MultiGas 2030 General Overview
- 1. MKS Instruments MultiGas 2030 FTIR MKS Instruments On-Line Product Group Presented by: Jim Belanger [email protected]
- 2. MultiGas 2030 Features Resolves & analyzes more compounds – 0.5 cm-1 high resolution FTIR Analysis in 1 second – (0.2 sec for HS version) – High speed FTIR Fastest response – Long path length, small volume gas cell – 5.11 m, 200 mL gas cell High speed detectors for all applications – TE or LN2 cooled MCT detectors No field adjustments required Provides correction for – Permanently aligned spectrometer pressure fluctuations – 0 – 1000 Torr cap. manometer MKS Confidential 2
- 3. MultiGas Features, continued Maintains permanent calibration – Calibration supplied with instrument Instrument to Instrument Precision – Reduces need for gas cylinders – All instruments maintain same Calibration - fixed calibration Sample Detection limits ppb to ppm – All with a single gas cell State-of-the-art spectral analysis – More than 30 compounds simultaneously Full instrument diagnostics – Quickly pinpoint instrument failure – Demonstrates instrument compliance Carbon Monoxide Spectrum MKS Confidential 3
- 5. MultiGas 2030 - Top View Heated Cell Electronics Detector Box Baratron pressure Heated Gas inlet measurement MKS Confidential 5
- 6. MultiGas Cell Advantage 20/20 Gas Cell – 5.11 m, 200 mL volume – 32 passes through cell – Long path - small volume -->provides fast response – Versions Ni-coated Al cell Ni-coated Stainless Steel 20/20TM Long Path (5.11m) Gas Cell Nickeless Stainless Steel – Alignment indexing pads Mirrors – O-ring “face” seal Kalrez, Viton, Metal – Corrosive resistant coating – High light throughput Windows – KBr, MgF2-KBr, BaF2, CaF2 MKS Confidential 6
- 7. 2 cm Gas Cell Used for %-level analysis in particular for SynGas Reactions 255 times less sensitive then 5m gas cell MKS Confidential 7
- 8. MG2030 MCT Detectors LN2 Cooled Detectors – Larger Range: Greater number of detectable species 500 cm-1 cut off (16μ) – High Sensitivity: Lower minimum level of detection – Maintenance 12 hour coolant refill require 3-5 days coolant refill with 5L extended dewar TE Cooled Detectors – Narrow Range: Smaller number of detectable species 2000 cm-1 (5μ), 1350 cm-1 (7.4μ) or 1100 cm-1 (9.2μ) – Highest Sensitivity - 2000 cm-1 (5μ), Lowest minimum level of detection Unable to detect species such as NH3 – Maintenance - None MKS Confidential 8
- 9. MG2030 Detectors MG2030 offers MCT Detectors – 5 micron – 16 micron detector ranges – Selection depends on gas/sensitivity/range required Detector Sensitivity Comparison Cooling Sensitivity Comparison to DETECTOR Range Coolant Temp (D*) 16u LN2 5000 - 2000 Piezo electric 5 micron -80° C 77.1 e9 1.8x more sensitive cm-1 element (TE) 5000 - 1350 Piezo electric 7.4 micron -80° C 6.9 e9 6x less sensitive cm-1 element (TE) 5000 - 1100 Piezo electric 9 micron -80° C 2.3 e9 18x less sensitive cm-1 element (TE) 5000 - 500 Liquid N2 16 micron -196° C 42.8 e9 Base value cm-1 MKS Confidential 9
- 10. Instrument Spectral Accuracy Instrument Accuracy Optimization – Spectra linearity Accurate absorbance in the whole range of absorbance level – Resolution Instrument has same resolution (i.e., line width) as the calibration spectra – Line position Instrument spectra are “lining up” exactly with the calibration spectra Validation – Use transferrable calibration and verify cal cylinder – Still need H2O Calibration on each instrument for CEM – Remove influences from components like CO2 and H2O MKS Confidential 10
- 11. Field Analysis Using FTIR Monitoring VOCs – CH4 ranges from 500 up to 3000 ppm – C2H6 in the hundreds of ppm – Propane on the order of 50 ppm and below – Need to speciate to remove Methane and Ethane – Unburned Propane largest VOC contribution after catalyst Monitoring HAPs – Formaldehyde easy to measure by FTIR Conventional Total Hydrocarbon (THC) analyzers – Can not separate Propane from Methane or Ethane – Use Methane Analyzer then subtracts the rest – Not sensitive – Unable to detect all HCs (e.g. formaldehyde) MKS Confidential 11
- 12. Field Deployable FTIR Advantages – Multiple species – one instrument SO2, NH3, NO, HCl, HF, CO, CO2, H2O, and VOCs – Analyze components in high CO2 and H2O – Direct analysis – no chemical conversion or “fudge factors” – Analysis method minimizes interferents – Flexibility in Changing in Method Customer can easily modify Transferable calibrations MKS Confidential 12
- 13. How Can MKS OLT Support You? MKS On-Line Products – Dedicated to your gas analysis success Numerous Applications – Compliance – Engineering – Ambient air Support Resources – MKS Applications Team – MKS Field Services Team – Outside Applications Team Industry Standard Technology – Field proven rugged FTIR analyzer – Industry leading software and analysis algorithms Financing Assistance Available – Capital partners MKS Confidential 13
- 14. Thank You!