1
Case Study
Cantilever Piezoelectric Accelerometer
— ERIC SIA SIEW WEI
INTRODUCTION SITUATING THE CASE
This section contextualizes our case study within
Categorized as quantitative study, this case the existing body of literature. First and foremost,
this study will outline the background of the CPA
study was created to explore the design,
development, analysis, application and identified in previous literature. Next, this case
communication challenges of a micromachined study will explain the literature selection method
cantilever piezoelectric accelerometer (CPA). In this and criteria for review. This study also highlights
context, this case study could contribute towards innovation in sensor technology and its importance
optimization of structural dynamics in the realm of to various industries.
professional communication. As thorough analyses
are potent to refine the existing theories,
particularly in optimizing parameters and How Literature Was Selected
assessing material compatibility. Terminologically,
piezo in Greek defined as pressure thus the term The selection of a cantilever piezoelectric
piezoelectric defined as electricity caused by accelerometer for research can be driven by several
pressure [2]. The piezoelectric effect applies when factors, including its unique characteristics,
vibration energy from mechanical strains being potential applications, and relevance to the
converted to electrical potential energy. Coupled research objectives. In selecting cantilever
with Micro-Electro-Mechanical Systems (MEMs) piezoelectric accelerometers for a research project,
technology, mankind uses piezoelectric the literature review process should focus on
accelerometer to quantitatively measure gathering relevant studies that demonstrate the
accelerations due to applied mechanical forces. sensor's capabilities, applications, performance
characteristics, and limitations.
This case examines the following research In this context, the literature was selected
questions: with several criteria, for instance, credibility of the
• What are the motivation supporting and source and publication date, relevancy to the
bottlenecks hindering the technological evolution subject matter. Firstly, this study searches the
of CPA? literature from credible databases, namely IEEE
• How is CPA being incorporated into the existing Xplore [5], Nature [6], etc. Aforementioned
sophisticated sensing devices? databases could be retrieved from interdisciplinary
• What are the methods to enhance the databases like Google Scholar in various formats,
performance and efficiency of CPA? including theses, books, abstracts, journal articles,
conference papers, encyclopedia and case study.
Next, literature containing keywords such as
The rest of this case study is organized as ‘cantilever’, ‘piezoelectric’, ‘accelerometer’ and
follows. In section II, the significance of the current phase such as ‘acceleration’, ‘sensor’, ‘vibration
case study and its relevancy to current issues, measurement’ related to the study will be focused.
practices, education and studies from similar cases These terms facilitated targeted searches and were
will be presented. Section III explains the data used in various combinations to maximize the
collected to address the case, including the data retrieval of pertinent literature. As for the country
collection methods, justification on using those of study, it could vary depending on the institution
methods and data credibility. Section IV discusses or research organization conducting the study, the
about the case in detail. In section V, we conclude location of the authors, or the geographical focus of
the findings with the limitations and the research.
recommendations.
2
Related Works TABLE II
[3] has presented a hypothesis that piezoelectric PARAMETERS FOR MAXIMUM EXTRACTABLE POWER
accelerometers has an edge over capacitive
accelerometers in terms of high dynamic range and Powermax Maximum extractable electric power for a
cantilever structure operating in the 31 mode
quality factor resonances (Q). at resonance frequency
m Mass of the proof mass
[4] has suggested the use of Pt/ZnO/ Si3N4 ω Natural frequency
stack, namely selecting Zinc Oxide (ZnO) as the vS Poisson’s ratio
piezoelectric material, Platinum (Pt) as the top YS Young’s modulus of the passive layer for thin
electrode, mixture of Polysilicon with Nitride (Si3N4) film piezoelectric
e31, f Piezoelectric coefficient
as the lower electrode, as well as polysilicon
ε0 Permittivity of free space
cantilever structure with a length 1000 µm and εr Relative permittivity
thickness less than 3 µm. The justifications of Qtot Total quality factor
selecting ZnO were its relatively easier fabrication A Acceleration
and integration into Integrated Circuit (IC).
Barriers to the Evolution of CPA
Charge Sensitivity of CPA
Performance
From the work presented by [3], in 2013, the CPA
, fabricated together with a proof mass (bulk silicon
Assuming tZnO << tSi, EZnO = ESi tip mass) possesses weakness in achieving high
resonance frequency (67.4 Hz), albeit the quality
factor, Q could be achieved up to 200 under
vacuum condition. [3] presented the dielectric loss
TABLE I contributed that main source of noise in the
PARAMETERS FOR CHARGE SENSITIVITY piezoelectric material. [3] also asserted that the
method to improve the CPA is to lower the
d31 Transverse piezoelectric coupling coefficient resonance frequency, at the cost of reducing the
ρ Beam density bandwidth, with the condition that the materials
b Beam Width
and overall device architecture were the constant
L Beam slow
tSi Thickness of the polysilicon cantilever substrate variables.
tZnO Thickness of piezoelectric layer
ESi Elastic moduli of the polysilicon cantilever substrate Material
EZnO Elastic moduli of piezoelectric layer
The performance of CPAs heavily relies on the
properties of piezoelectric materials used in their
construction. Material limitations, such as limited
sensitivity, stability, or durability under certain
conditions, for example, temperature extremes and
humidity, can impede the evolution of CPAs.
Statement of [7] revealed that MEMS piezoelectric
accelerometers material incorporating lead.
Considering the adverse effects of lead to mankind
Figure 1: A Cantilever Piezoelectric Accelerometer and the environment, the lead-free CPA has been
introduced. Nevertheless, lead-free CPA has
relatively lower piezoelectric coefficient, sensitivity,
Maximum extractable electric power bandwidth than lead CPA [7]. [8] reported some
common method to enhance the piezoelectric
Supporting [8], [9] discovered that power is an characteristics such as doping, when using
indispensable factor in measuring performance. acceptor dopants such as Manganese (Mn3+) in
fabrication, it will establish an internal bias field
within piezoelectric material, that will reduce the
dielectric constant and cause tangent loss.
,
3
Performance Measuring Choice of a Research Methodology
[9] mentioned that it is difficult to measure the Qualitative methods
performance of CPA through direct testing and
measuring of human motion. This method includes conducting literature
reviews, case studies, and expert interviews to
gather insights into the motivations, challenges,
and emerging trends in the field of CPA.
Improvements
Performance Quantitative methods
[9] suggested that if cantilever of CPA was Quantitative research were employed to gather
orientated at 70o, the measurement of generated numerical data on CPA performance metrics, such
peak power will be the most accurate. as sensitivity, power output, and fabrication
parameters. This data was essential for assessing
From [4], sensitivity can be improved by the technical capabilities and limitations of CPAs,
increasing the planar beam dimensions b and L. as well as identifying trends and patterns across
The Beam length L is limited by die size, while different studies and applications.
beam width b is limited primarily by fabrication
constraints during the structural release step. Selection of the Case
Beam length L is limited by die size, while beam
width b is limited primarily by fabrication The selected case needed to align with the research
constraints during the structural release step. objectives and scope of the study. Moreover, it
extensively addressed the detailed fabrication
Material steps, highlighted some performance metrics such
as sensitivity and resonant frequency, as well as
[8] suggest the method to improve the piezoelectric elaborated of the working principle of CPA.
material, such as proper crystallographic
orientation, composition control, stress state
control, doping, development of imprint. ABOUT THE CASE
Specifically, Niobium (Nb5+) is a dopant (donor) that
could improve dielectric constant and piezoelectric Description
responsiveness though improved domain wall [1] highlighted the structural design of the CPA. In
motion [8]. [1] preferred Zinc Oxide (ZnO) over Lead this context, the cantilever was configured at fixed-
Zirconate Titanate (PZT) due to the large parasitic free configuration. The functional piezoelectric
capacitance within PZT, as PZT has a greater layer (ZnO), top electrode (Platinium) and bottom
dielectric constant, albeit a greater piezoelectric electrode (PolySi) were fabricated following the
coefficient. Figure 2.
Performance Measuring
[9] suggested piezoelectric shaker test as a simple
and efficient way to gauge the capability of the
sensor.
HOW THIS CASE WAS STUDIED
To situate this case study in the context of existing
literature and methodologies, a comprehensive
mixed-methods approach was adopted, combining
quantitative and qualitative data analysis. By
integrating findings from diverse sources, including
industry reports, academic journals, and patent Figure 2: Schematic Diagram of a CPA
databases, the research sought to provide a
thorough examination of CPAs' current state,
offering insights into the challenges and
opportunities within this field.
4
Working Principle Figure 5: LPCVD of Si (Covering Bare Silicon Surfaces, PolySi
and PSG sacrificial Layer)
The working principle of the cantilever piezoelectric
accelerometer involves the conversion of
mechanical stress into an electrical signal. From
[1], a vertical acceleration, above the cantilever,
capable of deflecting the cantilever, this further
Figure 6: LPCVD of Si3N4 as Stress-compensation Layer
creating a longitudinal stress in axis 1. This stress
alters the electric polarization within the
piezoelectric ZnO layer, which is polarized
perpendicularly to the substrate. As a result, an
electrical charge is produced, proportional to the
applied stress, due to the piezoelectric effect. The
generated charge is then collected by the top and
bottom conducting layers, creating a measurable
voltage output indicative of the acceleration Figure 7: RF-magnetron sputtering of ZnO as Piezoelectric
experienced by the sensor. Material
Fabrication Process
Table III outlines various processes involved in the
fabrication of CPA.
Figure 8: Sputtering of Pt as Top Electrode
TABLE III
CPA FABRICATION PROCESS Application
Process Description Parameters
[9] mentioned the CPA could be applied in an
Chemical Deposition of SiO2 300-400°C,
Vapor 100 nm thick energy harvesting device from piezoelectric patches
Deposition Deposition of Si3N4 700-800°C, 100 nm located inside the shoe, with the pressure created
(CVD) thick by human weight. Nevertheless, this technology
Reactive Ion Deposition and 620-650°C, 300-500 could not harvest sufficient amount of energy due
Etching (RIE) patterning of n- nm thick
type PolySi to the low frequency property of human walking.
Low-Pressure Deposition and 400-450°C, 2 µm
Chemical patterning of thick NVH Acceleration Sensors for E—mobility Testing
Vapor Phosphosilicate
Deposition glass (PSG)
(LPCVD) Deposition and 650-700°C, 2 µm
From the European Test and Telemetry Conference
patterning of thick 2022, [10] highlighted the challenges faced on the
Silicon (Si) quality of measurement of the e-vehicles (EVs)
Deposition of Si3N4 750-800°C, 300 nm related to piezoelectric vibration and acceleration
thick
sensor. Specifically, hybrid and EVs leverage Noise,
RF-magnetron Deposition of ZnO 200-300°C, 0.5 µm
sputtering thick Vibration, Harshness (NVH) testing. However, NVH
Sputtering Thin film Room temperature possess challenges in addressing complex vehicle’s
sputtering of to 200°C, 0.2 µm structure and external signal interference such as
Platinium (Pt) thick stray electrical signals presented during testing.
Moreover, the technological advancement in e-
mobility and hydrogen vehicles also drives the
sensors to have the ability to generate reproducible
Figure 3: CVD of SiO2 (bottom) and Si3N4 (top) as Insulating and reliable data in various environments. [10]
Layers
suggested the use of ICP® accelerometers (IEPE),
abbreviated for “Integrated Circuit Piezoelectric”, to
be used for NVH testing. This sensor integrates
built-in microelectronics that are responsible for
Figure 4: RIE of Phosphorus-doped PolySi as Electrical Contacts
(Bottom Electrode) converting the high-impedance charge signal
generated by a piezoelectric sensing element into a
low-impedance voltage signal. This voltage signal is
more easily transmitted over standard two-wire or
coaxial cables to any data acquisition system or
readout device. Moreover, this sensor could
5
simplify the process of interfacing with (Transducers ’97), pp. 1205–1208, Jun. 1997.
piezoelectric sensing elements by providing doi:10.1109/sensor.1997.635423
integrated electronics that handle signal
conditioning. [5] IEEE Xplore, IEEE Xplore,
https://ieeexplore.ieee.org/Xplore/home.jsp
(accessed Mar. 20, 2024).
[6] Nature, Nature, https://www.nature.com/
(accessed Mar. 20, 2024).
[7] C.-Y. Li et al., “Design and development of a
low-power wireless MEMS lead-free
piezoelectric accelerometer system,” IEEE
Transactions on Instrumentation and
Measurement, vol. 72, pp. 1–11, 2023.
doi:10.1109/tim.2023.3242016
[8] H. G. Yeo and S. Trolier-McKinstry, “Effect of
piezoelectric layer thickness and poling
conditions on the performance of cantilever
Figure 9: ICP® System Schematic [10] piezoelectric energy harvesters on Ni foils,”
Sensors and Actuators A: Physical, vol. 273,
pp. 90–97, Apr. 2018.
CONCLUSIONS, LIMITATIONS, AND SUGGESTIONS doi:10.1016/j.sna.2018.02.019
FOR FUTURE RESEARCH [9] I. Izadgoshasb et al., “Optimizing orientation of
The case study on micromachined CPA provides piezoelectric cantilever beam for harvesting
valuable insights into their design, fabrication, and energy from human walking,” Energy
applications. Several limitations of this case study Conversion and Management, vol. 161, pp. 66–
include limited scope of study, such as limited to 73, Apr. 2018.
specific aspects of CPA design and application, doi:10.1016/j.enconman.2018.01.076
which may overlook some broader contextual [10] S. Meyer, “4.1 the challenge of E-mobility and
factors. Future works in the field of CPA include evtols on measurement technology with
continued exploration of alternative materials and vibration and acceleration sensors,”
fabrication techniques to enhance CPA Proceedings - ettc2022, 2022.
performance and reliability. doi:10.5162/ettc2022/4.1
REFERENCES
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Foundations of MEMS. Prentice Hall, Upper
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Eric Sia Siew Wei is currently pursuing
[2] Walter P. The history of the accelerometer: his B.Eng. degree in electrical & electronics
1920s-1996—prologue and epilogue, 2006. engineering (Hons.), in field of Electronics & Devices
Sound and Vibration. 2007; 41(1):84–92. (E&D), at Institute of Technology PETRONAS (UTP),
Malaysia, completing it in 2024. His research
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