Preprints202011 0262 v1
Preprints202011 0262 v1
v1
Review
* Correspondence: [email protected]
1. Introduction
Piezoelectric materials have been in development for 140 years[1]. These materials are widely
used in electromechanical devices because they can convert mechanical energy to electrical energy
under pressure or generate mechanical motion by electricity[2,3]. The use of piezoelectric materials
for the preparation of micro-electromechanical devices makes it possible to develop miniature
resonators[4-8], frequency meters[9] and micro energy supply chips[10-14]. Piezoelectric crystals
have a single crystal structure and natural piezoelectricity, such as α-quartz[15,16]. In addition to
natural piezoelectric materials that can adapt to different application scenarios, researchers have also
manufactured many high-performance artificial piezoelectric materials. Typical piezoelectric-crystal
materials include aluminum nitride (AlN) and zinc oxide (ZnO)[17,18], which have a variety of
advantages, such as very high strength, large piezoelectric coefficients, and good applicability to
micro devices[19,20]. Piezoelectric ceramics consist of many small crystals and the crystals are
randomly oriented. The crystal orientation can be changed through a polarization process to exhibit
piezoelectricity. The polarization process is usually performed by applying a high electric field. PZT-
series materials such as PMN-PZT and PMMPT are typical representatives of piezoelectric ceramics;
they not only have high piezoelectric coefficients but also good ductilities. However, the bending
property of PZT-series materials is still poor, and they pollute the environment because of their lead
content. Generally, these inorganic piezoelectric materials have the features of high hardness and
brittleness, which are not suitable for flexible devices that require high material flexibility.
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With the rapid development of wearable devices, there is an increasing demand for device
flexibility. Compared with inorganic and ceramic materials, piezoelectric polymers have more
remarkable bending and tensile properties. Polymer piezoelectric materials have a carbon chain as
the backbone, and their flexibility is higher than those of single crystals and ceramics[21-23]. This
high flexibility allows them to withstand a greater amount of strain, thus making them more suitable
for application scenarios with large bending and twisting requirements. Some suitable piezoelectric
polymers, such as polyvinylidene fluoride (PVDF), polyvinylidene fluoride-trifluoro ethylene
(P(VDF-TrFE)), cellulose and its derivatives, polyamides, and polylactic acids, are widely used in
ultrasonic sensors, audio sensors, medical sensors, display equipment, vibrometers, impact sensors,
pressure sensors, and many other applications[24]. Among flexible piezoelectric materials, PVDF has
a high piezoelectric coefficient, good flexibility, and excellent biocompatibility; therefore, PVDF is
widely used to develop flexible electromechanical devices.
However, improvement of the polarization characteristics of flexible piezoelectric materials
continues to be challenging. The piezoelectric coefficient of PVDF can be effectively improved by
doping with inorganic piezoelectric materials, such as PZT and piezoelectric ceramics. In addition,
nano-clay, BTO, Ag, graphene, and other nanomaterials can change the crystal structure of PVDF and
increase the β phase proportion. Moreover, some new fabrication methods can also improve the
polarity of flexible piezoelectric materials. In this paper, the recent progress in material science of
PVDF and PVDF composites, aiming for micro fabrication techniques, is reviewed. We discuss the
latest technological scheme and processing methods and compare their merits and demerits. The
improvement in the performance of flexible piezoelectric materials has overcome the limitations of
wearable electromechanical devices. The applications of these materials in electromechanical devices
are discussed in detail. Finally, the development trend of flexible electromechanical devices based on
PVDF is prospected in the future, such as using the help of piezoelectric properties of biocrystals,
improving the biocompatibility and for the development of bionic devices.
where 𝛿 and 𝐷 represent the strain component and electric displacement component, respectively;
𝑠 and 𝑒 represent the elastic compliance and constant under a constant electric field, respectively;
𝑑 represents the piezoelectric coefficient; 𝑡 represents the transposition; 𝜀 and 𝑇 represent the
dielectric constant and constant stress, respectively; 𝜎 and 𝐸 represent the stress and electric field
components, respectively. The direct piezoelectric effect is very important for the sensing and energy
collection of surface charge generated by applied stress on piezoelectric materials.
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Many piezoelectric materials have a very clear polar axis. Energy harvesting performance is
related to the angle between the stress and polar axis. The direction of the polar axis is “3” directions,
and the direction perpendicular to the polar axis is “1” direction. The direction of stress application
can be along either direction “1” or “3” directions, thus forming 31-mode and 33-mode[32].
The piezoelectric properties of PVDF are directly related to its structure[33]. PVDF is a semi-
crystalline polymer polymerized by H2C =CF2 monomer, whose properties depend on the phase due
to the alignment of crystals (Figure 1a). When two CF2 or CH2 groups are connected, a defect occurs
in the connected polymer chain. Defects in the polymeric chain influence the polarity of the PVDF
film, thereby increasing the piezoelectric response. The polymer has α, β, γ, б, and ε phases, which
are five semi-crystalline polymorphs. The α and β phases are the most common phases. The γ phase,
which is not common, is a transitional state between α and β. б and ε are difficult to isolate. The α
phase of PVDF is non-polar[34], because it contains two molecular chains and the dipole moments
are reversed, forming a trans-gauche conformation (TGTG′) (Figure 1b). The β phase of PVDF has an
all-trans conformation (TTTT) (Figure 1c). Most hydrogen atoms and fluorine atoms are separated;
therefore, it has a dipole moment perpendicular to the polymer chain, which shows the highest net
dipole moment. The γ phase of PVDF is a transitional state between α and β (Figure 1d), it has a
smaller dipole moment than the β phase[35]. It is necessary to increase the proportion of β phase in
PVDF to maximize its electromechanical conversion efficiency[36].
Figure 1. (a) Structure of PVDF; (b) Space structure of α-phase PVDF; (c) Space structure of β-phase
PVDF; (d) Space structure of γ-phase PVDF.
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current, respectively (Figure 2c). It has a much higher energy conversion efficiency than generators
made of PVDF thin films[43].
Figure 2. (a) Structure of P(VDF-TrFE) [41]; (b) PVDF nanofibers with the high component of β-phase
PVDF by near-field electrospinning[43]; (c) The generator based on fiber could provide a maximum
output power is 5-30 mV and 0.5-3 nA with different feature sizes[43]; (d) A free-standing film's
photograph and SEM image [44]; (e) The output power of the generators based on textile[44]; (f) The
“3D spacer” cross-sectional SEM image[52]; (g) 2D and 3D piezoelectric textile's output power[52].
The P(VDF-TrFE) copolymer has high crystallinity and piezoelectric properties, so it has a high
piezoelectric response[53-55]. Persano et al.[44] proposed a piezoelectric textile based on highly
aligned electrospun P(VDF-TrFE) fibers. The proposed piezoelectric textile has a large area, and it is
flexible and freestanding (Figure 2d)[44]. The maximum open-circuit voltage of the generators based
on textiles can reach 1.5 V (Figure 2e)[44], thus showing excellent flexibility and mechanical strength.
Many new designs have emerged in the practice field to produce all-fiber piezoelectric textiles. A “3D
spacer” based on all-fiber piezoelectric textiles was reported[52], consisting of top and bottom
electrodes and a spacer yarn. The spacer yarn is composed of high concentration of β-phase PVDF
monofilaments. The top and bottom electrodes are composed of silver-coated polyamide
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multifilament yarn layers (Figure 2f)[52]. The new type of 3D textile-based PVDF generator had a
much larger output power density than the traditional 2D piezoelectric textile, up to 5.07 lW/cm2 [56-
60] (Figure 2g)[52].
Figure 3. (a) Variation of stored power with time and SEM of PLZT particles dispersed in the PVDF
matrix[63]; (b) The relationship between output voltage and applied forces with different
frequencies[64]; (c) Relationship between output frequency and voltage of PVDF nanofiber composite
containing BNT-ST[9]; (d) Optical diagram PVDF/BTZO hybrid film[68]; (e) SEM of PVDF/BTZO
hybrid film[68].
was embedded in BTZO using a molten-salt process under ultrasonication (Figure 3d)[68]. The SEM images of
the PVDF/BTZO hybrid film are shown in Figure 3e. It can be concluded that by the molten salt method,
replacing the Ti4+ (0.605 Å) site with a Zr4+ atom (0.72 Å) can modify the high-purity bulk BaTiO3
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nanocomposites and enhance the piezoelectric coefficient (d33) from 100 pC/N (BaTiO3)[74-78] to 174-236 pC/N
(BaTi(1-x)ZrxO3)[79-83]. The properties of BTZO/PVDF hybrid films have been substantially improved compared
to those of pure piezoelectric films and have great potential in manufacturing environmental protection devices,
active sensors, and flexible nanogenerators.
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nanoparticles into metals, which shows the potential for mechanical energy generation and motion sensing.
Figure 4e shows the fabrication process of the device. They respectively studied and compared the voltage
output of pure ZnO-PVDF samples and ZnO-PVDF composites doped with sodium (Na), cobalt (Co), silver
(Ag), ferric oxide (Fe3O4), and lithium (Li)[119].
Figure 4. (a) The SEM of BTO/P(VDF-TrFE) nanocomposite fiber[97]; (b) PVDF-PZT nanocomposite
fiber, the crystallization mechanism, and β-phase formation based on adding PZT[11]; (c) Change of
piezoelectric coefficient in the form of output voltage under different light conditions[105]; (d)
Output voltage and current signal of GFO-PVDF composite films[115]; (e) Schematic of the
manufacturing process of the device[119].
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casting method was used to make the flexible piezoelectric pressure sensor shown in Figure 5c. PDA can
improve the dispersion of BTO in the PVDF matrix, reduce interface void defects and cracks between the two
components. The output voltage is about 2 times higher than the unmodified one, and 13.3 times higher than
the original PVDF. Tamang et al.[124] reported that DNA was used as a nucleating agent to produce a self-
polarized PVDF membrane with higher piezoelectric properties (Figure 5d). This nucleating agent can achieve
the molecular dipole arrangement and the nucleation of the electroactive β phase in PVDF. Phosphate ions
interact with hydrogen bonds on the single-strand deoxyribonucleic acid (ss-DNA) backbone to form a stable
polar β phase, accounting for more than 80% of polar β-phase in the PVDF matrix (Figure 5e).
Figure 5. (a) Piezoelectric voltage generated increases with increasing applied force[121]; (b) Open-
circuit voltage of the FF-generator[122]; (c) The fabrication process of PDA@BTO/PVDF composite
membrane on the basis of flexible pressure sensor[123]; (d) DNA was used as a nucleating miagent
to produce a self-polarized PVDF membrane to fabricate nanogenerator[124]; (e) Denaturation of
DNA and the forming process of ß-enriched DNA-PVDF membrane[124].
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Figure 6. (a) Schematic of electrode poling method and (b) corona poling method.
Electrode poling and corona poling are the two most common methods of polarization.
Electrode poling has the advantages of high d33 coefficient and reproducibility. Electrode poling is a
relatively simple method among these two methods. The PVDF film is sandwiched between two
electrodes and then wrapped by a shell (Figure 6a). To prevent the PVDF film from being broken
down by the arc between the electrodes, the air in the shell needs to be evacuated or an insulating
liquid needs to be injected into the shell[127,128]. To polarize the PVDF film, we need to apply an
electric field between 5 and 100 MV/m. Corona poling needs to keep the gas in the shell dry. We can
circulate dry or inert gas. The PVDF film is only in contact with one of the electrodes. The corona tip
is placed on the top and connected to a 10 kV voltage. The voltage connected to the grid is much
lower (10 kV), ionizing the gas between the corona tip and the grid and accelerating the movement
to the PVDF film, thereby polarizing the PVDF film (Figure 6b). The electron beam poling method
uses a focused electron beam and irradiates the PVDF film to reorient into the β phase. In addition to
the above polarization methods, mechanical drawing and additive manufacturing can polarize
PVDF. As for additive manufacturing, we can induce the formation of the β phase using composite
systems. Table 1 shows the advantages of various polarization methods. The method of solvent
casting mainly relies on the addition of some compounds and application of high temperature and
external electric field, to promote the formation of the β phase state of PVDF. Chien et al.[129] spin-
coated PVDF–TrFE dissolved in MEK and hot embossed the silicon mold on the film under DC poling
(Figure 7c). The electric voltage varied from 30 to 60 V, and the temperature was 90 or 110 °C.
Figure 7. (a) Schematic diagram of the spin coating and (b) Solvent casting; (c) Spin coated PVDF-
TrFE was dissolved in MEK and the silicon mold was hot pressed on the film [129]; (d) SEM of PVDF–
TrFE copolymer thin films fabricated by spin coating[130]; (e) Preparing the PVDF-BaTiO3
nanocomposite films by spin coating[131].
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The piezoelectricity of thin films reaches as high as 14.0 pm/V, with a d33 value of 72.2 pC/N.
Tushar et al.[130] spin-coated PVDF–TrFE copolymer into thin films to induce the formation of the β
phase with a d33 value varying from 38 pC/N to 74 pC/N (Figure 7d). Schulze et al.[132] prepared
P(VDF-TrFE) films for 20 µm thickness by solvent casting under the effect of electrode poling and an
electric field of 75 MV/m. The d33 coefficients were measured to be about 20 pC/N. The spin-coating
technique[131] was used to prepare the PVDF-BaTiO 3 nanocomposite films on an interdigital ITO
electrode(Figure 7e). Vineet et al.[61] fabricated PVDF/PZT piezoelectric composite films by a
solution cast technique. The d33 value varied from 60 pC/ N to 84 pC/ N. The higher the content of
PZT ceramic, the greater the proportion of the β phase of PVDF.
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Figure 8. (a) Schematic diagram of the Electrospinning technique; (b) Flexible bend sensor to monitor
human respiration[106]; (c) Optical photo and SEM of (BTO)/P(VDF-TrFE) composite nanofibers[97];
(d) Optical photo and SEM of BNT-ST/PVDF nanofiber composite[9]; (e) PVDF strain sensor for
measuring the force of the string[135]; (f) Mechanical movement in the primitive phase and the
bending phase[136]; (g) Optical image and output voltage generated by human movement[136].
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Figure 9. (a) Schematic of 3D printing of PVDF layer; (b) Corona poling process; (c) Simultaneous 3D
printing and in-situ polarization; (d) 3D printing process and fabricated PVDF film[137]; (e) 3D
cylindrical sensor's piezoelectric voltage output when five finger taps[138]; (f) Optical diagram of 3D
printing technique and corona poling process[139].
Finally, we completed the integration of 3D printed PVDF and PVDF composites with the in situ
polarized PVDF. The schematic is shown in Figure 9c. The shear force between the nozzle and PVDF,
as well as heating, nucleation on filler surfaces, and electric field, all help to promote the formation
of the β-phase state of PVDF. Hoejin et al.[140] fabricated PVDF/BaTiO3 nanocomposites using a 3D
printing technique. Then, the composite material was thermally polarized to improve the
piezoelectric response of the composite. The piezoelectric response of the PVDF/BaTiO3
nanocomposite was three times higher than that of the nanocomposites fabricated by solvent casting.
Using the 3D printing technique, we can obtain a more homogeneous dispersion of PVDF/BaTiO3
nanocomposites, in comparison with nanocomposites fabricated by solvent casting. Chen et al.[137]
fabricated electroactive PVDF thin films of bi-axially oriented using layer-by-layer 3D printing.
Carbon nanotubes were added as a nucleating agent to induce the formation of the β-phase state of
PVDF (Figure 9d).
Sampada et al.[138] fabricated flexible, lightweight, and complex-shaped piezoelectric devices
by 3D printing (Figure 9e). The d31 coefficients were measured to be about 18 pC/N. PVDF films with
enhanced β-phase percentage[139] were fabricated by 3D printing (Figure 9f).
This section reviews the common preparation methods for PVDF. The different fabrication
methods and polarization of PVDF are shown in Table 2. The electrospinning process has the
advantages of direct polarization, while spin coating and pouring methods are simpler and more
compatible with other processes. As a new technology, 3D printing has also attracted the attention of
researchers.
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Electrospinning
(feed rate of 1.0
PVDF[9] the measurement system of
ml/hour needle tip to
(PVDF/ BNT- the output voltage as a No Poling
collector distance is
ST) function of frequency
10 cm humidity of 25
∼ 40%)
Electrospinning
peak-to-peak voltage
(feed rate of 0.5
PVDF[136] Vp-p= 11 V
ml/hour 2000 rpm
(PVDF/BT/gr nanocomposite fibers are No Poling
and needle tip to
aphene) promising for wearable
collector distance is
devices.
12 cm for 3 h)
Spin coated DC poling
d33 =72.2 pC/ N the PVDF –TrFE (Electric voltage
PVDF– the piezoelectricity of thin dissolved in MEK varied from 30 to
TrFE[129] films reaches as high as 14.0 and hot embossed 60 V and the
pm/V the silicon mold on temperature was
the film 90 or 110 ℃)
Spin-coated
PVDF- d33 =38-74 pC/ N PVDF–TrFE into thin
TrFE[130] films to Induce the No Poling
formation of β phase
Solvent Casting
PVDF–TrFE for 20
PVDF– d33 = 20 pC/ N electrode poling
µm thickness under
TrFE[132] (electric field is 75
the effect of electrode
MV /m)
poling
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No Poling
Solution Casting The higher the
PVDF/PZT to content of PZT
PVDF[61] d33 = 60-84 pC/ N
fabricate ceramic, the
(PVDF/PZT)
Piezoelectric greater the
composite films proportion of β
phase of PVDF
the piezoelectric response of
the PVDF/ BaTiO3
nanocomposite is found
three times higher than
PVDF[140] nanocomposite fabricated by
Thermal poling
(PVDF/BaTi solvent casted 3D print
(performed for 2 h)
O3) more homogeneous
dispersion’s PVDF/ BaTiO3
nanocomposites than that
fabricated by solvent casted.
No Poling
(carbon
nanotubes were
thin films became very dense added as a
PVDF[137]
with high β-phase after 3D print nucleating agent to
depositing layer-by-layer. induce the
formation of β
phase state of
PVDF)
PVDF[138] No Poling
d31 =18 pC/N 3D print
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Figure 10. (a) Schematic of the energy harvesting device; (b) Schematic diagram of woven triboelectric
nanogenerator production process[141]; (c) Nanogenerator harvests energy from human finger
tapping, human arm movement and human footsteps[141]; (d) The phenomenon of charge
separation during the process of press nanogenerator and release pressure of nanogenerator[142].
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be used as real-time monitors of people’s activities (Figure 11b). Lee et al.[94] proposed a highly
sensitive gauge sensor based on PVDF and ZnO nanostructures on graphene electrodes (Figure
11c)[94]. It can detect pressure changes with the lowest 10 Pa value, which is 1000 times lower than
the minimum required for artificial skin. The temperature value calculation is based on the signal
recovery time (Figure 11d). The PVDF-TrFE copolymer membrane pressure sensor is manufactured
via a standard photolithography process that can be used for batch processing, thereby reducing
costs. The resulting membrane has good uniformity and high polymer pattern resolution[150]. Alluri
et al.[68] processed piezoelectric films made of PVDF and BaTi(1−x)ZrxO3, which can effectively
convert pressure signals into electrical signals, with a maximum peak power of 15.8 nW. The 3D
printed PVDF with BaTiO3 (BTO) filler[151] can also be used for pressure sensing[151]. Compared
with the single PVDF composite of TNL[152-154], the sensitivity was increased by 333.46% at 5 kPa
under the effects of the new additives shape, good interaction, and well-distributed hybrid additives
in the matrix. This confirmed that it was possible to fabricate low-cost and lightweight electronic
devices with reduced quantities of metal oxides and pressure sensing devices.
Figure 11. (a) Schematic of flexible pressure sensor used to detect pressure signal[134]; (b) device was
used as a motion sensor to monitor knuckle bends and vocal cord vibrates[134]; (c) Schematic of
sensor based on PVDF and ZnO nanostructures on graphene electrodes[94]; (d) The relationship
between temperature and recovery time[94]; (e) Generated output voltages, output currents, output
powers by Finger bending, knee and elbow movements[144]; (f) Pressure sensor embedded in the
bottom of the insole or stuck on human arm and voltage generated by jumping, walking, running and
different bending angles' elbows[123].
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it can specifically adsorb gas or water vapor to form a mass sensor. For example, when the sensing
interface contacts the target gas, the physical shape and mass changes caused by the absorption of
gas will affect the resonance frequency and other physical parameters of the piezoelectric polymer-
sensitive film. To detect the hydrogen concentration, Zengwei et al.[155] applied the phase separation
method to deposit a PVDF microporous membrane on the surface of a palladium-loaded tin dioxide
(Pd-SnO2) gas-sensitive film. The stability of the sensor under high humidity was evidently improved
by the influence of the PVDF microporous membrane. Hydrogen sensor[156] can be made by sticking
the Pd film on both sides of the PVDF membrane. Because of the selective absorption of hydrogen by
the palladium membrane, expansion deformation occurs under the PVDF action, which is converted
into voltage signal output.
Figure 12. (a) Schematic of the spin coated PVDF-TiO2 on interdigital ITO electrode[157]; (b-
d) Graphical representation of the PEDOT: PSS/PVDF generator producing a stable DC
voltage.
The introduction of humidity in sensitive materials can also play a role in humidity sensing. The
spin coating technique was used to prepare the PVDF TiO2 nanocomposite films on interdigital ITO
electrode[157], and the surface morphology was modified by acetone etching. The volume
deformation of PVDF is caused by the hygroscopicity of nano-TiO2, resulting in a piezoelectric effect
(Figure 12a)[157]. Wang et al.[158] proposed a simple and low-cost method to prepare a moisture-
responsive composite membrane composed of PEDOT: PSS and PVDF by spin coating and thermal
evaporation. The bending angles of the composite film in both directions can reach 191 and 225,
respectively, showing good bidirectional bending performance. As shown in Figure 12b-d, the PVDF
film is glued together with the PEDOT: PSS film. PEDOT: PSS easily absorbs water[159-161]. In
different humidity environments, PEDOT has different bending degrees due to different water
absorption rates. PVDF films produce voltage signals under the corresponding bending degrees,
representing the specific humidity.
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biosensor was successfully applied to detect the animals’ doxycycline with a detection limit of 50 ppb
(Figure 13a-c)[162]. In the field of microfluidic channels, the developed on-chip ultrasonic transducer
was performed excellently, with the potential to be used for ultra-sensitive detection of DNA,
proteins, and food antibiotics. Lin et al.[163] fabricated microporous PVDF membranes with different
surface morphologies from coagulation baths of different strengths by immersion-
precipitation. Using the dual-step procedure, ss-DNA was covalently immobilized on the
membranes. The antibody in serum can be effectively adsorbed by the immobilized DNA,
performing antibody detection. Similarly, nucleic acid sensors based on PVDF[164] have been
developed. In the experiment, they used the hybridization between the capture probe and target
analyte (Figure 13d)[164] and found that the mass load on the membrane was proportional to the
quantity of target nucleic acids (Figure 13e)[164].
Figure 13. (a) Schematic of the chip[162]; (b)The experimental setup for characterizing the ultrasonic
transceivers[162]; (c)The plastic microfluidic chip with ultrasonic transceivers[162]; (d) Schematic of
the biosensor using PVDF film as piezoelectric layer[164]; (e) Relationship between mass load and
frequency shift (Δf)[164].
In recent years, much attention has been paid to the research of artificial bionics devices. In 2019,
Wu et al.[165] reported a flexible robot based on a piezoelectric single chip bending structure (Figure
14a-b)[165]. Its relative speed is 20 times its body length per second, which is the fastest measurement
speed among the reported artificial robots on an insect scale. The soft robot uses the principle of
several kinds of animal movements, such as carrying load, the firmness of a cockroach, and climbing
slopes. Even after bearing the weight of an adult's footsteps (approximately 1 million times heavier
than the robot), the system can continue to move (Figure 14c)[165].
Piezoelectric polymers also have good performance in the manufacturing of artificial muscles.
Simaite et al.[166] prepared a hybrid membrane with hydrophilic PVDF grafted poly- (ethylene
glycol) monomethyl ether methacrylate (PEGMA) outer surface and hydrophobic main body, which
is a model human muscle composition, as shown in Figure 14d . The results are expected to be used
in artificial muscles. Xiao et al.[167] fabricated a fish-like robot to imitate fish swimming. The fish-
like robot is composed of a body and a tail. The body is made of expandable polystyrene and the tail
is made of graphene-PVDF as an actuator. The graphene-PVDF film is connected with a flexible Au
wire. When the power is turned on, the fish’s tail is bent, and when the power is turned off, the tail
returns to its original position. As the power is continuously turned on and off, the fish-shaped robot
can move forward as a speed of 5.02 mm/s. Kim et al.[168] fabricated a new IPMC actuator on the
basis of blend membrane made by PVDF/ polyvinyl pyrrolidone/ /polystyrene sulfuric acid . The
robot can support 2-, 4-, or 6-IPMC-leg models and this miniature walking robot has a size of 18 x 11
x 12 mm, a weight of 1.3g and a maximum speed of 0.58mm/s.
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Figure 14. (a) Optical photo of the fabricated robot and the SEM image of the cross-sectional view of
the prototype robot with different layers of materials[165]; (b) Images of prototype robot the
movements in a driving cycled[165]; (c) After bearing the weight of an adult's footsteps (about 1
million times heavier than the robot), the system can continue to move[165]. (d) The cross-sectional
view of the hydrophilic PVDF-graft-PEGMA[166].
Funding: This research was funded by the National Natural Science Foundation of China, grant number
61674114, 91743110, 21861132001; by National Key R&D Program of China, grant number 2017YFF0204604,
2018YFE0118700; by Tianjin Applied Basic Research and Advanced Technology, grant number 17JCJQJC43600;
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by the 111 Project, grant number B07014; and the Initial Scientific Research Fund of State Key Laboratory of
Precision Measuring Technology and Instruments, Tianjin University, grant number Pilq1902. The authors thank
the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University.
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