mains power plug is fully inserted into the adapter socket to
ensure a secure electrical connection.

Exercise caution plugging the Optix mains adapter into multiple socket connectors. An
overload on one socket could cause a fire or electric shock possibly resulting in
serious injury.

Never plug the mains adapter into a power source that does not correspond to both
the voltage and frequency specified on the regulatory label on the mains adapter.

4 www.gencoa.com/optix
 Never attempt to connect or disconnect the mains power cable or plug with damp or
wet hands.

Never allow any liquids to spill inside your Optix sensor or PSU. Exposure to liquid or
moisture can cause fire or electric shock possibly leading to serious injury. Should
water contamination occur you should immediately carry out the following actions: -

o Turn off the Optix using the on/off switch located on the front fascia of the PSU.

o Disconnect the power cable from both the source and the PSU.

o Contact Gencoa – [email protected] to arrange for service/repair.

Never locate the Optix PSU in an area where it will be exposed to excess heat (30°C
Maximum) such as in direct sunlight as this may result in a system failure or
malfunction.

Never keep the Optix PSU or sensor in an area where it will be exposed to humid
conditions as this may result in a system failure, malfunction or loss of data.

The High Voltage (HV) cable that is connected between the PSU and the Optix can deliver
voltages of up to 3kV. Care must be taken when connecting and disconnecting this cable.

When connecting the HV cable to the sensor, ensure that the PSU on/off switch is off
and that the PSU DC input power plug is disconnected.

When disconnecting the HV cable to the sensor, ensure that the PSU on/off switch is
off and that the PSU DC input power plug is disconnected.

Never unplug the HV cable when the PSU is on.

Never attempt to turn the PSU on when the HV cable is not connected at both ends

5 www.gencoa.com/optix
3. Getting started

3.1. Package contents

Optix plasma generator 5m high voltage cable

Optix sensor 5m PSU comms cable

Optix PSU 5m Ethernet cable

KF25 meshed O-ring 5m USB cable

DC power adapter 3m DB9 cable

Regional mains plug

6 www.gencoa.com/optix
3.2. System description

The Optix gas sensor consists of a plasma generator, a sensing unit and a power
supply (PSU).

PSU Front fascia

1. On/off switch – Turns the power to the PSU and the Optix sensor on or off

▪ Down position = OFF

▪ Up position = ON

2. Power LED – Solid light when power is being supplied to the PSU and Optix

sensor. A flashing light indicates that the PSU is ready for operation.

3. Interlock LED – Lit when interlock is satisfied.

4. HV LED – Lit indicates that the PSU high voltage output is engaged.

5. Plasma LED – Lit indicates that a plasma has been struck inside the plasma

generator.

7 www.gencoa.com/optix
PSU Rear fascia

1. High voltage – Connect the high voltage cable here.

2. Forms a direct connection between the PSU and earth.

3. DC in – Connect the DC power adapter here. The Optix is supplied with a 24V
DC power adapter. If you wish to supply your own source of DC power it must
be in the range 18V to 28V and capable of supplying at least 750mA.

4. COMMS – Connect the sensor communication cable here. Ensure that the cable
is firmly locked in the socket.

5. Interlock – Connection of pin 1 to pin 2 enables the interlock. Disabling the

interlock disables the high voltage output.

8 www.gencoa.com/optix
Optix sensor and plasma generator

1
3

2 5

1. COMMS – Connect the COMMS cable from the PSU here.

2. High voltage input – Connect the high voltage cable from the PSU here

3. User – The User port has 4 digital outputs that can be assigned to become
active when a species measurement exceeds a user defined threshold. When
the trigger point is reached the specified output will relay Vcc.

The User port also contains a 0V – 10V analogue output that can be assigned to
a user defined gas species (see page 38 for details on how to configure the
output)

Pin 1 – Vcc 5V to 24V

Pin 2 – Out 1 (Trigger 1)
Pin 3 – Out 2 (Trigger 2)
Pin 4 – Out 3 (Trigger 3)

9 www.gencoa.com/optix
 Pin 5 – Out 4 (Vcc = Device ready)
Pin 6 – Analogue out (0V – 10V)
Pin 7 – Reserved
Pin 8 – Ground Analogue output
Pin 9 – Ground Vcc

4. LAN – Enables TCP/IP connection to a PC running the Optix software.

Alternatively, this can be used to communicate with the Optix OPC server.

5. RS232 – Allows for serial commands to be sent to the Optix sensor and for data
to be received.
Pin 1 – NC
Pin 2 – Tx
Pin 3 – Rx
Pin 4 – NC
Pin 5 – 0V
Pin 6 – NC
Pin 7 – NC
Pin 8 – NC
Pin 9 – NC

6. Function switch – Allows for a baseline to be taken or to reset the sensor,

depending on the length of press:
a. 100ms – Acquires a reference spectrum
b. 10s – Resets the sensor to default IP address and settings
7. Micro USB port – Enables USB connection to a PC running the Optix software.

3.3. Installation

1. Install the Optix sensor on a KF25 flange using the supplied meshed O-ring. The
Optix sensor can be mounted in any orientation.

2. Connect the High Voltage cable from the PSU High Voltage output to the Optix
sensor High Voltage input

10 www.gencoa.com/optix
 3. Connect the COMMS cable between the PSU and the Optix sensor

4. Connect the mains DC adapter to the DC input on the PSU.

5. Turn the PSU and sensor on via the ON/OFF switch on the PSU front facia.

Note: The meshed KF25 O-ring is required to eliminate any interaction between
plasmas in the monitored vacuum chamber and the plasma generated by the
Optix sensor.

11 www.gencoa.com/optix
4. Operation

4.1 Operating principal

The Optix sensor uses the principal of remote plasma emission monitoring to identify
and monitor gaseous species within a vacuum. The principal of operation is described
in the following schematic:

A) The sensor generates a small plasma using an integrated inverted magnetron.

The plasma is concentrated in a ring around the anode with an intensity that is
proportional to the current supplied by the PSU. Gaseous species that are
present in the monitored vacuum will diffuse into the plasma generator, become
excited by the plasma’s free electrons and emit light.

Note: The sensor is only able to detect gaseous species. Species, such as
metallic vapors, will condense before reaching the plasma generator.

12 www.gencoa.com/optix
 B) The light generated by the plasma is collimated and fed into an optical
spectrometer. The spectrometer resolves the intensity of the light at discrete
wavelengths at approximately 0.3nm intervals between 200nm and 900nm.

C) Gaseous species emit light at defined wavelengths – for example H emits light
at 656nm, 486nm and 410nm. Therefore, by monitoring the intensity of light at
specific wavelength the presence and changing concentrations of gases can be
determined.

4.2 Interpreting sensor readings (RGA and OES mode)

The Optix has two modes of operation: OES and RGA mode.

In OES mode the readings are relative to each other, or in other words, ratios rather
than absolute readings. Use this mode if ratios of gases are a better measurement or if
using the Optix to analyse an external plasma source.

In RGA mode the Optix calculates partial pressures of the selected gases.

In order for accurate readings it is important that all significant gases

present in the environment are selected. See page 35 for details on how to
setup the gas selection for RGA mode

4.3 Operating pressure regime

The Optix sensor is designed to operate from a total pressure of 1x10-7 mbar to
0.5 mbar. At pressures below 1x10-7 there will still be a plasma generated, however the
light intensity will be too low to be usable for most applications. Above 0.5 mbar a
plasma can be sustained, however the proportional relationship between partial
pressure and light intensity is no longer maintained. Additionally, contamination of the
plasma generator can occur.

13 www.gencoa.com/optix
The Optix is interlocked via its integrated pirani pressure gauge. By default the Optix is
set to enable the plasma below 0.5 mbar and disable the plasma above 0.5 mbar. The
pressure for the plasma on/off switch can be adjusted via the device settings. See page
29 (Starting Pressure) for details on how this can be adjusted.

Note: A secondary interlock to enable/disable the plasma can be set up by using

the PSU interlock (page 8). Disabling this interlock deactivates the high voltage
to the sensor and so will extinguish the plasma.

14 www.gencoa.com/optix
5. Maintenance

Internal description

1. Anode

2. Cathode

3. Window protector

4. Sapphire window

Cleaning the plasma generator

Periodic cleaning of the plasma generator’s electrodes may be required to maintain stable
operation. The frequency of cleaning will depend on the pressures and composition of gases
in the vacuum. Using the sensor with condensing species will require more frequent cleaning.

Cleaning the anode

1 2

1. Remove the 2 bolts from the front of the plasma generator

15 www.gencoa.com/optix
2. Remove the plasma generator cover and power feedthrough assembly

3 4

3. Carefully remove the anode by pulling on the power stud

4. Clean the anode (above the striking collar) to a reflective finish by using an abrasive
such as Scotch-brite combined with isopropyl alcohol. Be careful not to bend the
anode or damage the striking collar.

Cleaning the cathode

1. Loosen the magnetic array retaining screw

2. Remove the magnetic array then remove the 6 clamp bolts and the 2 half-clamps. The
internal surface of the cathode can then be cleaned with an abrasive such as Scotch-
brite combined with isopropyl alcohol.

16 www.gencoa.com/optix
Cleaning the sapphire window

Prolonged use of the sensor with condensing gases may cause a coating buildup to
occur on the sapphire window. Over time this may result in a degradation of the signal
intensity. The sapphire window may be cleaned or replaced by the following steps:

1 2

1. Unscrew 2 bolts connecting the bracket between the plasma generator and the
sensor case. Note: Do not unscrew 3 bolts on the sensor case as this may lead
to loss of calibration.

Carefully separate the plasma generator from the sensor case. Do not
excessively bend the two components whilst performing this action.

2. Remove the 4 screws from the locator part to expose the sapphire window.

Once removed, any coating on the window can be removed with fine abrasive
such as 1500 grit (or greater) emery paper.

17 www.gencoa.com/optix
6. Troubleshooting

Problem: Plasma fails to strike or no spectrum visible.

Cause / Action: If the plasma LED on the PSU is lit this would indicate that a short circuit has
developed between the plasma generator anode and cathode. In this case, check that no
debris is present inside the plasma generator and contact Gencoa.

Cause / Action: If the total pressure is below 1x10-6 mbar the plasma may not strike. It may
takes upwards of 1 minute for the plasma to strike at lower pressures. The striking time will
increase if the sensor becomes contaminated. See section xx for instructions on how to clean
the plasma generator.

Problem: A large, broad peak appears towards the IR

Cause / Action: This is caused by debris entering the plasma generator and adhering to the
anode. This in turn creates a charge concentration point that can result in a glowing spot that
will interfere with senor readings. The anode can be cleaned by gently wiping with a clean, dry
cloth to remove any debris. Ensuring that debris does not enter the plasma generator during
venting cycles will prevent this from occurring.

Problem: USB connection to the sensor is lost or unstable.

Cause / Action: The USB connection is susceptible to interference from high frequency noise,
such as that emitted by high frequency power supplies. If connection problems when high
frequency power supplies are used in the vicinity of the sensor then consider switching to the
Ethernet connection. The Ethernet connect is far less susceptible to high frequency noise.

18 www.gencoa.com/optix
Problem: A dead pixel (a single wavelength peak) is showing on the spectrum

Cause / Action: This is can be removed by taking a reference of the dark spectrum (i.e.
with plasma off) and selecting “use reference spectrum” in the sensor options.

Spectrum overlap

A single species can emit light at multiple wavelengths, therefore there is the possibility
that two species can have overlapping emission peaks. This is a similar effect observed
when using mass spectrometers where two species share the same mass. The
wavelengths used in the Optix default species selection library have been chosen to not
overlap with other species. However, care must be taken if selecting custom
wavelengths to account for this effect.

19 www.gencoa.com/optix
7. Specifications

Dimensions and physical data

Optix Sensor and Plasma Generator: 300mm x 170mm x 200mm

PSU: 165mm x 105mm x 55mm
Sensor weight: 2.2kg
Vacuum connection: KF25 flange
Mounting orientation: Any
Cathode and anode material: Cathode - Stainless steel (serviceable), Anode -
Molybdenum (serviceable and replaceable)

Electrical

Input voltage: 24V

Input power: 20W typical
Output voltage: 3kV max
Output current: 1.5 mA max

20 www.gencoa.com/optix
Operating data

Total pressure operating range: 1x10-7 mbar – 0.5 mbar

Sensitivity: 50 ppm air in argon at 1.6x10-2 mbar total pressure
Spectral range: 200nm – 900nm
Update speed: 1ms – 10 seconds (depending on sensitivity selected)
Total pressure measurement: Integrated (1x10-7 mbar – 0.5 mbar measurement range)
Electronics maximum operating temperature: 40°C

Communication interfaces

USB (Process monitoring software)

RS232
Ethernet (Process monitoring software or OPC server)
Digital relay output x 4, Analogue Output

Software

Windows 7, 8 and 10 compatible

21 www.gencoa.com/optix
Part 2 – Process Monitoring Software

1. Software overview – Optix tab

1 2 3 4 5 6 7

1. Add Optix sensor 2. Display all connected sensors

3. General settings 4. Start data saving
5. Stop data saving 6. Data saving settings
7. Data viewer

22 www.gencoa.com/optix
1.1 Add Optix sensor

An Optix unit can be connected to the Process Monitoring Software using an ethernet cable
or a USB cable.

1.1.1 Ethernet Connection

Select Ethernet from the connection options – the

default IP address is set to 192.168.0.98

Troubleshooting

• The computer running the Process Monitoring Software needs to be on the same
subnet as the Optix sensor i.e. the computer must share the first 3 entries of the
IP address with the Optix sensor.

• The Optix sensor cannot share an IP address with another device on the same
network. The Optix IP address can be changed in the Device Settings screen.

Connecting multiple units

Multiple Optix sensors can be connected via Ethernet to the same

software instance. The Show/Hide Devices control is used to view
connected Optix sensors and switch between the units.

23 www.gencoa.com/optix
 1.1.2 USB Connection

• Connect the Optix sensor to a PC using the supplied USB cable.

• Select the COM port from the dropdown list and press OK.

Note: If no COM port is shown in the dropdown list and you are using either Windows
7 or 8 then you may need to install the required USB drivers. To do this, locate the
Optix install directory (the default directory is C:\Program Files (x86)\Gencoa Ltd\OptiX
Software) and run the program serial_install

1.2 Display all connected sensors

Toggles between displaying and hiding the list of connected Optix devices.

24 www.gencoa.com/optix
1.3 General settings

General settings, which are to be applied to all connected Optix devices.

These settings are only applied on restarting of the software

• Automatically Hide the Menu – will

automatically hide the top menu when
the cursor moves off it.

• Communication Update Frequency –

selects the interval at which the Optix
communicates with the Process
Monitoring Software

• Species Charts \ Table update

Frequency – selects the interval at
which data presented in the software’s
charts will update.

25 www.gencoa.com/optix
 • Layout settings allows for customisation
of the Process Monitoring Software.

• Choose the size, location and number of

charts to be displayed.

• Smooth Value – Smooths changes

between values

• The Maximum and minimum visible

ranges for the trend chart can be set
by the user.

• Increasing the maximum visible

range will allow for more data to be
recalled user the trend graph.
However, this will be more
demanding on the PC.

26 www.gencoa.com/optix
1.4 Start data saving

• Starts the recording of trend data, which is saved in .csv format.

• When data saving is enabled all species contained within the species list will be saved
at the time interval specified in the setting dialog box.

1.5 Stop data saving

• Ends the recording of data, and generates a .csv file in the data saving
directory.

1.6 Data saving settings

• Sets the frequency, in seconds, at which data files are saved.

27 www.gencoa.com/optix
2. Software Overview – Device tab

1 2 3 4 5 6 7 8 9 10 11 12

16 17

13 14
15

18

1. Connect device 2. Disconnect device

3. Remove Optix 4. Device settings
5. Turn plasma on/off 6. Power supply settings
7. View spectrum 8. Sensor settings
9. Species setup screen 10. Clear triggers
11. Trigger settings 12. Analogue output settings
13. Species readings 14. Species ratios doughnut
15. Species triggers chart 16. Total pressure reading
17. Trigger status 18. Species trend view

2.1 Connect device

Reconnect to the Optix sensor once disconnected

28 www.gencoa.com/optix
2.2 Disconnect

Disconnects from the Optix sensor. The disconnected device will still show in
the device list.

2.3 Remove Optix

Removes the selected device from the device list.

2.4 Device settings

• When connecting multiple Optix sensors it is necessary to

assign a unique IP address to each unit. A unique name can
also be assigned to ease identification.

• DHCP can be turned on or off for the device.

• When using DHCP it may first be necessary to connect via

USB in order to determine the DHCP assigned IP address.
Do not use DHCP if you are connecting via usb or if your
network does not support it.

• Pressure Coefficient can be adjusted in order to

recalibrate the total pressure reading. This will also be
applied to all of the partial pressure readings.

• Starting Pressure is the pressure at which the Optix plasma will automatically turn
on and off at if “Start Automatically” is selected in the Power Supply Settings window.
0.5 mbar is the default value.

• It is not recommended to use a Starting Pressure above 0.5 mbar

29 www.gencoa.com/optix
2.5 Turn PSU plasma on/off

Turn the power supply high voltage output on or off in order to strike the
sensor’s plasma. A plasma will ignite under the conditions of the sensor’s
operating range.
The icon will turn yellow when the high voltage is on.
If the “Start Automatically” option is enabled (2.6) then the status will be
displayed by the colour however you cannot manually turn the plasma on or off.

2.6 Power supply settings

Monitor supplied voltage and current and change the

plasma power supply settings.

Start Automatically

• Enabling this option will turn the plasma on below the

“Starting Pressure” (2.4) and turn it off above this
pressure.

SetPoint

• Sets the current setpoint (in µA) of the plasma generator power supply. Current
setpoints of 50, 100, 200 and 300 are selectable. The default current setpoint is 200
µA.

Degas

• The degas function increases the power supply current setpoint to 1000µA in order to
accelerate ion induced desorption of species within the sensor. This is particularly
effective at removing water vapour from within the sensor

30 www.gencoa.com/optix
2.7 View Spectrum plot

• The spectrum view displays the light spectrum as read by the Optix spectrometer.
There are a number of features that can be enabled to enhance the interpretation of
the spectrum.

• A reference spectrum can acquired at any time by using the Refresh Reference
button. Using the Show Reference button will display the reference spectrum
alongside the current “live” spectrum.

• The reference spectrum can be subtracted from the live spectrum by enabling the
Use Reference Spectrum option from within the sensor settings menu. This can be
particularly useful when a “baseline” condition has been established, where this
feature is used to “zero” the sensor readings.

• Enabling Auto Scaling will automatically resize the spectrum to keep all peaks in
view. Note: Disabling Auto Scaling will allow manipulation of the spectrum view using
the same methods as used for the trend view.

31 www.gencoa.com/optix
Adding and saving spectra

• The spectrum can be saved by opening the view spectra icon and right clicking
on the active spectrum to save to a .csv file.

• Spectra can also be saved to a csv via the icon or a screenshot via

• Saved spectra can be added to the spectrum view by opening the add spectrum icon

and selecting the previously saved spectrum.

• The Auto Spectrum saving feature enables automatic saving of

the spectrum at a user specified time interval or when triggers
(2.11) are activated.

Auto ID

The Auto ID feature uses a peak detection algorithm combined with a reference library
of emission lines to identify spectrum peaks.

The emission library has been constructed based on experimental trials of the Optix
sensor, combined with referenced emission data. The library is tailored to avoid
displaying multiple identifications for a single peak, this in order to reduce the
probability of misidentification. Therefore, some peaks may not be identified if they
often overlap with multiple species.

32 www.gencoa.com/optix
 Auto ID settings

• No of Spectrum Sets the number of consecutively

identified peaks for a peak ID to be made visible. Setting a lower
value may decrease the stability of the peak ID.

• Minimum Height Sets the minimum peak height required

before the peak ID becomes active. Set this to a lower value if
there are too many peaks identified or higher to increase the
number identified.

• Spacing Sets the minimum spacing, in pixels, required

between each peak for the ID algorithm to become active.

• Hit interval Sets the distance either side of peak over which the algorithm will
search to find an entry in the ID database. Setting this value too high will result in
multiple identifications for a single peak. Setting too low may result in peaks not being
identified.

Species database Alternative databases can be loaded into the peak ID

algorithm via the button.

33 www.gencoa.com/optix
2.8 Sensor settings

Modify sensor integration time and data processing settings.

Integration time The integration time is one of the most

important settings for optimal operation of the Optix sensor. A
higher integration time will result in an improved signal to noise
ratio at the expense of update speed.

Be careful not to increase the integration time to the

point where a peak of interest becomes saturated. In
this case a will appear next to the species that is
saturated.

No of Scan Sets the number of scans averaged for each updated data point. Increasing
the number of scans will improve signal to noise ratio at the expense of update speed.

Use Reference Spectrum Select whether to subtract the most recent reference spectrum
from the active spectrum received from the spectrometer. This will “zero” the spectrum
reading.

Use Electrical Dark Selects whether to use correction for thermal effects on the
spectrometer

Use non Linearity Coefficient Selects whether to enable linearity correction for light
intensity

Refresh Reference Captures the current active spectrum as a new reference spectrum.
This can either be recalled and overlaid or subtracted from the active spectrum.

Spectrum Range Selects the spectral range to be acquired from the spectrometer.

Shift Pixel Applies a global offset to the spectrum by the specified number of pixels. This
can be used to adjust the wavelength calibration of the spectrometer.

34 www.gencoa.com/optix
Use Correction Selects whether to apply the irradiance calibration to the spectrum

2.9 Species setup screen (OES Mode)

The species settings screen assigns up to 20 species to be monitored by the Optix sensor.
These settings are then stored and processed on the Optix sensor.

Name Assign a name for the species to be monitored.

Enable Double click on the “tick” to decide whether the species will appear in the
monitoring charts. Note: this setting affects which species are saved when data saving is
enabled.

Coefficient Applies a coefficient to the species reading. Can be useful for bringing species
with different signals levels to be visible at the same level on the monitoring plots.

Min Sets the minimum trigger point for the species (see Trigger Settings)

Max Sets the maximum trigger point for the species (see Trigger Settings)

35 www.gencoa.com/optix
# Sample Sets the number of samples to be taken for each species readings. Increasing
the number of samples will improve the signal to noise ratio for that species, at the expense
of update speed.

Unlike the Number of Scans setting, which is applied to the whole spectrum, the #
Sample setting is per species. Therefore, individual species can be configured for
optimal signal to noise ratio vs speed of update.

Species setup screen (RGA Mode)

The RGA Mode of the Optix adds some additional options to the species setup screen:

Gas When enabled the species is used as part of the partial pressure calculation.

Make sure that “Gas” is enabled for all significant species present in the vacuum
system for most accurate partial pressure measurements.

Visible When enabled the species is displayed in the trend view.

36 www.gencoa.com/optix
Description

Selection defines the species by a central wavelength and a specified bandwidth in pixels
(each pixel is approximately 0.3 nm).

Selection Modes:

Sum Sums the value of the selected wavelength plus the values of the
wavelengths inside the bandwidth

Average Averages the value of the selected wavelength and those inside
the specified bandwidth

Tracking Identifies and uses the highest value within the selected
wavelength and bandwidth range.

Large shifts in temperature around the sensor can cause the location of
peaks to move by up to 3 pixels. Using the Tracking mode will automatically
correct for wavelength shifts of peaks within the specified bandwidth.

Combination defines the species by a combination of two other species – e.g. a ratio

Constant defines the species by a constant number – useful for displaying a reference level
on the trend plot.

37 www.gencoa.com/optix
Bandwidth Sets the number of pixels either side of the selected peak to be either
averaged, summed or tracked, depending on the Mode selection.

Species settings can be saved and then recalled at a later date.

2.10 Clear triggers

Resets and persistent triggers

2.11 Trigger settings

The trigger settings determine when the relay outputs on the sensor’s User port become
activated. There are 3 triggers that are user configurable, the 4th trigger on the User port is
always assigned to the sensor operational status.

Name Assign a name to the trigger

Enable Sets whether the trigger is used or not.

Persistence Sets whether the trigger remains active after the species crosses the trigger
threshold.

38 www.gencoa.com/optix
Time On Sets the time that the trigger remains active after the species crosses the
trigger threshold. This setting is only applicable if persistence is turned off.

Duration Sets the time that the species must remain inside the trigger condition for the
trigger to become active. This can be used to prevent noise from activating the trigger.

Species Selected Selects the species number to be used for the trigger

2.12 Analogue Output Settings

Select which species reading is sent to the Optix analogue output. The
output will be scaled to 0-10V between the minimum and maximum
readings.

2.13 Species table

Displays currently selected species

The species table summarises the selected wavelength, the assigned colours, the current
value of the reading (in % of the maximum spectrometer reading) and the minimum and
maximum trigger points.

39 www.gencoa.com/optix
2.14 Species donut

The species doughnut displays the ratio of intensities of the currently enabled species.

Species that are below their minimum trigger point are omitted from the
doughnut.

2.15 Species bar chart

Displays each species proximity to the selected maximum and minimum values

40 www.gencoa.com/optix
The species bar chart displays enabled species and their proximity to their maximum and
minimum trigger points. The name of the species will turn red when maximum or minimum
trigger points are reached.

2.16 Pressure reading

The current total pressure reading derived from the plasma generator electrode voltage,
current and integrated pirani gauge.

2.17 Trigger status

Each dot represents the status of the 3 user definable triggers (Filled blue is an
activated trigger)

2.18 Species trend view

The trend view displays the values of enabled species with time. Historic trends of species
that are not currently enabled will be displayed after they are re-enabled.

Pausing Pausing the update of the plot is performed by moving the scroll bar below the
plots x axis or by clicking the pause icon in the lower right.Un-pausing the plot is performed by
pressing the play button in the centre of the plot.

The trend view will auto-scale so that the species with the greatest reading is always visible.
When the plot is “live” (i.e. not paused) bounds will be placed on the ability to zoom so as to
keep all trends within view. Pausing the plot will enable complete control of the plot
manipulation.

Note: Pausing the plot does not mean losing data. Upon un-pausing the plot any data
taken during the pause period will be updated on the plot.

41 www.gencoa.com/optix
Zooming Zooming in on an area of the plot is performed by dragging a box over the
desired area from left to right. To zoom out to the default scale drag a box anywhere on the
plot from right to left.

Moving through time The plot can moved backwards through time by dragging the
scroll bar below the x axis of the plot

Rescaling the x and y axis The x and y axis can be rescaled by clicking (and
holding) the handles at the top or bottom of the axis – then dragging to re-scale.

Note: When in pause mode, full control is granted over the scaling. When un-paused
the plot will always rescale to fit the largest and smallest species values.

Free plot movement The plot can be freely moved in both the x and y axis by
holding the middle mouse button on any location on the plot and moving the mouse in the
desired direction. Note: This is only available in pause mode.

42 www.gencoa.com/optix
Part 3 – RS232 Communications

Baud Rate 38400 bps

The Optix acts as a slave device when using RS232 communications, i.e. it never initiates the
transmission. The master device transmits to the Optix which executes the communication
and replies to the master device.

RS232 Command Format

Get values (V), parameters (P) or information (I) with the G command

Set parameters with the S command

43 www.gencoa.com/optix
1 / Device

G1P

Device parameter set command

Additional commands: C1r = Reboot device

G1I

44 www.gencoa.com/optix
G1V

2 / PSU

G2P

PSU parameter set command

Command codes

45 www.gencoa.com/optix
Status codes

G2I

G2V

46 www.gencoa.com/optix
3 / Sensor

G3P

Sensor parameter set command

Additional commands: C3R – Refresh reference spectrum

47 www.gencoa.com/optix
G3I

5 / Species

G5P”species index”

Species parameter set command

48 www.gencoa.com/optix
G5V”species index”

6 / Triggers

G6P”trigger index”

Sensor parameter set command

Additional commands:

C6c”trigger index” (Clear individual triggers) C6c3 (Clear all triggers)

G6V”trigger index”

49 www.gencoa.com/optix
G6V3

7 / Analogue output

G7P

Analogue output parameter set command

G7V

50 www.gencoa.com/optix
Part 4 – OPC server

The Optix OPC Server

The Optix OPC Server is a windows-based application that allows OPC

compatible clients, such as HMIs and SCADA systems, to connect to the Optix
and access data.

A typical arrangement is shown in the illustration:

Graphics Distributed Supervisory

OPC
Clients workstation control Control and Data
(HMI) system Acquisition system

Optix OPC Server

OPC clients connect to the server using Microsoft COM or, if located on a
different host, Distributed COM (DCOM). The Optix OPC Server and the
controller communicate using a protocol which is transparent to OPC clients.
This protocol is proprietary to Gencoa Ltd.

The Optix OPC Server runs as a Windows form. This form can however be
made invisible which means that it will not appear on the task bar.

51 www.gencoa.com/optix
OPC Data Access Interface

The OPC Data Access interface allows multiple Data Access clients to access
any Optix controller tag.

A Data Access client can do the following:

• Query the value of a specific tag.

• Subscribe to a tag to receive updates when the value of that tag
changes.
• Change the value of a tag.

The Optix OPC Server conforms to version 3.00 of the Data Access Custom
Interface Standard published by the OPC Foundation.

Software Installation

This chapter describes the installation process for the OPC Portal Server.

Note: You cannot install the Optix OPC Server as an upgrade from a previously
installed version. You first need to remove the old version before starting a new
installation.

In This Chapter

• Preparing to Install the Optix OPC Server

• Install the OPC Core Components Redistributable
• Install the Optix OPC Server
• Using a Client on a Separate Computer

Preparing to Install the Optix OPC Server

You need these items to install the OPC Portal Server:

• USB memory stick provided by Gencoa Ltd.

• OPC Core Components Redistributable

52 www.gencoa.com/optix
 The installation process requires that you complete a number of tasks in the
following order:

1) Make sure you have a Windows administrator account with the privilege.
2) Install the OPC Core Components Redistributable.
3) Install the Optix OPC Server.
4) Set up Distributed COM (DCOM) if required.

Install the OPC Core Components Redistributable

Note: Before you begin this task, you must have a Windows administrator
account.

To install the OPC Core Components Redistributable, do the following:

1) Log onto Windows using an administrator account.

2) Insert the USB memory stick.
3) Locate the OPC Core Component directory
4) Click to install the OPC Core Components Redistributable (32 or 64 bits).
► The OPC Core Components Redistributable Setup Wizard starts.
5) Click Next.
6) At the Select Installation Folder step, do the following:
a. Accept the default folder for the installation.
b. Select the radio button for Everyone.
c. Click Next.
7) Review and accept the Licence Agreement, click Next.
8) At Confirm Installation, click Next to start the installation.
9) When Installation Complete appears, click Close.
► You have now installed the OPC Core Components.

Install the Optix OPC Server

Note: Before you begin this task, you must have a Windows administrator
account and you must have installed the OPC Core Components
Redistributable.

To install the Optix OPC Server, do the following:

1) Log onto Windows using an administrator account.

2) Insert the USB memory stick.

53 www.gencoa.com/optix
 3) Click to install the ‘Optix OPC Server Setup.msi’.
► The Optix OPC Server Installer starts.
4) Click Next.
5) At the Select Installation Folder step
Do the following:
a. Accept the default folder for the installation.
b. Select the radio button for Everyone.
c. Click Next.
6) At Confirm Installation, click Next to start the installation.
7) When Installation Complete appears, click Close.
► You have now installed the Optix OPC Server

Configuring the Server to Be Run by Different Users/Services

If you are implementing an HMI interface and developing your client (i.e. using
Cimplicity), it is possible that the user launching the program (i.e. ‘System User’)
might be different than the one starting the server (i.e. User logged on the
computer). If both user do not have the same ‘Rights’ it might limit the number of
functions/parameters that you can access.

Note: This really depends on the type of application and on your

developing environment so you might not need to change this option for
your program to work.

To configure the ‘default user account’ that will be running the Optix OPC
Server, do the following:

1) Log onto Windows using an administrator account.

2) Open the Windows Control Panel and navigate to Administrative Tools.

Select Component Services.
► The Component Services applet starts.

3) Within the Component Services applet, navigate to Component Services ->

Computers -> My Computer.

54 www.gencoa.com/optix
 ► Expand the My Computer item and select DCOM Config. Locate the
Optix OPC Server in the list.

12) Right-click to open the properties for the server, select the Identity tab.

55 www.gencoa.com/optix
 ► Set the user account to The launching user.

Note: As mentioned above, this depends on the type of application and on

your developing environment so you might not need to change this
option.

56 www.gencoa.com/optix
Server Interface

Register the Server

In order to communicate with the Server through an OPC client, you first need to
register the server into the windows registry. After you clicked on this button (and if you
acknowledge the popup window) it will call the ‘regserver’ command and shutdown the
application. You can restart the Server from the Start Menu or connect to it from your
client application (the Server will automatically open when the first client connect to it).

Unregister the Server

If you wish to uninstall the Server from the computer, it is cleaner to first unregister it.
This will remove the server entry from the Windows registry. After you acknowledge the
popup window the application will shut down. You can completely remove the Optix
Server from the program options in the control panel.

57 www.gencoa.com/optix
Prog ID and CLSID

OPC server names are DCOM ProgIDs, human readable names for components that
have numeric names (CLSID's) in Windows. The CLSID is what is used by the OPC
Client when it actually tries to connect to the OPC Server. In the case of this Optix
Server, resolving the OPC Server name (ProgID) Optix.OPCServer.1 will return a
CLSID of {83D2074F-D746-4138-BF4D-EA988D182011}.

Connected Clients

This will displayed the number of OPC clients currently connected to the Server.

Interface Visibility

Most servers run as services and it is not straight forward to see if they are running
and/or their status. To help with the design/test of the client application the above
window is shown. When you finish your testing or if you do not wish for this window to
be displayed you can make it invisible.

Note: There is also an OPC tag to make this window visible or invisible.

Log Area

Any error code returned by the server that is not related to a COM/DCOM error will be
appended in this text area together with a short description.

The COM/DCOM errors are shown in the result section of the OPC item/tag.

Connection Status

Indicate if the Server is currently connected to a Optix controller.

Green: Connected
Red: Not connected

58 www.gencoa.com/optix
Close the Server

You can use this button to properly shutdown the server. This will notify the OPC
Clients connected to the Server that you want to close it, giving each one enough time
to properly disconnect.

59 www.gencoa.com/optix
Tag Description

Note: Tags within the Device group only update when the initial
connection is made to the Optix. Other tags will update at the specified
UpdateTime and only if their value has changed.

Group Tag Type Description

IP R/W String IP address of the Optix. Must be set to match the unit to be
connected.

Connect R/W Bool Connection status between the OPC server and the Optix. Set this
to true in order to connect to the Optix for the first time.

AutoConnect R/W Bool Enable or disable auto connection to the Optix. Connect must be first
set to True

ReturnCode R/W Integer Displays error codes (see page 57)

Visible R/W Bool Selects visibility of the server

UpdateTime R/W Integer Update time in ms for communication between the server and the
Optix.. 250 ms minimum value

Device SN R String Sensor serial number

Model R String Model number of the sensor

Firmware R String Firmware version of the sensor

MacAddress R String Mac address of the sensor

TimeFirstUse R String Time of first use of the sensor

NoOfSpecies R Integer Total number of species available

NoOfTriggers R Integer Total number of triggers available

UseDHCP R Bool Status of DHCP use

IP R String IP address of the sensor

Name R String Name of the sensor

ModeRGA R Integer Displays if sensor is in RGA mode

PressureUnit R Integer 0 = mbar, 1 = Torr, 2 = Pa

60 www.gencoa.com/optix
 PressureCoefficient R Real Pressure correction coefficent

StartingPressure R Real Swithing pressure for the plasma ignition

TimePowerOn R String Time of last power on

HasSensor R Bool Spectrometer detected

HasPSU R Bool PSU detected

Temperature R String Temperature of the spectrometer at connection

PSU SN R String Serial number of the PSU

Model R String Model number of the PSU

Firmware R String Firmware version of the PSU

Type R Integer 0 = DC, 1 = Pulsed

Interlock R String Status of the PSU interlock

Status R/W Bool High voltage status of the PSU. True = on, False = off. Use this to
turn the plasma on or off

Pulse R/W Integer Activates the pulse mode if a pulse power supply is present

Degass R/W Bool Activates the degass mode

CurrentSP R/W Integer Current setpoint. 0 = 50μA, 1=100μA, 2=200μA(default)

AutoStart R/W Bool Activates the plasma autostart (will over-ride status writes)

Regulation R Bool 0=plasma off, 1=plasma on OK, 2=Degassing, 3=Striking, 4=Open

circuit, 5=Short circuit, 6=General fault, 10+=Pressure gauge fault

Voltage R Bool Voltage reading in V

Current R Bool Current reading in µA

Pressure R String Pressure reading

Sensor IntegrationTime R/W Integer Spectrometer integration time in ms

NoOfScan R/W Integer Number of spectrums averaged

PixelShift R/W Integer Wavelength calibration correction +- pixels

UseReference R/W Bool If True will subtract the reference spectrum from the active spectrum

UseElectricalDark R/W Bool If True will enable electrical dark correction

UseNLC R/W Bool If True will enable nonlinearity correction

61 www.gencoa.com/optix
 UseCorrection R/W Bool Use irradiance calibration

RemoveDark R/W Bool Automatically remove dark

ForceSaturation R/W Cap the max intensity when using correction

ResetReference R/W Integer Writing any value will reset the reference spectrum

Species Index R Integer Index of the species

(1…20)
Name R/W String Name of the species

Enable R/W Bool Selects whether the species is enabled or not

Type R/W Integer 0 = single wavelength, 1 = combination, 2= constant value

Wavelength R/W Real Wavelength selection in nm

Bandwidth R/W Integer Bandwidth in pixels

Mode R/W Integer 0 = Sum, 1 = Average, 2 = Tracking

Selection1 R/W Integer First species selected when in combination mode

Selection2 R/W Integer Second species selected when in combination mode

Operator R/W Integer 0=/ 1=+ 2=- 3=x

ConstantValue R/W Real Value to be used if constant mode selected

NoOfSample R/W Integer Number of samples to be averaged for the species reading

Coefficient R/W Real Coefficient to be applied to the species reading

Min R/W Real Minimum trigger value

Max R/W Real Maximum trigger value

UseforPP R/W Bool Selects if to use this species for the partial pressure calculation

Value R Real The species reading in % of full scale or partial pressure (in RGA
mode)
Status R Integer 1 = Below Min, 2 = Between Min and Max, 3 = Above Max

Triggers Index R Integer Index of the trigger

(1…3)
Name R/W String Name of the trigger

Enable R/W Bool Selects whether the trigger is enabled or not

Persistence R/W Bool Selects the persistence state of the trigger

62 www.gencoa.com/optix
 SpeciesIndex R/W Integer Index of the species to be used for the trigger

Condition R/W Integer 0 = Below Min or Above Max, 1 = Below Min, 2 = Between Min and
Max, 3 = Above Max

TimeOn R/W Integer Time on in seconds

Duration R/W Integer Duration in seconds

Status R/W Bool Active status of the trigger. Trigger can be cleared by writing 0

Analogue Enable R/W Bool Enable or disable the analogue output

Output
Index R/W Integer Index of the species to be used for the output

Min R/W Real Min value for the output scaling in % or partial pressure depending
on the sensor mode

Max R/W Real Max value for the output scaling in % or partial pressure depending
on the sensor mode

Return Codes

Note, the last error code will persist until cleared by a “0” write

Value Description

0 The last operation/command happened successfully

-20 Cannot connect

-23 Error while disconnecting

-52 Error Reading OPC tag

63 www.gencoa.com/optix