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Cleanroom Terminology - Air Change Rates - Angstrom Technology

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Hanuma Gangisetty
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44 views1 page

Cleanroom Terminology - Air Change Rates - Angstrom Technology

Uploaded by

Hanuma Gangisetty
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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consistent removal of contamination.

Check Out Our Recent Completed Cleanroom Project View Our Work

Air Changes Per Hour and Cleanroom


Classifications
air changes per hour are an essential component of cleanroom classification standards. They
make it possible to reach the particle count and size restrictions each class sets. Let’s take a
look how air changes per hour and classification are related.

ISO 14644-1 Cleanroom Standards

Maximum Allowed Particles (per m3) Air


Airflow
Changes Ceiling
Class Velocity
Per Coverage
≥0.2 µm ≥0.3 µm ≥0.5 µm ≥1 µm ≥5 µm (ft/min)
Hour

90-
ISO 1 2.37 1.02 0.35 0.083 0.0029 360-600 60-100
100%

80-
ISO 2 23.7 10.2 3.5 0.83 0.029 360-600 60-100
100%

60-
ISO 3 237 102 35 8.3 0.29 360-540 60-90
100%

ISO 4 2,370 1,020 352 83 2.9 300-540 50-90 50-90%

ISO 5 23,700 10,200 3,520 832 29 240-480 40-80 35-70%

150-
ISO 6 237,000 102,000 35,200 8,320 293 25-40 25-40%
240

ISO 7 2.37×106 1,020,000 352,000 83,200 2,930 60-90 10-15 15-20%

ISO 8 2.37×107 1.02×107 3,520,000 832,000 29,300 5-48 1-8 5-15%

ISO 9 2.37×108 1.02×108 35,200,000 8,320,000 293,000 0-25 0-5 5-10%

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