Electron Beam
Machining (EBM)
Prof. Sachin N. Sawant
Introduction
• Invented in Germany in 1952 by Dr. K.
H. Steiger wald.
• EBM is a High-Energy-Beam Machining
process
• Electrical energy is used to generate
high-energy electrons
• The mechanism of material removal is
primarily by melting and rapid
vaporization due to intense heating by
the electrons
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Introduction
• Electron beam machining (EBM) is a thermal material removal process that utilizes a
focused beam of high-velocity electrons to perform high-speed drilling and cutting.
• Used with high power density to machine materials.
• The mechanism of material removal is primarily by melting and rapid vaporization due
to intense heating by the electrons
• Also known as “Electro-optical-thermal process”.
• Very high drilling rates are achievable.
• Can machine almost any material.
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• Electron beam machining (EBM) process is classified into two categories, viz ‘Thermal
type’ and ‘Non-thermal type’.
• In the thermal type EBM process, the surface of thermo electronic cathode is heated to
such a high temperature that the electrons acquire sufficient speed to escape out to the
space around the cathode.
• The stream of these large number of electrons moves as a small diameter beam of
electrons towards the anode.
• As a result, the workpiece is heated by the bombardment of these electrons in a localized
area, to such a high temperature that it is melted and vaporized at the point of
bombardment.
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• In the second type (non-thermal EBM) process, the electron beam is used to cause a
chemical reaction.
• The high velocity beam of electrons strikes the workpiece. The kinetic energy of
electrons converts into heat which is responsible for melting and vaporization of
workpiece material.
• This process can produce any shape of hole; however, round holes are usually
drilled in metals, ceramics, plastics, etc.
• It can machine electrically conducting as well as non-conducting materials. Before
machining starts, vacuum is created in the machining chamber
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Principle
• This machining process works on basic principle of conversion of kinetic energy of
electron into heat energy.
• When a high speed electron impinges on a work piece, they convert its kinetic energy
into heat energy.
• This heat energy used to vaporize material at contact surface.
• This process is carried out in vacuum otherwise the electron will collide with air
particle and loses its energy before impinging on work material.
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EBM process
• Electron beam (negatively charged
particles) is generated in an electron beam
gun.
• Electron beam gun provides high velocity
electrons over a very small spot size.
• Due to pattern of electrostatic field
produced by grid cup, electrons are
focused and made to flow in the form of a
converging beam through anode.
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EBM Process
• The diameter of the electron beam focused onto the work should be slightly smaller than the desired hole
diameter. As the electron beam strikes the workpiece, the material gets heated, melted and partly vaporized.
• On the exit side of the hole, the synthetic or organic backing material is used.
• The electron beam after complete penetration into the workpiece, also partly penetrates in the auxiliary
backing material.
• The backing material vaporizes and comes out of hole at a high pressure.
• The molten material is also expelled along with the vaporized backing material.
• In case of a non-circular hole to be produced, the electron beam is deflected with the help of the computer
control, along the perimeter of the hole to be produced.
• As an alternative method, the beam can be kept stationary but the work-table can be moved in the desired
path with the help of CNC.
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EBM Process
• Electron beam is generated in an electron beam gun.
• Electron beam gun provides high velocity electrons over a very small spot size.
• Electron Beam Machining is required to be carried out in vacuum.
• The high-energy focused electron beam is made to impinge on the work piece with a spot size of 10 –
100 μm.
• The kinetic energy of the high velocity electrons is converted to heat energy as the electrons strike the
work material
• The electrons are accelerated while passing through the anode by applying high voltage at anode.
• A magnetic deflection coil is used to make electron beam circular and to focus electron beam at a
point (localized heating).
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Mechanism of Material Removal
• Due to high power density instant melting and vaporization
starts and “melt – vaporization” front gradually progresses
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Mechanism of Material Removal
• Finally the molten material, if any at the top of the front, is expelled
from the cutting zone by the high vapour pressure at the lower part.
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The entire process occurs in a vacuum chamber because a collision between an
electron and an air molecule causes the electrons to scatter and thus loose their
energy and cutting ability .
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Sli.do
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EBM Equipment
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Schematic EBM
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Schematic EBM
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Cathode cartridge
• Tungsten/Tantalum
• High voltage is applied
• Temperature 2500oC
• Thermo-ionic emission of electrons
(Vacuum)- thermally induced flow
of electrons from surface.
• Negatively biased–repel the
electrons
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Annular Bias grids
• It is next element of EBM. It is just
after the electron gun.
• It is a anode which is connected by the
negative bias so the electron generated
by the cathode do not diverge from its
path and approach to the next
element.
• When the electrons leave this section,
the velocity of electron is almost half
the velocity of light.
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Anode
• Positively biased terminal
• Due to the potential difference b/w
cathode and anode the electrons
accelerates.
• Velocity is approx. half the velocity
of light – passing through anode.
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Magnetic Lenses
• After the anode, magnetic lenses are
provided which shape the beam and
does not allow to diverge electron or
reduce the divergence of beam.
• These lenses allow to pass only
convergent electron, thus a high
focused beam is obtained.
• They also capture low energy
electron, thus increase the quality of
beam.
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Electromagnetic lens
• Electromagnetic lens is used to
focus the electron beam at a
spot.
• They use to focus beam at a spot
on work piece so a high intense
beam reaches at work surface,
which produces more heat and
improve machining.
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Aperture
• Capture the stray electrons
present near the frame.
(Diverged low energy
electrons.)
• Captured electrons are then
set for obtaining a
concentrated beam of
electrons.
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Deflector Coils
• Deflect the electron beam by small
amount.
• Correct the beam in case of not
getting proper hold-ship.
• Improve the shape of the
machined holes
• Take care of all electrons moves in
series thus form a high intense
beam.
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Illuminating system & Telescope
• Both are used simultaneously
to align the electron beam with
the workpiece
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Slotted Disk
• To avoid obstruction of vapor of
metal into the optical window of
EBM.
• Allow Electron beam to pass but
not the vapors/metal fumes to
pass through it.
• Synchronized with the pulsed
Slotted Disc
beam.
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EBM Gun
• Electron beam gun is the heart of EBM.
• The basic functions of any electron beam gun are to generate free
electrons at the cathode, accelerate them to a sufficiently high
velocity and to focus them over a small spot size.
• Cathode is generally made of tungsten or tantalum. Such cathode
filaments are heated, often inductively, to a temperature of
around 25000C. Heating leads to thermo-ionic emission of
electrons.
• A combination of repelling forces from the negative cathode and
the attracting forces from the positive anode causes the free
electrons to be accelerated and directed toward the work piece.
• One of the major requirements of electron beam gun is
maintenance of desired vacuum.
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Construction of Electron Gun
1. Heater
• The heater converts the electric energy in the form of heat.
• It has a resistor which obstructs the flow of current and converts it into the thermal energy.
• The heater heats the cathode electrodes and emits the electrons.
2. Control Grid
• The control grid is a nickel cylinder. It is the metallic cup which has lower permeability steel.
• It is about 15 mm long and having the diameter of 15 mm. The hole of about 0.25 mm is drilled in
the cap of the grid for the flow of the electron.
• The intensity of electron beam passing through the grid depends upon the emission of electrons.
• The control grid is negative biasing due to which it controls the flow of electrons.
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Construction of Electron Gun
3. Pre-Accelerating & Accelerating Anode
• The pre-accelerating and accelerating anode accelerated the beams passing through the
gun.
• These anodes are connected to the high potential for accelerating the electrons.
4. Focusing Anode
• After passing through the pre-accelerating and accelerating electrodes, the electrons are
passing through the focusing anode.
• The focusing anode produces the beams of sharply focus electrons.
• The electrons gun are placed inside the glass tube so that the electron beam did not
interact with the air molecules.
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