Perfect for the semiconductors

of tomorrow

DD Motor Driven Wafer

Handling Robot

Robot Controller
SR200

Teaching
Pendant

Passive -grip
Prealigner
PPS1130

Semiconductor Wafer Handling Robot

SEMIS TA R -
Direct
GEKKO MD124 D drive
motor
Introducing a robot optimized for the near future of Low
miniaturization and multi-layering. vibration
The GEKKO MD124D powered by direct drive motors achieves
High
precise and quick transfer with minimum stress to wafers. accuracy

Vibration 0.25 G or less*1

Low
Repeatability ± 0.02 mm
wafer
stress

Absolute positioning accuracy 0.05 mm

1: This value represents the vertical direction of the end effector when the arm extends or retracts.
*Note: The above values are just some examples of results obtained using Yaskawa’s in -
 Semiconductor Wafer Handling Robot

SEMISTAR - GEKKO M D124D

Items Items
Applicable Wafer Size 300 mm (SEMI compliant) 425 (W) × 300 (D) × 133 (H) mm
Dimensions (Protrusions are not included)
Passive grip
Wafer Grip Method (vacuum and edge grip are also available) Approx. Mass 13 kg max.
Length of Standard EE* 1 345 mm for 300-mm wafer Three-phase 200 VAC to 240 VAC (+10% to -15%), 50/60 Hz
Power Supply
Number of Axes 5 axes Single-phase 200 VAC to 240 VAC (+10% to -15%), 50/60 Hz
Arm Type Single Communications
(Connection to Host) Ethernet (10BASE-T/100BASE-TX) 2 ports
EX-axis (Extension)* 2
Range of Motion

1215 mm
TH-axis (Rotation) 330˚ Optional Board Slot 2 slots
Z-axis (Elevation) 480 mm Number of Control Axes 8 axes max.
440˚ SEMI S2 S8, F47
Manipulator

H-axis (EE Rotation)

Applicable Standards UL61010-1
Minimum Rotation Radius* 1 510 mm
ISO 13849-1, Category 3 (PL=d), etc.
Repeatability* 1 0.05 mm P-P
Approx. Mass 86 kg
Clean Class* 3 ISO class 1
MCBF (SEMI F10 Compliant) 15 M cycles or more
Temperature: +20˚C to +30˚C
Ambient Conditions

Operating Environment
Humidity: 35% to 55%RH (non-condensing)
Temperature: 0˚C to +40˚C
Storage Environment
Humidity: 20% to 80%RH (non-condensing)
Altitude 1000 m or less
Atmosphere
and corrosive gas
Applicable Wafer Size 300 mm mm wafer (SEMI compliant), using Yaskawaʼs standard 300-mm EE
Wafer Grip Method Passive grip *12:: C300-
enter of manipulator rotation to center of wafer when using Yaskawa's
* standard 300-mm EE
Prealigner

Detection Target Notch

Material of Wafer Silicon* 4 *3: Based on Yaskawaʼs recommended
0.3 m/s
installation conditions when used in a
Alignment Accuracy ± 0.1˚
:
Alignment Time 5.0 s or less *4 wafer
SEMI compliant silicon wafer. Contact your Yaskawa representative for quartz
use. Related parameters need to be adjusted and evaluated. (Yaskawa
Approx. Mass 8.5 kg has experiences with quartz wafer.)

Dimensions Units : mm

10
.
um ia
165° m d
ini tion dia.
M ta
ro 020 Elevation range
1

Elevation
480
310°
0

44
44

30
0

1297
192
260
13
0°

336 EE length
817

Extension range 870 345

165°
Max. reach 1215
Rotation Rotation range : -165° to +165° 78 258
EE Rotation range : -130° to +310° Extension

YASKAWA ELECTRIC CORPORATION YASKAWA ELECTRIC KOREA CORPORATION

2-1 Kurosakishiroishi, Yahatanishi -ku, Kitakyushu, 806-0004, Japan 35F, Three IFC, 10 Gukjegeumyung -ro, Yeongdeungpo-gu, Seoul, 07326, Korea
Phone : +81-93-645-7703 Fax : +81-93-645-7802 Phone : +82-2-784-7844 Fax : +82-2-784-8495
YASKAWA AMERICA, INC. (MOTOMAN ROBOTICS DIVISION) YASKAWA ELECTRIC TAIWAN CORPORATION
100 Automation Way, Miamisburg, OH 45342, U.S.A. 12F, No.207, Sec. 3, Beishin Rd., Shindian District, New Taipei City 23143, Taiwan
Phone : +1-937-847-6200 Fax : +1-937-847-6277 Phone : +886-2-8913-1333 Fax : +886-2-8913-1513
YASKAWA EUROPE GmbH (ROBOTICS DIVISION) YASKAWA ASIA PACIFIC PTE. LTD.
Yaskawastrasse 1, 85391, Allershausen, Germany 30A Kallang Place, #06-01, 339213, Singapore
Phone : +49-8166-90-100 Fax : +49-8166-90-103 Phone : +65-6282-3003 Fax : +65-6289-3003
YASKAWA NORDIC AB YASKAWA ELECTRIC (THAILAND) CO., LTD.
Verkstadsgatan 2, Box 504, SE-385 25 Torsas, Sweden 59, 1st-5th Floor, Flourish Building, Soi Ratchadapisek 18, Ratchadapisek Road, Huaykwang,
Phone : +46-480-417-800 Fax : +46-486-414-10 Bangkok 10310, Thailand
Phone : +66-2-017-0099 Fax : +66-2-017-0199
YASKAWA ELECTRIC (CHINA) CO., LTD.
22F, One Corporate Avenue, No.222 Hubin Road, Huangpu District, Shanghai 200021, China PT. YASKAWA ELECTRIC INDONESIA
Phone : +86-21-5385-2200 Fax : +86-21-5385-3299 Secure Building-Gedung B Lantai Dasar & Lantai 1 Jl. Raya Protokol Halim Perdanakusuma,
Jakarta 13610, Indonesia
YASKAWA SHOUGANG ROBOT CO., LTD. Phone : +62-21-2982-6470 Fax : +62-21-2982-6471
No.7 Yongchang North Road, Beijing E&T Development Area , Beijing 100076, China
Phone : +86-10-6788-2858 Fax : +86-10-6788-2878 YASKAWA INDIA PRIVATE LIMITED (ROBOTICS DIVISION)
#426, Udyog Vihar Phase -IV, Gurgaon, Haryana 122016, India
Phone : +91-124-475-8500 Fax : +91-124-475-8542

In the event that the end user of this product is to be the military and said product is to
be employed in any weapons systems or the manufacture thereof, the export will fall
under the relevant regulations as stipulated in the Foreign Exchange and Foreign
Trade Regulations. Therefore, be sure to follow all procedures and submit all relevant
documentation according to any and all rules, regulations and laws that may apply.

and improvements.

Yaskawa Europe Technology Ltd.

13 Hamelacha st. Afek Industrial Zone, Rosh Ha’ayin 4809129 Israel
Tel:+972-73-2400800 Fax:+972-73-2400888
www.yaskawa.co.il [email protected]