SEMI S1 EHS Label Standard
SEMI S1 EHS Label Standard
1 Purpose
1.1 This guideline provides guidance for the content and format of equipment safety labels and gives examples of
symbols to use.
1.2 This guideline is intended for use by equipment manufacturers to create safety labels that alert persons to
hazards associated with the equipment.
1.3 This guideline is intended to provide a unified international semiconductor-industry-specific safety labeling
format.
2 Scope
2.1 This guideline is intended to assist in developing safety labels for manufacturing equipment used in the
semiconductor industry.
NOTE 1: This guideline may also be used for the design of safety signs for the facilities where semiconductor manufacturing
equipment is installed.
NOTE 2: The guidance provided in this document may also be adapted to help communicate safety information in installation
instructions, operation and maintenance manuals, and other similar written communication relating to a product.
NOTE 3: This guideline may also be adapted for the design of computerized user interfaces on equipment.
NOTE 4: In order to present a more consistent user interface, it is recommended that the use of the words DANGER, WARNING,
and CAUTION, in such interfaces be limited to the meanings and uses given for them in this guideline.
2.2 This document contains the following sections:
1. Purpose
2. Scope
3. Limitations
4. Referenced Standards
5. Terminology
6. General Provisions
7. Formats
8. Signal Words
9. Symbols
10. Word Messages
11. Lettering
12. Colors
13. Placement
3 Limitations
3.1 Various components or assemblies used in semiconductor manufacturing equipment may carry safety labels that
are designed and affixed in accordance with other international standards. It is not the intent of this guideline to
replace or supersede such labeling requirements.
3.2 Some safety label formats and content are dictated by other applicable standards and guidelines or by law (e.g.,
laser labeling and chemical hazard communication labeling in certain countries of use). It is not the intent of this
guideline to replace or supersede such labeling requirements.
3.3 New safety labels and safety labels that are significantly redesigned should conform to the latest version of
SEMI S1. This guideline is not intended to be applied retroactively.
4 Referenced Standards
NOTE 5: Unless otherwise indicated, all documents cited shall be the latest published versions.
4.1 SEMI Standards
SEMI S10 — Safety Guideline for Risk Assessment
4.2 ANSI Standards1
ANSI Z535.1 — Safety Color Code
ANSI Z535.3 — Criteria for Safety Symbols
ANSI Z535.4 — Product Safety Signs and Labels
4.3 ISO Standards2
ISO 3864 — Safety Colours and Safety Signs
4.4 IEC Standards3
IEC 61310-1 — Safety of Machinery - Indication, Marking and Actuation - Part 1: Requirements for Visual,
Auditory and Tactile Signals
5 Terminology
5.1 hazard — a condition that is a prerequisite to a mishap.
5.2 mishap — an unplanned event or series of events that results in death, injury, occupational illness, damage to or
loss of equipment or property, or environmental damage.
5.3 panel — area of a safety label having a distinctive background color which is different from other areas, or
which is delineated by a line, border, or margin. See Figures 3 and 4 for examples of panel placement.
5.4 safety alert symbol — a specific symbol (see Figure 1) that indicates a potential personal injury hazard.
1 American National Standards Institute, 11 West 42nd Street, New York, New York 10036, USA, http://www.ansi.org
2 International Organization for Standardization, C.P.56, CH-1211 Geneva 20, Switzerland, http://www.iso.ch
3 International Electrotechnical Commission, 1 rue de Varembe, Geneva, Switzerland, http://www.iec.ch
6 General Provisions
6.1 Safety labels should communicate information about specific hazards. Safety labels should be simple, direct,
and understandable by the target audience.
6.2 Content — Safety labels should communicate:
6.2.1 the seriousness of the hazard (indicated by the signal word);
6.2.2 the nature of the hazard (e.g., type of hazard) or the probable consequence of engaging the hazard; and
6.2.3 how the hazard can be avoided.
6.3 See Figure 2 for examples of how this information can be communicated on a safety label.
7 Formats
7.1 Safety labels should consist of at least three panels: signal word panel, word message panel, and symbol panel.
Figure 3 provides examples of some possible horizontal and vertical formats incorporating these panels.
EXCEPTION 1: A symbol panel is not necessary for labels that indicate only potential property damage hazards.
EXCEPTION 2: When space limitations exist, such as under guards or on small parts, for safety labels whose target
audience is maintenance or service personnel, symbol-only formats with surround shapes (i.e., no signal word, word
message, or symbol panels; see Figures 7, 8, and 9) may be used. In this case, borders around the surround shapes
should be used. Alternatively, for the same situations, a safety label may be used that has a signal word panel and a
word message panel but does not have a symbol panel.
7.2 Multiple Hazard Formats — More than one hazard may be conveyed on a single safety label (see Figure 4 for
examples).
8 Signal Words
8.1 The signal words for safety labels are DANGER, WARNING, and CAUTION.
8.1.1 DANGER is the signal word used to indicate an imminently hazardous situation that, if not avoided, will
result in death or severe injury. This signal word is to be limited to the most extreme situations.
8.1.2 WARNING is the signal word used to indicate a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
8.1.3 CAUTION is the signal word used to indicate a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against unsafe practices.
NOTE 9: CAUTION without the safety alert symbol may be used as a signal word to indicate a potentially hazardous situation
which, if not avoided, could result in property damage.
NOTE 10: SEMI S10 contains examples of ways to categorize severe, moderate, and minor injuries.
8.2 The signal word is placed in the signal word panel.
8.2.1 For DANGER, WARNING, and CAUTION signal words, the safety alert symbol (see Figure 1) is located
immediately to the left of and on the same level as the signal word (see Figure 5).
8.2.2 The safety alert symbol should not be used to alert persons to property-damage-only hazards.
8.2.3 When multiple hazard situations are addressed on one safety label, and the hazards are classified at different
levels of seriousness, the signal word corresponding to the greatest hazard level should be used.
9 Symbols
9.1 Symbols are graphic representations chosen to convey specific safety messages.
9.2 The symbol panel should contain the safety label’s symbol(s).
9.2.1 More than one symbol panel may be used on a safety label.
NOTE 11: See also Section 7.2.
9.2.2 More than one symbol may be used in each symbol panel.
9.3 Symbols may be used to clarify or supplement a portion of a safety label’s word message.
NOTE 12: In some cases, symbols may replace the word message. See the exception to Section 10.2.
9.4 A symbol should represent the nature of the hazard, or the potential consequence of engaging the hazard, or
actions to be taken to avoid the hazard.
9.5 Symbols should be compatible with the safety label’s word message.
NOTE 13: It is preferable to use the symbols shown in Appendix 1.
NOTE 14: For additional information on symbol design, see Annex A of ANSI Z535.3.
9.6 Symbols should be shown in their appropriate surround shape as defined in Section 9.10.
9.7 When an effective symbol does not exist or cannot be created to illustrate the specific hazard or specific
avoidance information, the ISO 3864 general warning symbol should be used with a text message that conveys
specific information about the hazard (see Figure 6).
9.8 Location — Symbols should be located on safety labels in the areas designated in the examples in Figures 2, 3,
and 4, or located in a similar manner. If multiple symbols are used on a multi-hazard safety label, the symbols
should appear in the same order as the safety information described in the word message.
EXCEPTION: Location of the safety alert symbol is governed by section 8.2.1.
9.9 Safety Alert Symbol — The safety alert symbol is composed of an equilateral triangle surrounding an
exclamation mark.
NOTE 15: See Figures 1 and 5 and Section 12.3.4 for format and color information.
9.10 Symbol Surround Shapes — Safety symbols should be shown in their appropriate surround shapes (see Figures
7, 8, and 9).
NOTE 16: This is for purposes of international harmonization. The surround shapes have been taken from ISO 3864 and IEC
61310-1.
9.10.1 Hazard Identification Surround Shape (see Figure 7) — A symbol located inside a hazard identification
surround shape should be used to indicate a personal injury hazard.
9.10.1.1 Format and Color — The background color should be yellow. The triangular band should be black. The
symbol or pictorial representing the hazard should be black. The border should be yellow; the border is optional if
the surrounding background is yellow or white. See Figure 7 for more information.
Figure 7
Hazard Identification Symbol Surround Shape
9.10.2 Prohibition Surround Shape (see Figure 8) — A symbol located inside a prohibition surround shape should
be used to indicate that an action should not be taken or should be stopped.
9.10.2.1 Format and Color — The prohibition surround shape should be a circular band with a diagonal bar. The
background color should be white. The circular band and diagonal bar should be red. The symbol representing the
prohibited action should be black and is preferably shown behind the red slash. The border should be white; the
border is optional if the surrounding background is white or yellow. See Figure 8 for more information.
9.10.3 Mandatory Action Surround Shape (see Figure 9) — A symbol located inside a mandatory action surround
shape should be used to indicate that an action should be taken to avoid a hazard.
9.10.3.1 Format and Color — The background color should be blue. The symbol representing the mandatory action
should be white. The border should be white; the border is optional if the surrounding background is white. See
Figure 9 for more information.
Figure 9
Mandatory Action Symbol Surround Shape
10 Word Message
10.1 The word message is placed in the word message panel.
10.2 The word message preferably contains a description of the hazard, the consequence of engaging the hazard,
and how to avoid the hazard. The ordering of this content in the word message is flexible.
EXCEPTION: Parts or all of the word message may be omitted, depending on such factors as whether the message
can be inferred from a symbol, other text messages, user training, or the context in which the safety label is used.
10.3 The word message on a safety label should be concise and readily understood.
10.4 Messages on the same safety label that warn of different hazards should be formatted, when feasible, to
prevent them from visually blending together. Bullets, lines, and extra line spacing are examples of such formatting.
10.5 When detailed instructions, precautions, or consequences would require a lengthy message, the message may
alternatively refer the reader to another source for additional safety information. Examples of such sources include
safety instructions, operation and maintenance manuals, service manuals, operating procedures, and safety bulletins.
11 Lettering
11.1 Signal words should be in the lettering style shown in Appendix 2.
12 Colors
12.1 Color Specifications — Colors should conform to those colors specified in ISO 3864.
NOTE 20: For purposes of reproduction, the closest PANTONE® color match for opaque safety colors is:
• Red – PANTONE 485
• Orange – PANTONE 152
• Yellow – PANTONE 109
• Blue – PANTONE 2945
(PANTONE® is a registered trademark of Pantone, Inc.).
NOTE 21: Perceived color will be different under colored light (e.g., “yellow room”) conditions. The committee knows of no
current technical solution.
12.2 Symbol and Surround Shape Color Specifications — See section 9.10 for symbol and surround shape color
criteria.
12.3 Signal Word Panel — The three signal words should be colored as follows (see Figure 5):
12.3.1 The word DANGER should be in white letters on a red background.
12.3.2 The word WARNING should be in black letters on an orange background.
12.3.3 The word CAUTION should be in black letters on a yellow background.
12.3.4 Safety Alert Symbol — The solid triangle portion should be the same color as the signal word lettering, and
the exclamation mark portion should be the same color as the signal word panel background.
12.4 Optional Use of Red — The color red may be used in a symbol to indicate heat or fire.
13 Placement
13.1 Location of Safety Labels — Safety labels should be permanently attached to the equipment and, when
possible, located near the hazard.
13.2 Safe Viewing Distance — Safety labels should be placed to allow the viewer enough time to:
• be informed by the safety label; and
• have sufficient time to avoid the hazard or take appropriate evasive action to reduce the potential harm from the
hazard.
13.3 Placement — Safety labels should be placed so that they are legible, non-distracting, and not hazardous in
themselves.
13.4 Inadvertent Removal, Visual Blockage — Safety labels should not be located in areas where they may be
removed by the motion of equipment or rendered ineffective by situational conditions.
13.4.1 Safety labels should not be blocked from view by moveable panels such as doors, windows, and racks where
this would limit the effectiveness of the blocked label.
15 Related Documents
15.1 ANSI Standards1
ANSI C95.2 — Radio-Frequency Warning Symbol
ANSI N2.1 — Radiation Symbol
ANSI N12.1 — Fissile Material Symbol
ANSI Z136.1 — Safe Use of Lasers
ANSI Z535.2 — Environmental and Facility Safety Signs
ANSI Z535.5 — Accident Prevention Tags
15.2 NEMA Standard4
NEMA 77 — Standards for Warning Labels
15.3 NFPA Standards5
NFPA 70 — National Electrical Code
NFPA 178 — Standard Symbols for Fire Fighting Operations
15.4 NIST Documents6
NBSIR 80-2003 — Workplace Safety Symbols
NBSIR 80-2088 — The Assessment of Safety Symbol Understandability by Different Testing Methods
NBSIR 82-2485 — Symbols for Industrial Safety
15.5 United States of America Government Document7
21 CFR Part 1040 — Performance Standards for Light-Emitting Products
15.6 IEC Standards8
IEC 60825-1 — Safety of Laser Products - Part 1: Equipment Classification, Requirements and User's Guide
15.7 ISO Standards9
ISO 9186 — Comprehension Testing of Graphical Symbols
4 National Electrical Manufacturers Association, 2101 L Street, N.W., #300, Washington, D.C. 20037, USA, http://www.nema.org
5 National Fire Protection Association, Batterymarch Park, Quincy, MA 02269, USA, http://www.nfpa.org
6 U.S. Department of Commerce, National Institute of Standards and Technology, Center for Building Technology, Washington, D.C., USA,
http://www.nist.gov/public_affairs/faqs/qpubs.htm
7 U.S. Government Printing Office, Washington, D.C., USA, http://bookstore.gpo.gov/prf/ordinfo.html
8 International Electrotechnical Commission, 1 rue de Varembe, Geneva, Switzerland, http://www.iec.ch
9 International Organization for Standardization, C.P.56, CH-1211 Geneva 20, Switzerland, http://www.iso.ch
NOTICE:
Paragraphs entitled “NOTE” are not an official part of this safety guideline and are not intended to modify or
supersede the official safety guideline. These have been supplied by the committee to enhance the usage of the
safety guideline.
SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for any particular
application. The determination of the suitability of the guideline is solely the responsibility of the user. Users are
cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature
respecting any materials or equipment mentioned herein. These guidelines are subject to change without notice.
The user’s attention is called to the possibility that compliance with this guideline may require use of copyrighted
material or of an invention covered by patent rights. By publication of this guideline, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights,
and the risk of infringement of such rights, are entirely their own responsibility.
Viewing Distance Minimum Letter Height for Recommended Letter Height Recommended Letter
FAVORABLE Reading for FAVORABLE Reading Height for UNFAVORABLE
Conditions Conditions Reading Conditions
300 mm (12 in.) or less* 2 mm (0.08 in) 2 mm (0.08 in) 2 mm (0.08 in)
600 mm (24 in.) 2.5 mm (0.10 in) 4 mm (0.16 in) 4 mm (0.16 in)
900 mm (35 in.) 3 mm (0.12 in) 4.75 mm (0.19 in) 6 mm (0.24 in)
1.2 m (47 in.) 3.5 mm (0.14 in) 5.5 mm (0.22 in) 8 mm (0.31 in)
1.5 m (59 in.) 4 mm (0.16 in) 6.25 mm (0.25 in) 10 mm (0.39 in)
1.8 m (71 in.) 4.5 mm (0.18 in) 7 mm (0.28 in) 12 mm (0.47 in)
2.1 m (83 in.) 5 mm (0.20 in) 7.75 mm (0.31 in) 14 mm (0.55 in)
2.4 m (94 in.) 5.5 mm (0.22 in) 8.5 mm (0.33 in) 16 mm (0.63 in)
* 2 mm (0.079 in.) is the suggested minimum type size for use on safety labels.
Calculations for Recommended Letter Heights (in mm) for FAVORABLE Reading Conditions:
600 mm or less: (viewing distance in mm) / 150
>600 mm to 6 m: [(viewing distance in mm - 600) x .0025] + 4
Calculation for Recommended Letter Heights for UNFAVORABLE Reading Conditions (all distances):
(viewing distance) / 150
NOTICE:
Paragraphs entitled “NOTE” are not an official part of this safety guideline and are not intended to modify or
supersede the official safety guideline. These have been supplied by the committee to enhance the usage of the
safety guideline.
SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for any particular
application. The determination of the suitability of the guideline is solely the responsibility of the user. Users are
cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature
respecting any materials or equipment mentioned herein. These guidelines are subject to change without notice.
The user’s attention is called to the possibility that compliance with this guideline may require use of copyrighted
material or of an invention covered by patent rights. By publication of this guideline, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights,
and the risk of infringement of such rights, are entirely their own responsibility.
SEMI S1-0701E © SEMI 1986, 2001 18 Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.